| Patent | Date |
|---|
Defect inspection device and defect inspection method
Grant 10,228,332 - Honda , et al. | 2019-03-12 |
Method and device for detecting defects and method and device for observing defects
Grant 9,683,946 - Otani , et al. June 20, 2 | 2017-06-20 |
Defect Inspection Device and Defect Inspection Method
App 20170146463 - HONDA; Toshifumi ; et al. | 2017-05-25 |
Defect inspection apparatus and defect inspection method
Grant 9,588,055 - Urano , et al. March 7, 2 | 2017-03-07 |
Method and apparatus for inspecting defect
Grant 9,535,013 - Matsumoto , et al. January 3, 2 | 2017-01-03 |
Defect inspection method and device thereof
Grant 9,255,793 - Shibata , et al. February 9, 2 | 2016-02-09 |
Optical filtering device, defect inspection method and apparatus therefor
Grant 9,182,592 - Ueno , et al. November 10, 2 | 2015-11-10 |
Method And Device For Detecting Defects And Method And Device For Observing Defects
App 20150276622 - Otani; Yuko ; et al. | 2015-10-01 |
Defect inspection device and defect inspection method
Grant 9,019,492 - Taniguchi , et al. April 28, 2 | 2015-04-28 |
Defect Inspection Apparatus And Defect Inspection Method
App 20150062581 - Urano; Yuta ; et al. | 2015-03-05 |
Defect inspecting apparatus and defect inspecting method
Grant 8,970,836 - Taniguchi , et al. March 3, 2 | 2015-03-03 |
Defect inspection method and apparatus therefor
Grant 8,885,037 - Taniguchi , et al. November 11, 2 | 2014-11-11 |
Defect inspecting apparatus and defect inspecting method
Grant 8,830,465 - Taniguchi , et al. September 9, 2 | 2014-09-09 |
Defect Inspecting Apparatus and Defect Inspecting Method
App 20140233024 - Taniguchi; Atsushi ; et al. | 2014-08-21 |
Method of defect inspection and device of defect inspection
Grant 8,804,112 - Shibata , et al. August 12, 2 | 2014-08-12 |
Optical Filtering Device, Defect Inspection Method and Apparatus Therefor
App 20140160471 - Ueno; Taketo ; et al. | 2014-06-12 |
Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus
Grant 8,681,328 - Taniguchi , et al. March 25, 2 | 2014-03-25 |
Defect inspection system
Grant 8,660,336 - Ueno , et al. February 25, 2 | 2014-02-25 |
Defect Inspection Device And Defect Inspection Method
App 20130242294 - Taniguchi; Atsushi ; et al. | 2013-09-19 |
Defect Inspecting Apparatus And Defect Inspecting Method
App 20130188184 - Taniguchi; Atsushi ; et al. | 2013-07-25 |
Method And Apparatus For Inspecting Defect
App 20130114880 - Matsumoto; Shunichi ; et al. | 2013-05-09 |
Defect Inspection System
App 20130058558 - UENO; Taketo ; et al. | 2013-03-07 |
Defect Inspection Method And Device Thereof
App 20120296576 - Shibata; Yukihiro ; et al. | 2012-11-22 |
Method of apparatus for detecting particles on a specimen
Grant 8,289,507 - Hamamatsu , et al. October 16, 2 | 2012-10-16 |
Defect inspection system
Grant 8,275,189 - Ueno , et al. September 25, 2 | 2012-09-25 |
Method Of Defect Inspection And Device Of Defect Inspection
App 20120092657 - Shibata; Yukihiro ; et al. | 2012-04-19 |
Defect Inspection Method And Apparatus Therefor
App 20120092484 - Taniguchi; Atsushi ; et al. | 2012-04-19 |
Dark-field Defect Inspecting Method, Dark-field Defect Inspecting Apparatus, Aberration Analyzing Method, And Aberration Analyzing Apparatus
App 20110286001 - Taniguchi; Atsushi ; et al. | 2011-11-24 |
Method Of Apparatus For Detecting Particles On A Specimen
App 20110228258 - HAMAMATSU; Akira ; et al. | 2011-09-22 |
Method of apparatus for detecting particles on a specimen
Grant 7,952,700 - Hamamatsu , et al. May 31, 2 | 2011-05-31 |
Defect Inspection System
App 20110069895 - Ueno; Taketo ; et al. | 2011-03-24 |
Method Of Apparatus For Detecting Particles On A Specimen
App 20110032515 - HAMAMATSU; Akira ; et al. | 2011-02-10 |
Defect inspection system
Grant 7,881,520 - Ueno , et al. February 1, 2 | 2011-02-01 |
Method of apparatus for detecting particles on a specimen
Grant 7,817,261 - Hamamatsu , et al. October 19, 2 | 2010-10-19 |
Method and apparatus for inspecting a semiconductor device
Grant 7,643,140 - Ueno , et al. January 5, 2 | 2010-01-05 |
Method And Apparatus For Inspecting A Semiconductor Device
App 20080239289 - UENO; Taketo ; et al. | 2008-10-02 |
Method Of Apparatus For Detecting Particles On A Specimen
App 20080204724 - Hamamatsu; Akira ; et al. | 2008-08-28 |
Method of apparatus for detecting particles on a specimen
Grant 7,369,223 - Hamamatsu , et al. May 6, 2 | 2008-05-06 |
Method And Apparatus For Detecting Defects
App 20080068593 - NAKANO; HIROYUKI ; et al. | 2008-03-20 |
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
Grant 7,271,908 - Noguchi , et al. September 18, 2 | 2007-09-18 |
Defect inspection system
App 20070053581 - Ueno; Taketo ; et al. | 2007-03-08 |
Method of apparatus for detecting particles on a specimen
App 20050213086 - Hamamatsu, Akira ; et al. | 2005-09-29 |
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
App 20050206898 - Noguchi, Minori ; et al. | 2005-09-22 |
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
Grant 6,897,956 - Noguchi , et al. May 24, 2 | 2005-05-24 |
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device
App 20030160960 - Noguchi, Minori ; et al. | 2003-08-28 |
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