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Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method Grant 7,233,094 - Akiyama , et al. June 19, 2 | 2007-06-19 |
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Piezoelectric device comprising ultrahighly-orientated aluminum nitride thin film and its manufacturing method App 20050236710 - Akiyama, Morito ;   et al. | 2005-10-27 |
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Flow rate-controlling method and microvalve therefor Grant 6,536,476 - Ueno , et al. March 25, 2 | 2003-03-25 |
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