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Field cooperation system and management device
Grant 11,395,102 - Hishinuma , et al. July 19, 2 | 2022-07-19 |
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device
App 20220122859 - MURATA; Hitoshi ; et al. | 2022-04-21 |
Method Of Manufacturing Semiconductor Device And Apparatus For Manufacturing Semiconductor Device
App 20220122858 - MURATA; Hitoshi ; et al. | 2022-04-21 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
App 20210407865 - SHINOZAKI; Kenji ; et al. | 2021-12-30 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
App 20210313205 - SUGIURA; Shinobu ; et al. | 2021-10-07 |
Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support
Grant 11,049,742 - Yamaguchi , et al. June 29, 2 | 2021-06-29 |
Cooling unit, heat insulating structure, and substrate processing apparatus
Grant 11,043,402 - Kosugi , et al. June 22, 2 | 2021-06-22 |
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
App 20210181033 - AKAO; Tokunobu ; et al. | 2021-06-17 |
Field Cooperation System And Management Device
App 20210029497 - HISHINUMA; Tomomi ; et al. | 2021-01-28 |
Heater, Temperature Control System, And Processing Apparatus
App 20200393197 - KOSUGI; Tetsuya ; et al. | 2020-12-17 |
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, And Control Program
App 20200333766 - SUGISHITA; Masashi ; et al. | 2020-10-22 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support
App 20190355630 - YAMAGUCHI; Hideto ; et al. | 2019-11-21 |
Substrate processing apparatus including heating and cooling device, and ceiling part included in the same
Grant 10,415,136 - Takewaki , et al. Sept | 2019-09-17 |
Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support
Grant 10,418,293 - Yamaguchi , et al. Sept | 2019-09-17 |
Electric furnace for substrate processing apparatus
Grant D860,420 - Kosugi , et al. Sept | 2019-09-17 |
Electric furnace for substrate processing apparatus
Grant D860,419 - Kosugi , et al. Sept | 2019-09-17 |
Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
App 20190276938 - SUGISHITA; Masashi ; et al. | 2019-09-12 |
Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device
Grant 10,340,151 - Kosugi , et al. | 2019-07-02 |
Cooling Unit, Heat Insulating Structure, And Substrate Processing Apparatus
App 20190080941 - KOSUGI; Tetsuya ; et al. | 2019-03-14 |
Protector tube for thermocouple
Grant D819,463 - Akao , et al. June 5, 2 | 2018-06-05 |
Protector tube for thermocouple
Grant D818,850 - Akao , et al. May 29, 2 | 2018-05-29 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support
App 20180040520 - YAMAGUCHI; Hideto ; et al. | 2018-02-08 |
Thermometry tool for substrate processing apparatus
Grant D803,075 - Akao , et al. November 21, 2 | 2017-11-21 |
Heater supporting device
Grant 9,779,970 - Kosugi , et al. October 3, 2 | 2017-10-03 |
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate
Grant 9,695,511 - Murata , et al. July 4, 2 | 2017-07-04 |
Substrate Processing Apparatus
App 20170186634 - YANAGISAWA; Yoshihiko ; et al. | 2017-06-29 |
Insulation structure and method of manufacturing semiconductor device
Grant 9,587,884 - Kosugi , et al. March 7, 2 | 2017-03-07 |
Substrate Processing Apparatus And Ceiling Part
App 20160376701 - TAKEWAKI; Motoya ; et al. | 2016-12-29 |
Substrate processing apparatus capable of switching control mode of heater
Grant 9,418,881 - Sugiura , et al. August 16, 2 | 2016-08-16 |
Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device
Grant 9,269,638 - Kosugi , et al. February 23, 2 | 2016-02-23 |
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, And Control Program
App 20150370245 - SUGISHITA; Masashi ; et al. | 2015-12-24 |
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
Grant 9,184,069 - Hayashida , et al. November 10, 2 | 2015-11-10 |
Substrate Processing Apparatus, Heating Apparatus, Ceiling Heat Insulator, And Method Of Manufacturing Semiconductor Device
App 20150221532 - KOSUGI; Tetsuya ; et al. | 2015-08-06 |
Heating device, substrate processing apparatus, and method of manufacturing semiconductor device
Grant 9,064,912 - Murata , et al. June 23, 2 | 2015-06-23 |
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate
App 20150093909 - MURATA; Hitoshi ; et al. | 2015-04-02 |
Temperature Detecting Apparatus, Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20140342474 - KOSUGI; Tetsuya ; et al. | 2014-11-20 |
Insulation Structure And Method Of Manufacturing Semiconductor Device
App 20140287375 - KOSUGI; Tetsuya ; et al. | 2014-09-25 |
Temperature detecting apparatus, substrate processing apparatus and method of manufacturing semiconductor device
Grant 8,822,240 - Kosugi , et al. September 2, 2 | 2014-09-02 |
Heat treatment apparatus and method of manufacturing semiconductor device
Grant 8,734,148 - Yamazaki , et al. May 27, 2 | 2014-05-27 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Thermocouple Support
App 20140120636 - YAMAGUCHI; Hideto ; et al. | 2014-05-01 |
Substrate processing method and film forming method
Grant 8,507,296 - Ueno , et al. August 13, 2 | 2013-08-13 |
Substrate processing apparatus and substrate processing method
Grant 8,501,599 - Ueno , et al. August 6, 2 | 2013-08-06 |
Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method
Grant 8,417,394 - Sugishita , et al. April 9, 2 | 2013-04-09 |
Temperature adjustment method
Grant 8,367,975 - Sugishita , et al. February 5, 2 | 2013-02-05 |
Temperature Detecting Apparatus, Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device
App 20130017628 - KOSUGI; Tetsuya ; et al. | 2013-01-17 |
Substrate Processing Apparatus, Temperature Controlling Method Of Substrate Processing Apparatus, And Heating Method Of Substrate Processing Apparatus
App 20120094010 - SUGIURA; Shinobu ; et al. | 2012-04-19 |
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
Grant 8,158,911 - Hayashida , et al. April 17, 2 | 2012-04-17 |
Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method
Grant 8,148,271 - Ueno , et al. April 3, 2 | 2012-04-03 |
Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
Grant 8,116,618 - Hayashida , et al. February 14, 2 | 2012-02-14 |
Heater Supporting Device
App 20110281226 - KOSUGI; Tetsuya ; et al. | 2011-11-17 |
Heat Treatment Apparatus And Method Of Manufacturing Semiconductor Device
App 20110207339 - YAMAZAKI; Keishin ; et al. | 2011-08-25 |
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
Grant 7,930,059 - Sugishita , et al. April 19, 2 | 2011-04-19 |
Heating Device, Substrate Processing Apparatus, And Method Of Manufacturing Semiconductor Device
App 20110021039 - MURATA; Hitoshi ; et al. | 2011-01-27 |
Substrate Processing Apparatus
App 20100154711 - ISHIBASHI; Kiyohisa ; et al. | 2010-06-24 |
Substrate processing method and semiconductor manufacturing apparatus
Grant 7,727,780 - Sugishita , et al. June 1, 2 | 2010-06-01 |
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method And Temperature Controlling Method
App 20100124726 - Sugishita; Masashi ; et al. | 2010-05-20 |
Substrate processing apparatus having gas side flow via gas inlet
Grant 7,700,054 - Hayashida , et al. April 20, 2 | 2010-04-20 |
Substrate Processing Apparatus, Coolant Gas Supply Nozzle and Semiconductor Device Manufacturing Method
App 20090291566 - Ueno; Masaaki ; et al. | 2009-11-26 |
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
Grant 7,577,493 - Sugishita , et al. August 18, 2 | 2009-08-18 |
Substrate processing method and film forming method
App 20090197352 - Ueno; Masaaki ; et al. | 2009-08-06 |
Temperature regulating method, thermal processing system and semiconductor device manufacturing method
App 20090187268 - Sugishita; Masashi ; et al. | 2009-07-23 |
Temperature Adjustment Method
App 20090107978 - Sugishita; Masashi ; et al. | 2009-04-30 |
Semiconductor Manufacturing Apparatus And Substrate Processing Method
App 20090095422 - SUGISHITA; Masashi ; et al. | 2009-04-16 |
Substrate Processing Apparatus and Substrate Processing Method
App 20090029486 - Ueno; Masaaki ; et al. | 2009-01-29 |
Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices
App 20090016706 - Hayashida; Akira ; et al. | 2009-01-15 |
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member
App 20090014428 - Hayashida; Akira ; et al. | 2009-01-15 |
Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and insulator
App 20090014435 - Hayashida; Akira ; et al. | 2009-01-15 |
Substrate processing method and semiconductor manufacturing apparatus
App 20080182345 - Sugishita; Masashi ; et al. | 2008-07-31 |
Substrate processing apparatus, method of manufacturing semiconductor device, and heating apparatus
App 20080153314 - Hayashida; Akira ; et al. | 2008-06-26 |
Substrate processing equipment
Grant 7,346,273 - Tanaka , et al. March 18, 2 | 2008-03-18 |
Temperature Regulating Method, Thermal Processing System and Semiconductor Device Manufacturing Method
App 20080046110 - Sugishita; Masashi ; et al. | 2008-02-21 |
Substrate processing apparatus and substrate processing method
App 20060188240 - Tanaka; Kazuo ; et al. | 2006-08-24 |
Method and apparatus for controlling a semiconductor fabrication temperature
App 20050266685 - Nakano, Minoru ; et al. | 2005-12-01 |
Temperature control method and semiconductor device manufacturing method
Grant 6,767,752 - Nakano , et al. July 27, 2 | 2004-07-27 |
Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device
Grant 6,746,908 - Tanaka , et al. June 8, 2 | 2004-06-08 |
System and program for estimating person-hours required to prepare a pattern film of a circuit to be printed on a board
Grant 6,662,353 - Yamamoto , et al. December 9, 2 | 2003-12-09 |
System and program for estimating person-hours required to prepare a pattern film of a circuit to be printed on a board
App 20030088846 - Yamamoto, Junichi ; et al. | 2003-05-08 |
Temperature control method and semiconductor device manufacturing method
App 20030040198 - Nakano, Minoru ; et al. | 2003-02-27 |
Information output service system
App 20030033371 - Ueno, Masaaki | 2003-02-13 |
Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device
App 20020055080 - Tanaka, Kazuo ; et al. | 2002-05-09 |
Apparatus and method for recording characters so as to enable reading thereof in a feed direction of a recording sheet therefor
Grant 3,945,019 - Ueno , et al. March 16, 1 | 1976-03-16 |
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