Ueno; Kinya
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ueno; Kinya.The latest application filed is for "substrate processing apparatus for resist film removal".
- Ueno; Kinya - Nirasaki-Shi JP
- Ueno; Kinya - Nirasaki JP
| Patent | Date |
|---|---|
| Substrate processing apparatus for resist film removal App 20070204885 - Toshima; Takayuki ; et al. | 2007-09-06 |
| Substrate processing apparatus for resist film removal Grant 7,191,785 - Toshima , et al. March 20, 2 | 2007-03-20 |
| Substrate processing method and apparatus App 20050011537 - Toshima, Takayuki ; et al. | 2005-01-20 |
| Apparatus for and method of cleaning objects to be processed Grant 6,746,543 - Kamikawa , et al. June 8, 2 | 2004-06-08 |
| Substrate processing method and apparatus Grant 6,613,692 - Toshima , et al. September 2, 2 | 2003-09-02 |
| Apparatus for and method of cleaning objects to be processed App 20030159718 - Kamikawa, Yuji ; et al. | 2003-08-28 |
| Apparatus for and method of cleaning object to be processed App 20020017315 - Kamikawa, Yuji ; et al. | 2002-02-14 |
| Method of cleaning objects to be processed Grant 6,342,104 - Kamikawa , et al. January 29, 2 | 2002-01-29 |
| Substrate processing apparatus and substrate processing method App 20010045224 - Kamikawa, Yuji ; et al. | 2001-11-29 |
| Substrate processing apparatus and substrate processing method Grant 6,299,696 - Kamikawa , et al. October 9, 2 | 2001-10-09 |
| Substrate processing apparatus and substrate processing method App 20010004898 - Kamikawa, Yuji ; et al. | 2001-06-28 |
| Apparatus for and method of cleaning object to be processed Grant 6,131,588 - Kamikawa , et al. October 17, 2 | 2000-10-17 |
| Apparatus for and method of cleaning objects to be processed Grant 6,045,624 - Kamikawa , et al. April 4, 2 | 2000-04-04 |
| Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus Grant 6,001,191 - Kamikawa , et al. December 14, 1 | 1999-12-14 |
| Apparatus and method for drying substrates Grant 5,940,985 - Kamikawa , et al. August 24, 1 | 1999-08-24 |
| Spin cleaning method Grant 5,882,433 - Ueno March 16, 1 | 1999-03-16 |
| Method for washing wafers Grant 5,421,905 - Ueno , et al. June 6, 1 | 1995-06-06 |
| Cleaning device Grant 5,236,515 - Ueno , et al. August 17, 1 | 1993-08-17 |
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