Uemura; Tsunesaburo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Uemura; Tsunesaburo.The latest application filed is for "exposure apparatus with laser source requiring new gas introduction".
- Uemura; Tsunesaburo - Tokyo JP
| Patent | Date |
|---|---|
| Exposure apparatus with laser source requiring new gas introduction Grant 5,383,217 - Uemura January 17, 1 | 1995-01-17 |
| Laser processor Grant 5,010,230 - Uemura April 23, 1 | 1991-04-23 |
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