| Patent | Date |
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Charged particle beam apparatus
Grant 11,361,936 - Muraki , et al. June 14, 2 | 2022-06-14 |
Charged Particle Beam Apparatus And Control Method Thereof
App 20220084785 - MURAKI; Ayana ; et al. | 2022-03-17 |
Charged particle beam apparatus
Grant 11,239,046 - Muraki , et al. February 1, 2 | 2022-02-01 |
Charged particle beam apparatus and control method thereof
Grant 11,177,113 - Muraki , et al. November 16, 2 | 2021-11-16 |
Automatic Sample Preparation Apparatus
App 20210341362 - Uemoto; Atsushi ; et al. | 2021-11-04 |
Focused ion beam apparatus
Grant 11,133,149 - Mochizuki , et al. September 28, 2 | 2021-09-28 |
Charged Particle Beam Apparatus
App 20210296084 - KIYOHARA; Masahiro ; et al. | 2021-09-23 |
Automatic sample preparation apparatus and automatic sample preparation method
Grant 11,073,453 - Uemoto , et al. July 27, 2 | 2021-07-27 |
Focused Ion Beam Apparatus
App 20210090849 - ISHII; Haruyuki ; et al. | 2021-03-25 |
Charged Particle Beam Apparatus
App 20210090851 - MURAKI; Ayana ; et al. | 2021-03-25 |
Charged Particle Beam Apparatus
App 20210090850 - MURAKI; Ayana ; et al. | 2021-03-25 |
Focused Ion Beam Apparatus
App 20210090854 - MOCHIZUKI; Toshihiro ; et al. | 2021-03-25 |
Automatic Sample Preparation Apparatus And Automatic Sample Preparation Method
App 20200355589 - Uemoto; Atsushi ; et al. | 2020-11-12 |
Charged Particle Beam Apparatus And Control Method Thereof
App 20200312617 - MURAKI; Ayana ; et al. | 2020-10-01 |
Automatic Sample Preparation Apparatus
App 20200278281 - Uemoto; Atsushi ; et al. | 2020-09-03 |
Automatic sample preparation apparatus
Grant 10,677,697 - Uemoto , et al. | 2020-06-09 |
Charged particle beam apparatus
Grant 10,658,147 - Sato , et al. | 2020-05-19 |
Portable information terminal, beam irradiation system, and program
Grant 10,485,087 - Aso , et al. Nov | 2019-11-19 |
Method for cross-section processing and observation and apparatus therefor
Grant 10,242,842 - Man , et al. | 2019-03-26 |
Charged particle beam apparatus
Grant 10,236,159 - Tomimatsu , et al. | 2019-03-19 |
Automatic Sample Preparation Apparatus
App 20190025167 - Uemoto; Atsushi ; et al. | 2019-01-24 |
Sample positioning method and charged particle beam apparatus
Grant 10,186,398 - Kiyohara , et al. Ja | 2019-01-22 |
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
Grant 10,096,449 - Man , et al. October 9, 2 | 2018-10-09 |
Portable Information Terminal, Beam Irradiation System, And Program
App 20180288865 - ASO; Takuma ; et al. | 2018-10-04 |
Automatic sample preparation apparatus
Grant 10,088,401 - Uemoto , et al. October 2, 2 | 2018-10-02 |
Cross-section processing and observation method and cross-section processing and observation apparatus
Grant 9,966,226 - Uemoto , et al. May 8, 2 | 2018-05-08 |
Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium
Grant 9,934,938 - Uemoto , et al. April 3, 2 | 2018-04-03 |
Method For Cross-section Processing And Observation And Apparatus Therefor
App 20170278668 - MAN; Xin ; et al. | 2017-09-28 |
Charged Particle Beam Apparatus
App 20170278664 - SATO; Makoto ; et al. | 2017-09-28 |
Charged particle beam apparatus
Grant 9,741,535 - Torikawa , et al. August 22, 2 | 2017-08-22 |
Charged Particle Beam Apparatus
App 20170178858 - TOMIMATSU; Satoshi ; et al. | 2017-06-22 |
Automatic Sample Preparation Apparatus
App 20170122852 - Uemoto; Atsushi ; et al. | 2017-05-04 |
Charged particle beam apparatus
Grant 9,620,333 - Tomimatsu , et al. April 11, 2 | 2017-04-11 |
Sample Positioning Method And Charged Particle Beam Apparatus
App 20170092460 - KIYOHARA; Masahiro ; et al. | 2017-03-30 |
Cross section processing method and cross section processing apparatus
Grant 9,548,185 - Suzuki , et al. January 17, 2 | 2017-01-17 |
Cross-section Processing-and-observation Method And Cross-section Processing-and-observation Apparatus
App 20160343541 - MAN; Xin ; et al. | 2016-11-24 |
Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus
Grant 9,368,323 - Uemoto , et al. June 14, 2 | 2016-06-14 |
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus
Grant 9,347,896 - Man , et al. May 24, 2 | 2016-05-24 |
Charged particle beam apparatus
Grant 9,336,987 - Torikawa , et al. May 10, 2 | 2016-05-10 |
Charged particle beam apparatus
Grant 9,318,303 - Man , et al. April 19, 2 | 2016-04-19 |
Charged Particle Beam Apparatus
App 20160093467 - TORIKAWA; Shota ; et al. | 2016-03-31 |
Sample observation method, sample preparation method, and charged particle beam apparatus
Grant 9,287,087 - Man , et al. March 15, 2 | 2016-03-15 |
Charged Particle Beam Apparatus
App 20160064187 - TOMIMATSU; Satoshi ; et al. | 2016-03-03 |
Charged particle beam apparatus having needle probe that tracks target position changes
Grant 9,275,827 - Uemoto , et al. March 1, 2 | 2016-03-01 |
Charged particle beam apparatus
Grant 9,245,713 - Man , et al. January 26, 2 | 2016-01-26 |
Charged particle beam apparatus having improved needle movement control
Grant 9,218,937 - Uemoto , et al. December 22, 2 | 2015-12-22 |
Charged particle beam apparatus and sample processing method using charged particle beam apparatus
Grant 9,202,671 - Man , et al. December 1, 2 | 2015-12-01 |
Cross-section Processing And Observation Method And Cross-section Processing And Observation Apparatus
App 20150262788 - UEMOTO; Atsushi ; et al. | 2015-09-17 |
Charged Particle Beam Apparatus
App 20150228451 - UEMOTO; Atsushi ; et al. | 2015-08-13 |
Charged Particle Beam Apparatus
App 20150228450 - UEMOTO; Atsushi ; et al. | 2015-08-13 |
Charged Particle Beam Apparatus
App 20150221473 - TORIKAWA; Shota ; et al. | 2015-08-06 |
Charged Particle Beam Device, Control Method For Charged Particle Beam Device, And Cross-section Processing Observation Apparatus
App 20150206702 - UEMOTO; Atsushi ; et al. | 2015-07-23 |
Cross-section processing and observation method and cross-section processing and observation apparatus
Grant 9,080,945 - Uemoto , et al. July 14, 2 | 2015-07-14 |
Composite charged particle beam apparatus
Grant 9,024,280 - Uemoto , et al. May 5, 2 | 2015-05-05 |
Cross Section Processing Method And Cross Section Processing Apparatus
App 20150115156 - SUZUKI; Hidekazu ; et al. | 2015-04-30 |
Cross-section Processing-and-observation Method And Cross-section Processing-and-observation Apparatus
App 20150060664 - MAN; Xin ; et al. | 2015-03-05 |
Charged Particle Beam Apparatus
App 20150060668 - MAN; Xin ; et al. | 2015-03-05 |
Charged Particle Beam Apparatus
App 20150060695 - MAN; Xin ; et al. | 2015-03-05 |
Focused Ion Beam Apparatus, Method For Observing Cross-section Of Sample By Using The Same, And Storage Medium
App 20140291508 - UEMOTO; Atsushi ; et al. | 2014-10-02 |
Charged Particle Beam Apparatus And Sample Processing Method Using Charged Particle Beam Apparatus
App 20140291511 - MAN; Xin ; et al. | 2014-10-02 |
Cross-section Processing And Observation Method And Cross-section Processing And Observation Apparatus
App 20140131575 - UEMOTO; Atsushi ; et al. | 2014-05-15 |
Electron microscope and specimen analyzing method
Grant 8,664,598 - Hasuda , et al. March 4, 2 | 2014-03-04 |
Composite charged particle beam apparatus
Grant 8,642,980 - Man , et al. February 4, 2 | 2014-02-04 |
Composite Charged Particle Beam Apparatus
App 20130248735 - MAN; Xin ; et al. | 2013-09-26 |
Sample Observation Method, Sample Preparation Method, And Charged Particle Beam Apparatus
App 20130248707 - MAN; Xin ; et al. | 2013-09-26 |
Composite Charged Particle Beam Apparatus
App 20130075606 - UEMOTO; Atsushi ; et al. | 2013-03-28 |
Electron microscope and specimen analyzing method
App 20110186734 - Hasuda; Masakatsu ; et al. | 2011-08-04 |
Method of correcting opaque defect of photomask using atomic force microscope fine processing device
Grant 7,571,639 - Doi , et al. August 11, 2 | 2009-08-11 |
Photomask Defect Correction Device And Photomask Defect Correction Method
App 20090092905 - Nakaue; Takuya ; et al. | 2009-04-09 |
Photomask Defect Correction Device And Photomask Defect Correction Method
App 20090038383 - Nakaue; Takuya ; et al. | 2009-02-12 |
Photomask Defect-shape Recognition Apparatus, Photomask Defect-shape Recognition Method, And Photomask Defect Correction Method
App 20090028420 - Nakaue; Takuya ; et al. | 2009-01-29 |
Working method using scanning probe
Grant 7,442,925 - Yasutake , et al. October 28, 2 | 2008-10-28 |
Method of correcting opaque defect of photomask using atomic force microscope fine processing device
App 20070281222 - Doi; Toshio ; et al. | 2007-12-06 |
Processing method using atomic force microscope microfabrication device
App 20070278177 - Kondo; Kazushige ; et al. | 2007-12-06 |
Working method using scanning probe
App 20060219901 - Yasutake; Masatoshi ; et al. | 2006-10-05 |
Scanning charged particle microscope
Grant 6,852,973 - Suzuki , et al. February 8, 2 | 2005-02-08 |
Scanning charged particle microscope
App 20040021074 - Suzuki, Hidekazu ; et al. | 2004-02-05 |
Scanning microscope and inspection method employing the scanning microscope
App 20040022429 - Suzuki, Hidekazu ; et al. | 2004-02-05 |
Automatic focusing system for scanning electron microscope equipped with laser defect detection function
Grant 6,621,082 - Morita , et al. September 16, 2 | 2003-09-16 |
Automatic focusing system for scanning electron microscope equipped with laser defect detection function
App 20030006372 - Morita, Seiji ; et al. | 2003-01-09 |
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