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Patent applications and USPTO patent grants for Uehara; Toshio.The latest application filed is for "electrostatic force detector with improved shielding and method of using an electrostatic force detector".
Patent | Date |
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System and method for clamping a work piece Grant 11,282,732 - Uehara , et al. March 22, 2 | 2022-03-22 |
Electrostatic Force Detector With Improved Shielding And Method Of Using An Electrostatic Force Detector App 20190072519 - Uehara; Toshio ;   et al. | 2019-03-07 |
System And Method For Clamping A Work Piece App 20170162415 - Uehara; Toshio ;   et al. | 2017-06-08 |
Dielectric layer for electrostatic chuck and electrostatic chuck Grant 9,120,704 - Tsutsumi , et al. September 1, 2 | 2015-09-01 |
Dielectric Layer For Electrostatic Chuck And Electrostatic Chuck App 20140103612 - Tsutsumi; Kouta ;   et al. | 2014-04-17 |
Electrostatic clamp optimizer Grant 8,514,544 - McAnn , et al. August 20, 2 | 2013-08-20 |
Method and device for moving a sensor close to a surface App 20130085714 - Itoh; Akiyoshi ;   et al. | 2013-04-04 |
Electrostatic Clamp Optimizer App 20110032654 - McAnn; Peter ;   et al. | 2011-02-10 |
Platen for electrostatic wafer clamping apparatus Grant 6,660,665 - Yanagida , et al. December 9, 2 | 2003-12-09 |
Platen For Electrostatic Wafer Clamping Apparatus App 20030207596 - Yanagida, Hiroaki ;   et al. | 2003-11-06 |
Packaging for automated supply of a brushless motor Grant 6,624,540 - Fukuda , et al. September 23, 2 | 2003-09-23 |
Sensor for non-contacting electrostatic detector Grant 6,600,323 - Kieres , et al. July 29, 2 | 2003-07-29 |
Sensor for non-contacting electrostatic detector App 20030042907 - Kieres, Jerzy ;   et al. | 2003-03-06 |
Brushless motor and its assembly method App 20020079762 - Fukuda, Yoshiaki ;   et al. | 2002-06-27 |
Brushless motor and its assembly method App 20020047385 - Fukuda, Yoshiaki ;   et al. | 2002-04-25 |
Method and apparatus for subsection analysis using computed tomography Grant 4,189,775 - Inouye , et al. February 19, 1 | 1980-02-19 |
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