UEDA; Tatsushi

Patent Applications and Registrations

Patent applications and USPTO patent grants for UEDA; Tatsushi.The latest application filed is for "method of manufacturing semiconductor device, method of processing substrate, recording medium, and substrate processing apparatus".

Company Profile

3.12.23

UEDA; Tatsushi - Toyama-shi JP
UEDA; Tatsushi - Toyama JP
Ueda; Tatsushi - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, Recording Medium, And Substrate Processing Apparatus App 20220301863 - UEDA; Tatsushi ; et al.	2022-09-22
Substrate Processing Apparatus, Non-transitory Computer-readable Recording Medium, Substrate Processing Method and Method of Manufacturing Semiconductor Device App 20220301850 - KURIBAYASHI; Koei ; et al.	2022-09-22
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus App 20220139675 - YAMAKADO; Yuki ; et al.	2022-05-05
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20220084816 - ICHIMURA; Keita ; et al.	2022-03-17
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20220005673 - TSUBOTA; Yasutoshi ; et al.	2022-01-06
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20210305045 - UEDA; Tatsushi ; et al.	2021-09-30
Method of manufacturing semiconductor device, and recording medium Grant 11,081,362 - Yamakado , et al. August 3, 2	2021-08-03
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium App 20210183645 - IGAWA; Hiroto ; et al.	2021-06-17
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20200211858 - NAKAYAMA; Masanori ; et al.	2020-07-02
Method Of Manufacturing Semiconductor Device, And Recording Medium App 20200098587 - YAMAKADO; Yuki ; et al.	2020-03-26
Substrate processing apparatus Grant 10,546,761 - Ueda Ja	2020-01-28
Substrate processing method and substrate processing apparatus Grant 10,192,735 - Ueda , et al. Ja	2019-01-29
Substrate Processing Method And Substrate Processing Apparatus App 20170338106 - UEDA; Tatsushi ; et al.	2017-11-23
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,786,493 - Ueda , et al. October 10, 2	2017-10-10
Substrate processing method and substrate processing apparatus Grant 9,754,780 - Ueda , et al. September 5, 2	2017-09-05
Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substrates Grant 9,748,132 - Harada , et al. August 29, 2	2017-08-29
Substrate Processing Apparatus App 20170243764 - UEDA; Tatsushi	2017-08-24
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20160284532 - UEDA; Tatsushi ; et al.	2016-09-29
Substrate Processing Apparatus App 20160153085 - UEDA; Tatsushi	2016-06-02
Substrate Processing Method And Substrate Processing Apparatus App 20160086797 - UEDA; Tatsushi ; et al.	2016-03-24
Semiconductor device manufacturing method, substrate processing apparatus, and non-transitory recording medium Grant 9,257,271 - Ueda February 9, 2	2016-02-09
Substrate processing method and substrate processing apparatus Grant 9,236,242 - Ueda , et al. January 12, 2	2016-01-12
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20140087567 - TOYODA; Kazuyuki ; et al.	2014-03-27
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus, And Non-transitory Recording Medium App 20130252433 - UEDA; Tatsushi	2013-09-26
Substrate Processing Method And Substrate Processing Apparatus App 20130095669 - UEDA; Tatsushi ; et al.	2013-04-18
Substrate processing method and substrate processing apparatus Grant 8,334,215 - Ueda , et al. December 18, 2	2012-12-18
Substrate Processing Apparatus, Method For Manufacturing Semiconductor Device, Method For Processing Substrates App 20120252220 - HARADA; Koichiro ; et al.	2012-10-04
Substrate processing method and substrate processing apparatus Grant 8,066,894 - Ueda , et al. November 29, 2	2011-11-29
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus Grant 7,651,954 - Ueda January 26, 2	2010-01-26
Substrate processing method and substrate processing apparatus App 20090169768 - Ueda; Tatsushi ; et al.	2009-07-02
Substrate Processing Method and Substrate Processing Apparatus App 20080138994 - Ueda; Tatsushi ; et al.	2008-06-12
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus App 20080124941 - Ueda; Tatsushi	2008-05-29
Method and apparatus for processing substrates App 20070062646 - Ogawa; Unryu ; et al.	2007-03-22
Method and apparatus for processing substrates App 20020036066 - Ogawa, Unryu ; et al.	2002-03-28

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