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Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium Grant 7,686,673 - Senga , et al. March 30, 2 | 2010-03-30 |
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Controlling apparatus for high frequency high voltage power source for corona discharge processing Grant 5,486,993 - Sakurai , et al. January 23, 1 | 1996-01-23 |