| Patent | Date |
|---|
Workpiece placement apparatus and processing apparatus
Grant 11,410,871 - Uchida , et al. August 9, 2 | 2022-08-09 |
Capillary Guide Device And Wire Bonding Apparatus
App 20220134468 - UCHIDA; Yohei | 2022-05-05 |
Electrostatic Chuck, Focus Ring, Support Base, Plasma Processing Apparatus, And Plasma Processing Method
App 20210366694 - SASAKI; Yasuharu ; et al. | 2021-11-25 |
Mounting Base, Substrate Processing Device, Edge Ring, And Edge Ring Transfer Method
App 20210327688 - SASAKI; Yasuharu ; et al. | 2021-10-21 |
Plasma Processing Apparatus And Plasma Processing Method
App 20210267042 - Uchida; Yohei ; et al. | 2021-08-26 |
Plasma processing apparatus and plasma processing method
Grant 11,032,899 - Uchida , et al. June 8, 2 | 2021-06-08 |
Wire clamp apparatus calibration method and wire bonding apparatus
Grant 11,004,822 - Uchida , et al. May 11, 2 | 2021-05-11 |
Power feed structure and plasma processing apparatus
Grant 10,886,108 - Sasaki , et al. January 5, 2 | 2021-01-05 |
Rinse agent composition for silicon wafers
Grant 10,865,368 - Uchida December 15, 2 | 2020-12-15 |
Plasma Processing Apparatus
App 20200373130 - Tanikawa; Takehiro ; et al. | 2020-11-26 |
Polishing Liquid Composition For Silicon Oxide Film
App 20200369919 - UCHIDA; Yohei | 2020-11-26 |
Plasma processing apparatus and plasma processing method
Grant 10,847,348 - Tsukahara , et al. November 24, 2 | 2020-11-24 |
Plasma Processing Apparatus And Mounting Table Thereof
App 20200219753 - UCHIDA; Yohei ; et al. | 2020-07-09 |
Power Feed Structure And Plasma Processing Apparatus
App 20200194240 - SASAKI; Yasuharu ; et al. | 2020-06-18 |
Plasma Processing Apparatus And Plasma Processing Method
App 20200176226 - Tsukahara; Toshiya ; et al. | 2020-06-04 |
Substrate Support, Plasma Processing Apparatus, And Focus Ring
App 20200152428 - SASAKI; Yasuharu ; et al. | 2020-05-14 |
Plasma Processing Apparatus And Plasma Processing Method
App 20200107429 - Uchida; Yohei ; et al. | 2020-04-02 |
Rinse Agent Composition For Silicon Wafers
App 20190382697 - UCHIDA; Yohei | 2019-12-19 |
Plasma Processing Apparatus And Plasma Processing Method
App 20190371575 - Uchida; Yohei ; et al. | 2019-12-05 |
Wire Clamp Device Calibration Method And Wire Bonding Device
App 20190279957 - UCHIDA; Yohei ; et al. | 2019-09-12 |
Workpiece Placement Apparatus And Processing Apparatus
App 20190279894 - UCHIDA; Yohei ; et al. | 2019-09-12 |
Rinsing Agent Composition For Silicon Wafers
App 20190249122 - UCHIDA; Yohei | 2019-08-15 |
Gas supply device and substrate processing apparatus
Grant 10,199,241 - Uchida Fe | 2019-02-05 |
Gas Supply Device And Substrate Processing Apparatus
App 20180190519 - Uchida; Yohei | 2018-07-05 |
Focus Ring And Substrate Processing Apparatus
App 20180182635 - Tsukahara; Toshiya ; et al. | 2018-06-28 |
Gas supply device and substrate processing apparatus
Grant 9,887,108 - Uchida February 6, 2 | 2018-02-06 |
Mounting table structure and method of holding focus ring
Grant 9,209,060 - Uchida December 8, 2 | 2015-12-08 |
Fluid control apparatus
Grant 9,169,558 - Hirose , et al. October 27, 2 | 2015-10-27 |
Thin-film forming method and thin-film forming apparatus
Grant 9,145,605 - Masuda , et al. September 29, 2 | 2015-09-29 |
Gas Supply Device And Substrate Processing Apparatus
App 20150107772 - Uchida; Yohei | 2015-04-23 |
Bur removing apparatus
Grant 8,905,747 - Hangai , et al. December 9, 2 | 2014-12-09 |
Manufacturing method and manufacturing apparatus of device
Grant 8,883,632 - Endo , et al. November 11, 2 | 2014-11-11 |
Gas mixture supplying method and apparatus
Grant 8,770,214 - Uchida , et al. July 8, 2 | 2014-07-08 |
Mounting Table Structure And Method Of Holding Focus Ring
App 20140146434 - Uchida; Yohei | 2014-05-29 |
Thin-film Forming Method And Thin-film Forming Apparatus
App 20130224381 - Masuda; Takeshi ; et al. | 2013-08-29 |
Thin Film Forming Method And Thin Film Forming Apparatus
App 20130216710 - Masuda; Takeshi ; et al. | 2013-08-22 |
Manufacturing Method And Manufacturing Apparatus Of Device
App 20130178059 - ENDO; Youhei ; et al. | 2013-07-11 |
Gas mixture supplying method and apparatus
Grant 8,276,891 - Uchida October 2, 2 | 2012-10-02 |
Fluid Control Apparatus
App 20120031500 - Hirose; Jun ; et al. | 2012-02-09 |
Bur Removing Punch Pin, Bur Removing Apparatus And Bur Removing Method
App 20110227246 - Hangai; Tomohiro ; et al. | 2011-09-22 |
Gas Mixture Supplying Method And Apparatus
App 20100155971 - Uchida; Yohei | 2010-06-24 |
Gas Mixture Supplying Method And Apparatus
App 20100154908 - UCHIDA; Yohei ; et al. | 2010-06-24 |
Optical fiber, method for manufacturing same and optical transmission channel
Grant 7,239,784 - Hayami , et al. July 3, 2 | 2007-07-03 |
Optical fiber, method for manufacturing same and optical transmission channel
App 20060198591 - Hayami; Shuhei ; et al. | 2006-09-07 |
Optical fiber, method for manufacturing same and optical transmission channel
Grant 7,095,940 - Hayami , et al. August 22, 2 | 2006-08-22 |
Optical fiber, method for manufacturing same and optical transmission channel
App 20050089289 - Hayami, Shuhei ; et al. | 2005-04-28 |
Optical fiber and optical transmission line
App 20040223714 - Kawasaki, Mitsuhiro ; et al. | 2004-11-11 |
Optical fiber and optical transmission line
Grant 6,665,482 - Kawasaki , et al. December 16, 2 | 2003-12-16 |
Optical fiber and optical transmission line
App 20020154876 - Kawasaki, Mitsuhiro ; et al. | 2002-10-24 |
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