loadpatents
Patent applications and USPTO patent grants for UCHIDA; Fumihiko.The latest application filed is for "fabrication system and fabrication method".
Patent | Date |
---|---|
Fabrication System And Fabrication Method App 20100131093 - YOKOYAMA; Natsuki ;   et al. | 2010-05-27 |
Fabrication system and fabrication method Grant 7,603,194 - Yokoyama , et al. October 13, 2 | 2009-10-13 |
Fabrication system and fabrication method App 20080243293 - Yokoyama; Natsuki ;   et al. | 2008-10-02 |
Fabrication system and fabrication method Grant 7,392,106 - Yokoyama , et al. June 24, 2 | 2008-06-24 |
Fabrication system and fabrication method Grant 7,310,563 - Yokoyama , et al. December 18, 2 | 2007-12-18 |
Fabrication system and fabrication method Grant 7,062,344 - Yokoyama , et al. June 13, 2 | 2006-06-13 |
Fabrication system and fabrication method App 20060111805 - Yokoyama; Natsuki ;   et al. | 2006-05-25 |
Fabrication system and fabrication method App 20060111802 - Yokoyama; Natsuki ;   et al. | 2006-05-25 |
Fabrication system and fabrication method App 20040107020 - Yokoyama, Natsuki ;   et al. | 2004-06-03 |
Fabrication system and fabrication method Grant 6,099,598 - Yokoyama , et al. August 8, 2 | 2000-08-08 |
Method and apparatus for fabricating semiconductor devices Grant 5,981,399 - Kawamura , et al. November 9, 1 | 1999-11-09 |
Fabrication system and method having inter-apparatus transporter Grant 5,858,863 - Yokoyama , et al. January 12, 1 | 1999-01-12 |
Fabrication system and method having inter-apparatus transporter Grant 5,820,679 - Yokoyama , et al. October 13, 1 | 1998-10-13 |
Surface atom fabrication method and apparatus Grant 5,689,494 - Ichikawa , et al. November 18, 1 | 1997-11-18 |
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface Grant 5,628,828 - Kawamura , et al. May 13, 1 | 1997-05-13 |
Wafer transport method Grant 5,601,686 - Kawamura , et al. February 11, 1 | 1997-02-11 |
Wafer transport method Grant 5,562,800 - Kawamura , et al. October 8, 1 | 1996-10-08 |
Surface atom fabrication method and apparatus Grant 5,416,331 - Ichikawa , et al. May 16, 1 | 1995-05-16 |
Scanning optical device and method for making a hybrid scanning lens used therefor Grant 5,411,430 - Nishimura , et al. May 2, 1 | 1995-05-02 |
Fine displacement transducer employing plural optical fibers Grant 4,739,161 - Moriyama , et al. April 19, 1 | 1988-04-19 |
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