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Patent applications and USPTO patent grants for Tyberg; Christy Sensenich.The latest application filed is for "line level air gaps".
Patent | Date |
---|---|
Line level air gaps App 20060264036 - Chen; Shyng-Tsong ;   et al. | 2006-11-23 |
Line level air gaps Grant 7,084,479 - Chen , et al. August 1, 2 | 2006-08-01 |
Line level air gaps App 20050127514 - Chen, Shyng-Tsong ;   et al. | 2005-06-16 |
Spin-on cap layer, and semiconductor device containing same Grant 6,724,069 - Dalton , et al. April 20, 2 | 2004-04-20 |
Spin-on cap layer, and semiconductor device containing same App 20020145200 - Dalton, Timothy Joseph ;   et al. | 2002-10-10 |
Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics App 20020117760 - Gates, Stephen McConnell ;   et al. | 2002-08-29 |
Method for dual-damascene patterning of low-k interconnects using spin-on distributed hardmask App 20020119654 - Fornof, Ann Rhea-Helene ;   et al. | 2002-08-29 |
Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials App 20020117754 - Gates, Stephen McConnell ;   et al. | 2002-08-29 |
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