loadpatents
Patent applications and USPTO patent grants for Turner; Norman L..The latest application filed is for "broad energy-range ribbon ion beam collimation using a variable-gradient dipole".
Patent | Date |
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Controlling the characteristics of implanter ion-beams Grant 7,897,943 - Purser , et al. March 1, 2 | 2011-03-01 |
Controlling the characteristics of implanter ion-beams Grant 7,888,660 - Purser , et al. February 15, 2 | 2011-02-15 |
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole Grant 7,829,866 - Purser , et al. November 9, 2 | 2010-11-09 |
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole App 20080302972 - Purser; Kenneth H. ;   et al. | 2008-12-11 |
Beam neutralization in low-energy high-current ribbon-beam implanters Grant 7,439,526 - Purser , et al. October 21, 2 | 2008-10-21 |
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole Grant 7,414,249 - Purser , et al. August 19, 2 | 2008-08-19 |
Resonance method for production of intense low-impurity ion beams of atoms and molecules Grant 7,365,340 - Purser , et al. April 29, 2 | 2008-04-29 |
Controlling the characteristics of implanter ion-beams Grant 7,351,984 - Purser , et al. April 1, 2 | 2008-04-01 |
Controlling the characteristics of implanter ion-beams Grant 7,301,156 - Purser , et al. November 27, 2 | 2007-11-27 |
Controlling the characteristics of implanter ion-beams App 20070181832 - Purser; Kenneth H. ;   et al. | 2007-08-09 |
Controlling the characteristics of implanter ion-beams App 20070023697 - Purser; Kenneth H. ;   et al. | 2007-02-01 |
Resonance method for production of intense low-impurity ion beams of atoms and molecules App 20070018114 - Purser; Kenneth H. ;   et al. | 2007-01-25 |
Broad energy-range ribbon ion beam collimation using a variable-gradient dipole App 20060197029 - Purser; Kenneth H. ;   et al. | 2006-09-07 |
Beam neutralization in low-energy high-current ribbon-beam implanters App 20060197037 - Purser; Kenneth H. ;   et al. | 2006-09-07 |
Controlling the characteristics of implanter ion-beams App 20060169924 - Purser; Kenneth H. ;   et al. | 2006-08-03 |
Controlling the characteristics of implanter ion-beams App 20050242294 - Purser, Kenneth H. ;   et al. | 2005-11-03 |
Controlling the characteristics of implanter ion-beams Grant 6,933,507 - Purser , et al. August 23, 2 | 2005-08-23 |
Heated and cooled vacuum chamber shield App 20050150757 - Black, Russell ;   et al. | 2005-07-14 |
Heated and cooled vacuum chamber shield Grant 6,881,305 - Black , et al. April 19, 2 | 2005-04-19 |
Emittance measuring device for ion beams App 20040149926 - Purser, Kenneth H. ;   et al. | 2004-08-05 |
Substrate transfer shuttle Grant 6,746,198 - White , et al. June 8, 2 | 2004-06-08 |
Controlling the characteristics of implanter ion-beams App 20040097058 - Purser, Kenneth H. ;   et al. | 2004-05-20 |
Vacuum processing system having improved substrate heating and cooling Grant 6,688,375 - Turner , et al. February 10, 2 | 2004-02-10 |
Method and apparatus for scanning a workpiece in a vacuum chamber App 20030197133 - Turner, Norman L. ;   et al. | 2003-10-23 |
Substrate transfer shuttle App 20030190220 - White, John M. ;   et al. | 2003-10-09 |
Substrate transfer shuttle Grant 6,517,303 - White , et al. February 11, 2 | 2003-02-11 |
Heated and cooled vacuum chamber shield App 20020108571 - Black, Russell ;   et al. | 2002-08-15 |
Heated and cooled vacuum chamber shield Grant 6,432,203 - Black , et al. August 13, 2 | 2002-08-13 |
Modular substrate processing system Grant 6,235,634 - White , et al. May 22, 2 | 2001-05-22 |
Method and apparatus for etching film layers on large substrates Grant 5,753,133 - Wong , et al. May 19, 1 | 1998-05-19 |
Method of heating and cooling large area glass substrates Grant 5,674,786 - Turner , et al. October 7, 1 | 1997-10-07 |
Method of heating and cooling large area substrates and apparatus therefor Grant 5,607,009 - Turner , et al. March 4, 1 | 1997-03-04 |
Vacuum processing apparatus having improved throughput Grant 5,512,320 - Turner , et al. April 30, 1 | 1996-04-30 |
Purge gas in wafer coating area selection Grant 5,447,570 - Schmitz , et al. September 5, 1 | 1995-09-05 |
Treating workpieces with beams Grant 4,775,796 - Purser , et al. October 4, 1 | 1988-10-04 |
Platen and beam setup flag assembly for ion implanter Grant 4,717,829 - Turner January 5, 1 | 1988-01-05 |
Method and apparatus for improved ion dose accuracy Grant 4,680,474 - Turner , et al. July 14, 1 | 1987-07-14 |
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system Grant 4,567,938 - Turner February 4, 1 | 1986-02-04 |
Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system Grant 4,535,834 - Turner August 20, 1 | 1985-08-20 |
Apparatus for enhanced neutralization of positively charged ion beam Grant 4,463,255 - Robertson , et al. July 31, 1 | 1984-07-31 |
Beam sharing method and apparatus for ion implantation Grant 4,433,247 - Turner February 21, 1 | 1984-02-21 |
Beam scanning method and apparatus for ion implantation Grant 4,421,988 - Robertson , et al. December 20, 1 | 1983-12-20 |
Dual filament ion source Grant 4,412,153 - Kalbfus , et al. October 25, 1 | 1983-10-25 |
Unitary electromagnet for double deflection scanning of charged particle beam Grant 4,367,411 - Hanley , et al. January 4, 1 | 1983-01-04 |
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