Turner; Frederick T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Turner; Frederick T..The latest application filed is for "vacuum-processing chamber-shield and multi-chamber pumping method".

Company Profile

0.10.2

Turner; Frederick T. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Vacuum-processing chamber-shield and multi-chamber pumping method App 20060037537 - Lombardi; Michael J. ; et al.	2006-02-23
Vacuum-processing chamber-shield and multi-chamber pumping method Grant 7,001,491 - Lombardi , et al. February 21, 2	2006-02-21
Vacuum-processing chamber-shield and multi-chamber pumping method App 20040262155 - Lombardi, Michael J. ; et al.	2004-12-30
Clamp with wafer release for semiconductor wafer processing equipment Grant 5,605,866 - McClanahan , et al. February 25, 1	1997-02-25
Wafer coating system Grant 5,281,320 - Turner , et al. * January 25, 1	1994-01-25
Wafer coating system Grant 4,756,815 - Turner , et al. July 12, 1	1988-07-12
Blocking shield and method for contouring the thickness of sputter coated layers Grant 4,436,602 - Harra , et al. March 13, 1	1984-03-13
Apparatus for asymmetrically contouring the thickness of sputter coated layers Grant 4,416,760 - Turner November 22, 1	1983-11-22
Sputter system incorporating an improved blocking shield for contouring the thickness of sputter coated layers Grant 4,416,759 - Harra , et al. November 22, 1	1983-11-22
Radio frequency etch table with biased extension member Grant 4,392,938 - Harra , et al. July 12, 1	1983-07-12
Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor Grant 4,313,815 - Graves, Jr. , et al. February 2, 1	1982-02-02
Deposition rate regulation by computer control of sputtering systems Grant 4,166,783 - Turner September 4, 1	1979-09-04

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