loadpatents
Patent applications and USPTO patent grants for Turmel; Odette.The latest application filed is for "method for tunably repairing low-k dielectric damage".
Patent | Date |
---|---|
Selectivity control in a plasma processing system Grant 8,222,155 - Takeshita , et al. July 17, 2 | 2012-07-17 |
Method For Tunably Repairing Low-k Dielectric Damage App 20110244600 - Sirard; Stephen M. ;   et al. | 2011-10-06 |
Method for tunably repairing low-k dielectric damage Grant 7,981,699 - Sirard , et al. July 19, 2 | 2011-07-19 |
Method For Tunably Repairing Low-k Dielectric Damage App 20110097821 - Sirard; Stephen M. ;   et al. | 2011-04-28 |
Method for providing uniform removal of organic material Grant 7,534,363 - Annapragada , et al. May 19, 2 | 2009-05-19 |
Methods for the optimization of ion energy control in a plasma processing system Grant 7,521,362 - Takeshita , et al. April 21, 2 | 2009-04-21 |
Selectivity Control In A Plasma Processing System App 20080113516 - Takeshita; Kenji ;   et al. | 2008-05-15 |
Methods for the optimization of ion energy control in a plasma processing system App 20060121729 - Takeshita; Kenji ;   et al. | 2006-06-08 |
Method for providing uniform removal of organic material App 20050006346 - Annapragada, Rao V. ;   et al. | 2005-01-13 |
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