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Patent applications and USPTO patent grants for Turkot; Bob.The latest application filed is for "supercritical carbon dioxide to reduce line edge roughness".
Patent | Date |
---|---|
Supercritical carbon dioxide to reduce line edge roughness Grant 7,049,053 - Ramachandrarao , et al. May 23, 2 | 2006-05-23 |
Supercritical carbon dioxide to reduce line edge roughness App 20040253550 - Ramachandrarao, Vijayakumar ;   et al. | 2004-12-16 |
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