Tuominen; Marko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tuominen; Marko.The latest application filed is for "methods and systems for depositing a layer".
Company Profile
22.56.67
- Tuominen; Marko - Helsinki FI
- Tuominen; Marko - Espoo FI
- Tuominen; Marko - Almere NL
- Tuominen; Marko - Linkoping SE
Patent Activity
| Patent | Date |
|---|---|
| Vapor phase deposition of organic films Grant 11,446,699 - Pore , et al. September 20, 2 | 2022-09-20 |
| Methods And Systems For Depositing A Layer App 20220235460 - Tuominen; Marko ; et al. | 2022-07-28 |
| Vapor phase deposition of organic films Grant 11,389,824 - Pore , et al. July 19, 2 | 2022-07-19 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20220193720 - Haukka; Suvi P. ; et al. | 2022-06-23 |
| Toposelective Vapor Deposition Using An Inhibitor App 20220181163 - Illiberi; Andrea ; et al. | 2022-06-09 |
| Thermal Atomic Layer Etching Processes App 20220119961 - Blomberg; Tom E. ; et al. | 2022-04-21 |
| Thermal Atomic Layer Etching Processes App 20220119962 - Blomberg; Tom E. ; et al. | 2022-04-21 |
| Silicon Oxide Deposition Method App 20220084817 - Sharma; Varun ; et al. | 2022-03-17 |
| Method Of Cleaning A Surface App 20220068634 - Deng; Shaoren ; et al. | 2022-03-03 |
| Plasma Enhanced Deposition Processes For Controlled Formation Of Oxygen Containing Thin Films App 20220044931 - Jia; Lingyun ; et al. | 2022-02-10 |
| Thermal atomic layer etching processes Grant 11,230,770 - Blomberg , et al. January 25, 2 | 2022-01-25 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 11,213,853 - Haukka , et al. January 4, 2 | 2022-01-04 |
| Atomic layer etching processes Grant 11,183,367 - Blomberg , et al. November 23, 2 | 2021-11-23 |
| Selective Passivation And Selective Deposition App 20210358739 - Tois; Eva E. ; et al. | 2021-11-18 |
| Selective Passivation And Selective Deposition App 20210358745 - Maes; Jan Willem ; et al. | 2021-11-18 |
| Plasma enhanced deposition processes for controlled formation of oxygen containing thin films Grant 11,158,500 - Jia , et al. October 26, 2 | 2021-10-26 |
| Selective Deposition Of Silicon Oxide On Dielectric Surfaces Relative To Metal Surfaces App 20210301392 - Illiberi; Andrea ; et al. | 2021-09-30 |
| Selective Deposition Of Silicon Oxide On Metal Surfaces App 20210301394 - Illiberi; Andrea ; et al. | 2021-09-30 |
| Dual Selective Deposition App 20210285097 - Haukka; Suvi P. ; et al. | 2021-09-16 |
| Selective passivation and selective deposition Grant 11,094,535 - Tois , et al. August 17, 2 | 2021-08-17 |
| Selective formation of metallic films on metallic surfaces Grant 11,056,385 - Haukka , et al. July 6, 2 | 2021-07-06 |
| Dual selective deposition Grant 11,047,040 - Haukka , et al. June 29, 2 | 2021-06-29 |
| Vapor Phase Deposition Of Organic Films App 20210001373 - Pore; Viljami J. ; et al. | 2021-01-07 |
| Plasma Enhanced Deposition Processes For Controlled Formation Of Oxygen Containing Thin Films App 20200395211 - Jia; Lingyun ; et al. | 2020-12-17 |
| Vapor phase deposition of organic films Grant 10,814,349 - Pore , et al. October 27, 2 | 2020-10-27 |
| Vapor Phase Deposition Of Organic Films App 20200324316 - PORE; VILJAMI J. ; et al. | 2020-10-15 |
| Atomic Layer Etching Processes App 20200312620 - Blomberg; Tom E. ; et al. | 2020-10-01 |
| Thermal Atomic Layer Etching Processes App 20200308710 - Blomberg; Tom E. ; et al. | 2020-10-01 |
| Vapor phase deposition of organic films Grant 10,695,794 - Pore , et al. | 2020-06-30 |
| Dual Selective Deposition App 20200181766 - Haukka; Suvi P. ; et al. | 2020-06-11 |
| Thermal atomic layer etching processes Grant 10,662,534 - Blomberg , et al. | 2020-05-26 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20200122191 - Haukka; Suvi P. ; et al. | 2020-04-23 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 10,456,808 - Haukka , et al. Oc | 2019-10-29 |
| Dual selective deposition Grant 10,443,123 - Haukka , et al. Oc | 2019-10-15 |
| Vapor Phase Deposition Of Organic Films App 20190283077 - Pore; Viljami J. ; et al. | 2019-09-19 |
| Thermal Atomic Layer Etching Processes App 20190242019 - Blomberg; Tom E. ; et al. | 2019-08-08 |
| Vapor phase deposition of organic films Grant 10,343,186 - Pore , et al. July 9, 2 | 2019-07-09 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20190181034 - Haukka; Suvi P. ; et al. | 2019-06-13 |
| Atomic layer etching processes Grant 10,283,319 - Blomberg , et al. | 2019-05-07 |
| Thermal atomic layer etching processes Grant 10,280,519 - Blomberg , et al. | 2019-05-07 |
| Thermal atomic layer etching processes Grant 10,273,584 - Blomberg , et al. | 2019-04-30 |
| Dual Selective Deposition App 20190100837 - Haukka; Suvi P. ; et al. | 2019-04-04 |
| Selective formation of metallic films on metallic surfaces Grant 10,157,786 - Haukka , et al. Dec | 2018-12-18 |
| Plasma Enhanced Deposition Processes For Controlled Formation Of Metal Oxide Thin Films App 20180350587 - Jia; Lingyun ; et al. | 2018-12-06 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20180243787 - Haukka; Suvi P. ; et al. | 2018-08-30 |
| Selective Passivation And Selective Deposition App 20180233350 - Tois; Eva E. ; et al. | 2018-08-16 |
| Dual selective deposition Grant 10,047,435 - Haukka , et al. August 14, 2 | 2018-08-14 |
| Selective formation of metallic films on metallic surfaces Grant 10,049,924 - Haukka , et al. August 14, 2 | 2018-08-14 |
| Atomic Layer Etching Processes App 20180182597 - Blomberg; Tom E. ; et al. | 2018-06-28 |
| Thermal Atomic Layer Etching Processes App 20180166255 - Blomberg; Tom E. ; et al. | 2018-06-14 |
| Thermal Atomic Layer Etching Processes App 20180163312 - Blomberg; Tom E. ; et al. | 2018-06-14 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20180068885 - Haukka; Suvi P. ; et al. | 2018-03-08 |
| Selective deposition of metals, metal oxides, and dielectrics Grant 9,895,715 - Haukka , et al. February 20, 2 | 2018-02-20 |
| Selective formation of metallic films on metallic surfaces Grant 9,679,808 - Haukka , et al. June 13, 2 | 2017-06-13 |
| Vapor Phase Deposition Of Organic Films App 20170100743 - Pore; Viljami J. ; et al. | 2017-04-13 |
| Vapor Phase Deposition Of Organic Films App 20170100742 - PORE; VILJAMI J. ; et al. | 2017-04-13 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20170069527 - Haukka; Suvi P. ; et al. | 2017-03-09 |
| Method of making a resistive random access memory Grant 9,520,562 - Xie , et al. December 13, 2 | 2016-12-13 |
| Method of growing oxide thin films Grant 9,514,956 - Tois , et al. December 6, 2 | 2016-12-06 |
| Selective formation of metallic films on metallic surfaces Grant 9,502,289 - Haukka , et al. November 22, 2 | 2016-11-22 |
| Selective deposition of noble metal thin films Grant 9,469,899 - Huotari , et al. October 18, 2 | 2016-10-18 |
| Method of making a resistive random access memory device Grant 9,472,757 - Xie , et al. October 18, 2 | 2016-10-18 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20160276208 - Haukka; Suvi P. ; et al. | 2016-09-22 |
| Selective formation of metallic films on metallic surfaces Grant 9,257,303 - Haukka , et al. February 9, 2 | 2016-02-09 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20160005649 - Haukka; Suvi P. ; et al. | 2016-01-07 |
| Selective Deposition Of Noble Metal Thin Films App 20150315703 - Huotari; Hannu ; et al. | 2015-11-05 |
| Dual Selective Deposition App 20150299848 - Haukka; Suvi P. ; et al. | 2015-10-22 |
| Selective formation of metallic films on metallic surfaces Grant 9,112,003 - Haukka , et al. August 18, 2 | 2015-08-18 |
| Selective Deposition Of Metals, Metal Oxides, And Dielectrics App 20150217330 - Haukka; Suvi P. ; et al. | 2015-08-06 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20150187600 - Haukka; Suvi P. ; et al. | 2015-07-02 |
| Selective formation of metallic films on metallic surfaces Grant 8,956,971 - Haukka , et al. February 17, 2 | 2015-02-17 |
| Method Of Making A Resistive Random Access Memory Device App 20150021537 - XIE; Qi ; et al. | 2015-01-22 |
| Method Of Making A Resistive Random Access Memory Device App 20150021540 - Xie; Qi ; et al. | 2015-01-22 |
| Selective deposition of noble metal thin films Grant 8,927,403 - Huotari , et al. January 6, 2 | 2015-01-06 |
| High temperature atomic layer deposition of dielectric oxides Grant 8,592,294 - Haukka , et al. November 26, 2 | 2013-11-26 |
| Selective Formation Of Metallic Films On Metallic Surfaces App 20130189837 - Haukka; Suvi P. ; et al. | 2013-07-25 |
| System for controlling the sublimation of reactants Grant 8,309,173 - Tuominen , et al. November 13, 2 | 2012-11-13 |
| Deposition Of Silicon Dioxide On Hydrophobic Surfaces App 20120263876 - Haukka; Suvi ; et al. | 2012-10-18 |
| Selective Deposition Of Noble Metal Thin Films App 20120009773 - Huotari; Hannu ; et al. | 2012-01-12 |
| High Temperature Atomic Layer Deposition Of Dielectric Oxides App 20110207283 - Haukka; Suvi ; et al. | 2011-08-25 |
| Selective deposition of noble metal thin films Grant 7,985,669 - Huotari , et al. July 26, 2 | 2011-07-26 |
| Method Of Growing Oxide Thin Films App 20110104906 - Tois; Eva ; et al. | 2011-05-05 |
| System For Controlling The Sublimation Of Reactants App 20110076402 - Tuominen; Marko ; et al. | 2011-03-31 |
| Method for controlling the sublimation of reactants Grant 7,851,019 - Tuominen , et al. December 14, 2 | 2010-12-14 |
| Method of growing oxide thin films Grant 7,824,492 - Tois , et al. November 2, 2 | 2010-11-02 |
| Method of growing oxide thin films Grant 7,771,534 - Tois , et al. August 10, 2 | 2010-08-10 |
| Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide Grant 7,771,533 - Tois , et al. August 10, 2 | 2010-08-10 |
| Selective Deposition Of Noble Metal Thin Films App 20100136776 - Huotari; Hannu ; et al. | 2010-06-03 |
| Atomic layer deposition of thin films on germanium Grant 7,704,896 - Haukka , et al. April 27, 2 | 2010-04-27 |
| Selective deposition of noble metal thin films Grant 7,666,773 - Huotari , et al. February 23, 2 | 2010-02-23 |
| System for controlling the sublimation of reactants Grant 7,601,225 - Tuominen , et al. October 13, 2 | 2009-10-13 |
| Selective formation of metal layers in an integrated circuit Grant 7,476,618 - Kilpela , et al. January 13, 2 | 2009-01-13 |
| System For Controlling The Sublimation Of Reactants App 20080274276 - Tuominen; Marko ; et al. | 2008-11-06 |
| Selective Deposition of Noble Metal Thin Films App 20080200019 - Huotari; Hannu ; et al. | 2008-08-21 |
| Method Of Growing Oxide Thin Films App 20070163488 - Tois; Eva ; et al. | 2007-07-19 |
| Systems and methods for avoiding base address collisions App 20070026654 - Huotari; Hannu ; et al. | 2007-02-01 |
| Atomic layer deposition of thin films on germanium App 20060292872 - Haukka; Suvi P. ; et al. | 2006-12-28 |
| Selective formation of metal layers in an integrated circuit App 20060121733 - Kilpela; Olli V. ; et al. | 2006-06-08 |
| Method of forming an electrode with adjusted work function Grant 7,045,406 - Huotari , et al. May 16, 2 | 2006-05-16 |
| Methods for making a dielectric stack in an integrated circuit Grant 7,038,284 - Haukka , et al. May 2, 2 | 2006-05-02 |
| System For Controlling The Sublimation Of Reactants App 20060024439 - TUOMINEN; MARKO ; et al. | 2006-02-02 |
| Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer Grant 6,806,145 - Haukka , et al. October 19, 2 | 2004-10-19 |
| Method of forming ultrathin oxide layer Grant 6,794,314 - Raaijmakers , et al. September 21, 2 | 2004-09-21 |
| Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
| Method of forming an electrode with adjusted work function App 20040106261 - Huotari, Hannu ; et al. | 2004-06-03 |
| Method of growing oxide thin films App 20040065253 - Tois, Eva ; et al. | 2004-04-08 |
| Methods for making a dielectric stack in an integrated circuit App 20040043557 - Haukka, Suvi P. ; et al. | 2004-03-04 |
| System for controlling the sublimation of reactants App 20030232138 - Tuominen, Marko ; et al. | 2003-12-18 |
| Methods for making a dielectric stack in an integrated circuit Grant 6,660,660 - Haukka , et al. December 9, 2 | 2003-12-09 |
| Method Of Growing Oxide Films App 20030188682 - Tois , Eva ; et al. | 2003-10-09 |
| Sealing porous structures App 20030143839 - Raaijmakers, Ivo ; et al. | 2003-07-31 |
| Method of forming ultrathin oxide layer App 20030060057 - Raaijmakers, Ivo ; et al. | 2003-03-27 |
| Low temperature gate stack App 20030049942 - Haukka, Suvi ; et al. | 2003-03-13 |
| Method of forming ultrathin oxide layer Grant 6,492,283 - Raaijmakers , et al. December 10, 2 | 2002-12-10 |
| Dielectric interface films and methods therefor App 20020115252 - Haukka, Suvi P. ; et al. | 2002-08-22 |
| Method of forming ultrathin oxide layer App 20010031562 - Raaijmakers, Ivo ; et al. | 2001-10-18 |
| Device for epitaxially growing objects and method for such a growth Grant 6,039,812 - Ellison , et al. March 21, 2 | 2000-03-21 |
| Device for heat treatment of objects and a method for producing a susceptor Grant 5,879,462 - Kordina , et al. March 9, 1 | 1999-03-09 |
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