Tulshibagwale; Sheshraj L.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tulshibagwale; Sheshraj L..The latest application filed is for "edge ring or process kit for semiconductor process module".
- Tulshibagwale; Sheshraj L. - Santa Clara CA
- Tulshibagwale, Sheshraj L. - Los Altos CA
| Patent | Date |
|---|---|
| Multi-plate faceplate for a processing chamber Grant 10,811,232 - Srikantaiah , et al. October 20, 2 | 2020-10-20 |
| Edge Ring Or Process Kit For Semiconductor Process Module App 20190348317 - D'AMBRA; Allen L. ; et al. | 2019-11-14 |
| Multi-plate Faceplate For A Processing Chamber App 20190051499 - SRIKANTAIAH; Deepak Doddabelavangala ; et al. | 2019-02-14 |
| Edge Ring Or Process Kit For Semiconductor Process Module App 20180061696 - D'AMBRA; Allen L. ; et al. | 2018-03-01 |
| Edge Ring For Bevel Polymer Reduction App 20160307742 - MISHRA; Rohit ; et al. | 2016-10-20 |
| Scrubber brush with sleeve and brush mandrel for use with the scrubber brush Grant 8,407,846 - Chen , et al. April 2, 2 | 2013-04-02 |
| Flow Control Module For A Fluid Delivery System App 20100084023 - Melcer; Chris ; et al. | 2010-04-08 |
| Multiple Substrate Vapor Drying Systems And Methods App 20080155852 - OLGADO; DONALD J.K. ; et al. | 2008-07-03 |
| Systems And Methods For Modular And Configurable Substrate Cleaning App 20080156359 - OLGADO; DONALD J.K. ; et al. | 2008-07-03 |
| Horizontal Megasonic Module For Cleaning Substrates App 20080156360 - Olgado; Donald J.K. ; et al. | 2008-07-03 |
| Scrubber Brush With Sleeve And Brush Mandrel For Use With The Scrubber Brush App 20070209135 - Chen; Hui ; et al. | 2007-09-13 |
| Electrochemical processing cell App 20040134775 - Yang, Michael X. ; et al. | 2004-07-15 |
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