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Patent applications and USPTO patent grants for Tuitje; Holger A..The latest application filed is for "method and apparatus for position-dependent optical metrology calibration".
Patent | Date |
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Method and apparatus for position-dependent optical metrology calibration Grant 7,224,450 - Sezginer , et al. May 29, 2 | 2007-05-29 |
Method and apparatus for position-dependent optical metrology calibration Grant 7,215,419 - Sezginer , et al. May 8, 2 | 2007-05-08 |
Method and apparatus for position-dependent optical metrology calibration Grant 7,095,496 - Sezginer , et al. August 22, 2 | 2006-08-22 |
Method and apparatus for position-dependent optical metrology calibration App 20060164632 - Sezginer; Abdurrahman ;   et al. | 2006-07-27 |
Method and apparatus for position-dependent optical metrology calibration App 20060146321 - Sezginer; Abdurrahman ;   et al. | 2006-07-06 |
Method and apparatus for position-dependent optical metrology calibration App 20030147070 - Sezginer, Abdurrahman ;   et al. | 2003-08-07 |
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