TUITJE; Holger

Patent Applications and Registrations

Patent applications and USPTO patent grants for TUITJE; Holger.The latest application filed is for "normal-incidence in-situ process monitor sensor".

Company Profile

5.12.15

TUITJE; Holger - Fremont CA
Tuitje; Holger - Neuwied DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Normal-incidence In-situ Process Monitor Sensor App 20210193444 - MENG; Ching Ling ; et al.	2021-06-24
Normal-incident in-situ process monitor sensor Grant 10,978,278 - Meng , et al. April 13, 2	2021-04-13
Self-aware And Correcting Heterogenous Platform Incorporating Integrated Semiconductor Processing Modules And Method For Using S App 20200043764 - Clark; Robert ; et al.	2020-02-06
Normal-incident In-situ Process Monitor Sensor App 20200043710 - Meng; Ching Ling ; et al.	2020-02-06
Self-aware And Correcting Heterogenous Platform Incorporating Integrated Semiconductor Processing Modules And Method For Using S App 20200006100 - Clark; Robert ; et al.	2020-01-02
Spatially resolved optical emission spectroscopy (OES) in plasma processing Grant 10,473,525 - Meng , et al. Nov	2019-11-12
Advanced Optical Sensor, System, And Methodologies For Etch Processing Monitoring App 20180286643 - TUITJE; Holger ; et al.	2018-10-04
Spatially resolved optical emission spectroscopy (OES) in plasma processing Grant 9,970,818 - Bao , et al. May 15, 2	2018-05-15
Differential acoustic time of flight measurement of temperature of semiconductor substrates Grant 9,846,088 - Pei , et al. December 19, 2	2017-12-19
Spatially Resolved Optical Emission Spectroscopy (oes) In Plasma Processing App 20170314991 - MENG; Ching-Ling ; et al.	2017-11-02
System for in-situ film stack measurement during etching and etch control method Grant 9,059,038 - Li , et al. June 16, 2	2015-06-16
Spatially Resolved Optical Emission Spectroscopy (oes) In Plasma Processing App 20150124250 - BAO; Junwei ; et al.	2015-05-07
Differential Acoustic Time Of Flight Measurement Of Temperature Of Semiconductor Substrates App 20150078416 - PEI; Jun ; et al.	2015-03-19
System For In-situ Film Stack Measurement During Etching And Etch Control Method App 20140024143 - LI; Shifang ; et al.	2014-01-23
Diffraction order sorting filter for optical metrology Grant 8,107,073 - Norton , et al. January 31, 2	2012-01-31
Calibration method for optical metrology Grant 7,924,422 - Stanke , et al. April 12, 2	2011-04-12
Diffraction Order Sorting Filter For Optical Metrology App 20100202055 - NORTON; Adam ; et al.	2010-08-12
Calibration Method For Optical Metrology App 20100201981 - STANKE; Fred ; et al.	2010-08-12
Matching optical metrology tools using spectra enhancement Grant 7,505,148 - Vuong , et al. March 17, 2	2009-03-17
Matching optical metrology tools using diffraction signals Grant 7,446,888 - Stanke , et al. November 4, 2	2008-11-04
Matching optical metrology tools using hypothetical profiles Grant 7,446,887 - Stanke , et al. November 4, 2	2008-11-04
Drift compensation for an optical metrology tool Grant 7,428,044 - Vuong , et al. September 23, 2	2008-09-23
Drift compensation for an optical metrology tool App 20080117437 - Vuong; Vi ; et al.	2008-05-22
Matching optical metrology tools using spectra enhancement App 20080117411 - Vuong; Vi ; et al.	2008-05-22
Matching optical metrology tools using diffraction signals App 20070268498 - Stanke; Fred ; et al.	2007-11-22
Matching optical metrology tools using hypothetical profiles App 20070268497 - Stanke; Fred ; et al.	2007-11-22
Apparatus for evaluating measuring values Grant 5,621,220 - Muehlenbein , et al. April 15, 1	1997-04-15

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