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Patent applications and USPTO patent grants for Tuda; Mutumi.The latest application filed is for "plasma processing apparatus capable of evaluating process performance".
Patent | Date |
---|---|
Plasma processing apparatus capable of evaluating process performance Grant 6,929,712 - Hanazaki , et al. August 16, 2 | 2005-08-16 |
Method of manufacturing semiconductor device Grant 6,651,678 - Shintani , et al. November 25, 2 | 2003-11-25 |
Plasma processing apparatus capable of evaluating process performance App 20030178140 - Hanazaki, Minoru ;   et al. | 2003-09-25 |
Manufacturing method of semiconductor device App 20030096505 - Shintani, Kenji ;   et al. | 2003-05-22 |
Plasma generating apparatus App 20020047544 - Nishikawa, Kazuyasu ;   et al. | 2002-04-25 |
Plasma generating apparatus Grant 6,335,595 - Nishikawa , et al. January 1, 2 | 2002-01-01 |
Plasma generating apparatus with multiple microwave introducing means Grant 6,109,208 - Tsuchihashi , et al. August 29, 2 | 2000-08-29 |
Magnetically enhanced microwave plasma generating apparatus Grant 6,054,016 - Tuda , et al. April 25, 2 | 2000-04-25 |
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