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name:-0.0071148872375488
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Tu; Sheng-Hung Patent Filings

Tu; Sheng-Hung

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tu; Sheng-Hung.The latest application filed is for "compositions and methods for etching silicon nitride-containing substrates".

Company Profile
6.9.11
  • Tu; Sheng-Hung - Billerica MA
  • Tu; Sheng-Hung - Hsinchu TW
  • Tu; Sheng-Hung - Hsin-chu TW
  • Tu; Sheng-Hung - Yonghe TW
  • Tu; Sheng-Hung - Hsinchu City TW
  • TU; Sheng-Hung - Taipei County TW
  • Tu; Sheng-Hung - Danbury CT US
  • TU; Sheng-Hung - Yonghe City TW
  • Tu; Sheng-Hung - Kaohsiung County TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Post-etch residue removal for advanced node beol processing
Grant 10,790,187 - Cooper , et al. September 29, 2
2020-09-29
Compositions and methods for etching silicon nitride-containing substrates
Grant 10,651,045 - Cooper , et al.
2020-05-12
Compositions and methods for selectively etching titanium nitride
Grant 10,472,567 - Chen , et al. Nov
2019-11-12
Compositions and methods for selectively etching titanium nitride
Grant 10,428,271 - Cooper , et al. October 1, 2
2019-10-01
Compositions and methods for selectively etching titanium nitride
Grant 10,392,560 - Barnes , et al. A
2019-08-27
Ni:NiGe:Ge selective etch formulations and method of using same
Grant 10,340,150 - Bilodeau , et al.
2019-07-02
Compositions And Methods For Etching Silicon Nitride-containing Substrates
App 20190074188 - Cooper; Emanuel ;   et al.
2019-03-07
Post-etch Residue Removal For Advanced Node Beol Processing
App 20180204764 - Cooper; Emanuel I. ;   et al.
2018-07-19
Compositions for cleaning III-V semiconductor materials and methods of using same
Grant 9,765,288 - Cooper , et al. September 19, 2
2017-09-19
Compositions And Methods For Selectively Etching Titanium Nitride
App 20170260449 - BARNES; Jeffrey A. ;   et al.
2017-09-14
Compositions and methods for selectively etching titanium nitride
Grant 9,546,321 - Barnes , et al. January 17, 2
2017-01-17
Ni:nige:ge Selective Etch Formulations And Method Of Using Same
App 20160314990 - BILODEAU; Steven ;   et al.
2016-10-27
Compositions And Methods For Selectively Etching Titanium Nitride
App 20160200975 - COOPER; Enamuel I. ;   et al.
2016-07-14
Compositions And Methods For Selectively Etching Titanium Nitride
App 20160032186 - CHEN; Li-Min ;   et al.
2016-02-04
Compositions For Cleaning Iii-v Semiconductor Materials And Methods Of Using Same
App 20150344825 - COOPER; Emanuel I. ;   et al.
2015-12-03
Methods For The Selective Removal Of Ashed Spin-on Glass
App 20150075570 - Wu; Hsing-chen ;   et al.
2015-03-19
Compositions And Methods For Selectively Etching Titanium Nitride
App 20150027978 - Barnes; Jeffrey A. ;   et al.
2015-01-29
Composition For Post Chemical-mechanical Polishing Cleaning
App 20120021961 - Klipp; Andreas ;   et al.
2012-01-26

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