TU; Leyi
Patent Applications and Registrations
Patent applications and USPTO patent grants for TU; Leyi.The latest application filed is for "plasma reactor".
- TU; Leyi - Shanghai CN
| Patent | Date |
|---|---|
| Plasma Reactor App 20220208521 - TU; Leyi ; et al. | 2022-06-30 |
| Electrostatic Chuck, Method Of Manufacturing Electrostatic Chuck, And Plasma Processing Apparatus App 20210118716 - YE; Rubin ; et al. | 2021-04-22 |
| Plasma Processor And Processing Method App 20210066043 - NI; Tuqiang ; et al. | 2021-03-04 |
| Radio Frequency Power Supply System, Plasma Processor, And Frequency-tuning Matching App 20210057188 - NI; Tuqiang ; et al. | 2021-02-25 |
| Radio Frequency Electrode Assembly for Plasma Processing Apparatus, And Plasma Processing Apparatus App 20200194231 - Chen; Longbao ; et al. | 2020-06-18 |
| Method And Device For Matching Impedance Of Pulse Radio Frequency Plasma App 20200185196 - YE; Rubin ; et al. | 2020-06-11 |
| Lift Pin Assembly, An Electrostatic Chuck And A Processing Apparatus Where The Electrostatic Chuck Is Located App 20200083087 - Ni; Tuqiang ; et al. | 2020-03-12 |
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