loadpatents
Patent applications and USPTO patent grants for Tu; Che-Hao.The latest application filed is for "hard mask removal method".
Patent | Date |
---|---|
Hard Mask Removal Method App 20210225657 - Tu; Che-Hao ;   et al. | 2021-07-22 |
Forming Gate Line-end Of Semiconductor Structures App 20210166972 - CHUNG; Che-Liang ;   et al. | 2021-06-03 |
Hard mask removal method Grant 10,971,370 - Tu , et al. April 6, 2 | 2021-04-06 |
Forming gate line-end of semiconductor structures Grant 10,943,822 - Chung , et al. March 9, 2 | 2021-03-09 |
System and Method of Chemical Mechanical Polishing App 20210023678 - Liu; Chih-Wen ;   et al. | 2021-01-28 |
System and method of chemical mechanical polishing Grant 10,800,004 - Liu , et al. October 13, 2 | 2020-10-13 |
Hard Mask Removal Method App 20200118827 - Tu; Che-Hao ;   et al. | 2020-04-16 |
System And Method Of Chemical Mechanical Polishing App 20200101582 - Liu; Chih-Wen ;   et al. | 2020-04-02 |
Zone-based Cmp Target Control App 20200094369 - Chung; Che-Liang ;   et al. | 2020-03-26 |
Hard mask removal method Grant 10,510,552 - Tu , et al. Dec | 2019-12-17 |
Forming Gate Line-end Of Semiconductor Structures App 20190287852 - Chung; Che-Liang ;   et al. | 2019-09-19 |
Hard Mask Removal Method App 20180240679 - Tu; Che-Hao ;   et al. | 2018-08-23 |
Hard mask removal method Grant 9,960,050 - Tu , et al. May 1, 2 | 2018-05-01 |
Surface treatment in a chemical mechanical process Grant 9,941,109 - Liu , et al. April 10, 2 | 2018-04-10 |
Asymmetric application of pressure to a wafer during a CMP process Grant 9,922,837 - Liu , et al. March 20, 2 | 2018-03-20 |
Surface Treatment in a Chemical Mechanical Process App 20180005840 - Liu; Chih-Wen ;   et al. | 2018-01-04 |
Asymmetric Application of Pressure to a Wafer During a CMP Process App 20170256414 - Liu; Chih-Wen ;   et al. | 2017-09-07 |
Mechanisms for forming oxide layer over exposed polysilicon during a chemical mechanical polishing (CMP) process Grant 9,711,374 - Tu , et al. July 18, 2 | 2017-07-18 |
Composite structure for gate level inter-layer dielectric Grant 9,595,450 - Tu , et al. March 14, 2 | 2017-03-14 |
Composite Structure for Gate Level Inter-Layer Dielectric App 20150187594 - Tu; Che-Hao ;   et al. | 2015-07-02 |
Planarization process for semiconductor device fabrication Grant 8,975,179 - Tu , et al. March 10, 2 | 2015-03-10 |
Hard Mask Removal Method App 20150037978 - TU; CHE-HAO ;   et al. | 2015-02-05 |
Mechanisms For Forming Oxide Layer Over Exposed Polysilicon During A Chemical Mechanical Polishing (cmp) Process App 20140370696 - TU; Che-Hao ;   et al. | 2014-12-18 |
Gate height loss improvement for a transistor Grant 8,598,028 - Tu , et al. December 3, 2 | 2013-12-03 |
Gate Height Loss Improvement For A Transistor App 20130164930 - Tu; Che-Hao ;   et al. | 2013-06-27 |
Planarization Process For Semiconductor Device Fabrication App 20130095644 - Tu; Che-Hao ;   et al. | 2013-04-18 |
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