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Patent applications and USPTO patent grants for Tsutsumi; Kengo.The latest application filed is for "film forming method".
Patent | Date |
---|---|
Film Forming Method App 20220056571 - Tsutsumi; Kengo ;   et al. | 2022-02-24 |
Target assembly Grant 10,435,783 - Nakamura , et al. O | 2019-10-08 |
Target Assembly App 20170268097 - Nakamura; Shinya ;   et al. | 2017-09-21 |
Etching apparatus and etching method Grant 8,361,274 - Lee , et al. January 29, 2 | 2013-01-29 |
Vacuum processing apparatus Grant 7,682,481 - Takahashi , et al. March 23, 2 | 2010-03-23 |
Etching method Grant 7,497,963 - Lee , et al. March 3, 2 | 2009-03-03 |
Vacuum processing apparatus App 20070151669 - Takahashi; Seiichi ;   et al. | 2007-07-05 |
Etching apparatus and etching method App 20050150861 - Lee, Kwang-Myung ;   et al. | 2005-07-14 |
Etching method App 20050153553 - Lee, Kwang-Myung ;   et al. | 2005-07-14 |
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