Tsuruta; Hideyoshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsuruta; Hideyoshi.The latest application filed is for "wafer holder and method for manufacturing the same".
Company Profile
0.27.26
- Tsuruta; Hideyoshi - Tokai JP
- TSURUTA; Hideyoshi - Tokai-City JP
- TSURUTA; Hideyoshi - Tokai-Shi JP
- Tsuruta; Hideyoshi - Tohkai JP
- Tsuruta; Hideyoshi - Toukai JP
- Tsuruta, Hideyoshi - Toukai-shi JP
- Tsuruta; Hideyoshi - Nagoya JP
- Tsuruta, Hideyoshi - Tohkai-city JP
- Tsuruta, Hideyoshi - Nagoya City JP
- Tsuruta, Hideyoshi - Toukai-city JP
Patent Activity
| Patent | Date |
|---|---|
| Wafer holder and method for manufacturing the same Grant 10,037,910 - Yanoh , et al. July 31, 2 | 2018-07-31 |
| Wafer Holder And Method For Manufacturing The Same App 20160196999 - YANOH; Takuya ; et al. | 2016-07-07 |
| Heating device Grant 7,763,831 - Morioka , et al. July 27, 2 | 2010-07-27 |
| Power-supplying member and heating apparatus using the same Grant 7,679,034 - Goto , et al. March 16, 2 | 2010-03-16 |
| Plasma processing member Grant 7,582,184 - Tomita , et al. September 1, 2 | 2009-09-01 |
| Electrostatic chuck Grant 7,576,967 - Morioka , et al. August 18, 2 | 2009-08-18 |
| Heating Apparatus App 20090159588 - Morioka; Ikuhisa ; et al. | 2009-06-25 |
| Power-supplying member and heating apparatus using the same Grant 7,525,071 - Goto , et al. April 28, 2 | 2009-04-28 |
| Electrostatic chuck Grant 7,403,386 - Aihara , et al. July 22, 2 | 2008-07-22 |
| Heating Device App 20080142501 - MORIOKA; Ikuhisa ; et al. | 2008-06-19 |
| Electrostatic Chuck App 20070223175 - Morioka; Ikuhisa ; et al. | 2007-09-27 |
| Substrate heating apparatus Grant 7,247,819 - Goto , et al. July 24, 2 | 2007-07-24 |
| Substrate heating apparatus and manufacturing method for the same Grant 7,247,818 - Kondou , et al. July 24, 2 | 2007-07-24 |
| Electrostatic Chuck App 20070146961 - Morioka; Ikuhisa ; et al. | 2007-06-28 |
| Systems for producing semiconductors and members therefor Grant 7,220,320 - Goto , et al. May 22, 2 | 2007-05-22 |
| Substrate heating device Grant 7,189,946 - Goto , et al. March 13, 2 | 2007-03-13 |
| Systems for producing semiconductors and members therefor Grant 7,157,666 - Goto , et al. January 2, 2 | 2007-01-02 |
| Electrostatic chuck App 20060279899 - Aihara; Yasufumi ; et al. | 2006-12-14 |
| Power-supplying member and heating apparatus using the same App 20060237442 - Goto; Yoshinobu ; et al. | 2006-10-26 |
| Heating systems Grant 7,126,093 - Goto , et al. October 24, 2 | 2006-10-24 |
| Power-supplying member and heating apparatus using the same App 20060231034 - Goto; Yoshinobu ; et al. | 2006-10-19 |
| Plasma processing member App 20060191879 - Tomita; Yasumitsu ; et al. | 2006-08-31 |
| Heating Systems App 20060186109 - Goto; Yoshinobu ; et al. | 2006-08-24 |
| Joined bodies and a method of producing the same Grant 7,067,200 - Fujii , et al. June 27, 2 | 2006-06-27 |
| Substrate heater and fabrication method for the same Grant 7,060,945 - Kondou , et al. June 13, 2 | 2006-06-13 |
| Heating systems Grant 7,044,399 - Goto , et al. May 16, 2 | 2006-05-16 |
| Electrostatic chucks and electrostatically attracting structures Grant 7,042,697 - Tsuruta , et al. May 9, 2 | 2006-05-09 |
| Systems for supporting ceramic susceptors Grant 7,022,947 - Yamaguchi , et al. April 4, 2 | 2006-04-04 |
| Substrate heating apparatus and manufacturing method for the same App 20060011610 - Kondou; Nobuyuki ; et al. | 2006-01-19 |
| Substrate heating apparatus App 20060011611 - Goto; Yoshinobu ; et al. | 2006-01-19 |
| Substrate heating device App 20050258160 - Goto, Yoshinobu ; et al. | 2005-11-24 |
| Substrate heater and fabrication method for the same App 20050082274 - Kondou, Nobuyuki ; et al. | 2005-04-21 |
| Systems for supporting ceramic susceptors App 20050006374 - Yamaguchi, Kazuaki ; et al. | 2005-01-13 |
| Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses Grant 6,800,576 - Katsuda , et al. October 5, 2 | 2004-10-05 |
| Heating systems App 20040177812 - Goto, Yoshinobu ; et al. | 2004-09-16 |
| Electrostatic chuck and substrate processing apparatus Grant 6,785,115 - Tsuruta , et al. August 31, 2 | 2004-08-31 |
| Systems for producing semiconductors and members therefor App 20040144767 - Goto, Yoshinobu ; et al. | 2004-07-29 |
| Systems for producing semiconductors and members therefor App 20040144312 - Goto, Yoshinobu ; et al. | 2004-07-29 |
| Electrostatic adsorption device Grant 6,728,091 - Tsuruta , et al. April 27, 2 | 2004-04-27 |
| Electrostatic chucks and electrostatically attracting structures App 20040070916 - Tsuruta, Hideyoshi ; et al. | 2004-04-15 |
| Joined bodies and a method of producing the same App 20040016792 - Fujii, Tomoyuki ; et al. | 2004-01-29 |
| Electrostatic chucks and process for producing the same Grant 6,636,413 - Tsuruta October 21, 2 | 2003-10-21 |
| Ceramics joint structure and method of producing the same Grant 6,617,514 - Ushikoshi , et al. September 9, 2 | 2003-09-09 |
| Electrostatic chunks Grant 6,608,745 - Tsuruta , et al. August 19, 2 | 2003-08-19 |
| Electrostatic chucks App 20030095370 - Tsuruta, Hideyoshi ; et al. | 2003-05-22 |
| Electrostatic adsorption device App 20030059627 - Tsuruta, Hideyoshi ; et al. | 2003-03-27 |
| Aluminum nitride sintered bodies and members for semiconductor-producing apparatuses App 20020165079 - Katsuda, Yuji ; et al. | 2002-11-07 |
| Electrostatic chuck and substrate processing apparatus App 20020159217 - Tsuruta, Hideyoshi ; et al. | 2002-10-31 |
| Electrostatic chucks and process for producing the same App 20020109954 - Tsuruta, Hideyoshi | 2002-08-15 |
| Electrostatic chucks and electrostatically adsorbing structures App 20020012219 - Tsuruta, Hideyoshi ; et al. | 2002-01-31 |
| Joint structure of metal member and ceramic member and method of producing the same Grant 6,057,513 - Ushikoshi , et al. May 2, 2 | 2000-05-02 |
| Ceramic susceptor with embedded metal electrode and brazing material connection Grant 5,817,406 - Cheung , et al. October 6, 1 | 1998-10-06 |
| Ceramics joined body and method of joining ceramics Grant 5,794,838 - Ushikoshi , et al. August 18, 1 | 1998-08-18 |
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