| Patent | Date |
|---|
Charged particle beam apparatus
Grant 11,398,366 - Miwa , et al. July 26, 2 | 2022-07-26 |
Charged particle beam apparatus
Grant 11,398,367 - Miwa , et al. July 26, 2 | 2022-07-26 |
Electron beam device
Grant 11,393,657 - Shouji , et al. July 19, 2 | 2022-07-19 |
Charged Particle Beam Device
App 20220216032 - SHOUJI; Minami ; et al. | 2022-07-07 |
Charged particle beam device
Grant 11,355,308 - Shirasaki , et al. June 7, 2 | 2022-06-07 |
Charged particle beam apparatus
Grant 11,335,535 - Nakamura , et al. May 17, 2 | 2022-05-17 |
Charged particle beam device
Grant 11,328,897 - Shouji , et al. May 10, 2 | 2022-05-10 |
Charged Particle Beam Device
App 20220139667 - Shouji; Minami ; et al. | 2022-05-05 |
Device Defect Detection Method Using A Charged Particle Beam
App 20220108866 - Shirasaki; Yasuhiro ; et al. | 2022-04-07 |
Charged Particle Beam Apparatus
App 20220102109 - Miwa; Takafumi ; et al. | 2022-03-31 |
Charged Particle Beam Apparatus
App 20220102108 - Miwa; Takafumi ; et al. | 2022-03-31 |
Electron Beam Device
App 20220059317 - SHOUJI; Minami ; et al. | 2022-02-24 |
Method for determining irradiation conditions for charged particle beam device and charged particle beam device
Grant 11,232,929 - Kimizuka , et al. January 25, 2 | 2022-01-25 |
Charged Particle Beam Device
App 20220013326 - Takaguchi; Katsura ; et al. | 2022-01-13 |
Charged particle beam apparatus and sample observation method using the same
Grant 11,183,362 - Takaguchi , et al. November 23, 2 | 2021-11-23 |
Adjusting Method of Charged Particle Beam Device and Charged Particle Beam Device System
App 20210327048 - KIMIZUKA; Heita ; et al. | 2021-10-21 |
Charged Particle Microscope and Method of Imaging Sample
App 20210233740 - SHOUJI; Minami ; et al. | 2021-07-29 |
Measuring apparatus and method of setting observation condition
Grant 11,043,358 - Araki , et al. June 22, 2 | 2021-06-22 |
Charged particle beam apparatus and charged particle beam inspection system
Grant 11,043,359 - Nakamura , et al. June 22, 2 | 2021-06-22 |
Scanning electron microscope and sample observation method using scanning electron microscope
Grant 11,011,348 - Bizen , et al. May 18, 2 | 2021-05-18 |
Charged particle beam apparatus
Grant 10,971,347 - Nakamura , et al. April 6, 2 | 2021-04-06 |
Charged Particle Beam Device
App 20210066028 - Shirasaki; Yasuhiro ; et al. | 2021-03-04 |
Charged Particle Beam Device
App 20210066029 - Shouji; Minami ; et al. | 2021-03-04 |
Charged Particle Beam Apparatus And Charged Particle Beam Inspection System
App 20210043419 - Nakamura; Yohei ; et al. | 2021-02-11 |
Charged Particle Beam Apparatus
App 20210043415 - Nakamura; Yohei ; et al. | 2021-02-11 |
System for Deriving Electrical Characteristics and Non-Transitory Computer-Readable Medium
App 20210042900 - KIMIZUKA; Heita ; et al. | 2021-02-11 |
Charged Particle Beam Apparatus
App 20210043412 - Miwa; Takafumi ; et al. | 2021-02-11 |
Charged Particle Beam Apparatus
App 20210043413 - Miwa; Takafumi ; et al. | 2021-02-11 |
System for Deriving Electrical Characteristics and Non-Transitory Computer-Readable Medium
App 20210027455 - KIMIZUKA; Heita ; et al. | 2021-01-28 |
Method for Determining Irradiation Conditions for Charged Particle Beam Device and Charged Particle Beam Device
App 20210027981 - KIMIZUKA; Heita ; et al. | 2021-01-28 |
Charged Particle Beam Apparatus
App 20210020422 - NAKAMURA; Mitsuhiro ; et al. | 2021-01-21 |
Charged particle beam device with distance setting between irradiation regions in a scan line
Grant 10,879,037 - Tsuno , et al. December 29, 2 | 2020-12-29 |
Charged Particle Beam Apparatus And Sample Observation Method Using The Same
App 20200294764 - Takaguchi; Katsura ; et al. | 2020-09-17 |
Measuring Apparatus And Method Of Setting Observation Condition
App 20200111638 - ARAKI; Ryoko ; et al. | 2020-04-09 |
Scanning Electron Microscope And Sample Observation Method Using Scanning Electron Microscope
App 20190348255 - BIZEN; Daisuke ; et al. | 2019-11-14 |
Charged particle bean device and information-processing device
Grant 10,453,648 - Kimura , et al. Oc | 2019-10-22 |
Charged particle beam apparatus
Grant 10,256,068 - Enyama , et al. | 2019-04-09 |
Charged Particle Beam Device
App 20190051490 - TSUNO; Natsuki ; et al. | 2019-02-14 |
Charged particle beam apparatus
Grant 10,121,632 - Okai , et al. November 6, 2 | 2018-11-06 |
Charged particle beam device and charged particle beam measurement method
Grant 10,121,634 - Tsuno , et al. November 6, 2 | 2018-11-06 |
Charged Particle Beam Apparatus
App 20180033587 - ENYAMA; Momoyo ; et al. | 2018-02-01 |
Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam
Grant 9,846,133 - Kimura , et al. December 19, 2 | 2017-12-19 |
Charged Particle Beam Device and Information-Processing Device
App 20170345614 - KIMURA; Yoshinobu ; et al. | 2017-11-30 |
Charged Particle Beam Apparatus
App 20170316915 - OKAI; Nobuhiro ; et al. | 2017-11-02 |
Charged particle beam apparatus and inspection method using the same
Grant 9,659,744 - Tsuno , et al. May 23, 2 | 2017-05-23 |
Semiconductor inspection method, semiconductor inspection device and manufacturing method of semiconductor element
Grant 9,508,611 - Kimura , et al. November 29, 2 | 2016-11-29 |
Charged Particle Beam Device and Charged Particle Beam Measurement Method
App 20160225583 - TSUNO; Natsuki ; et al. | 2016-08-04 |
Semiconductor Inspection Method, Semiconductor Inspection Device And Manufacturing Method Of Semiconductor Element
App 20160190020 - KIMURA; Yoshinobu ; et al. | 2016-06-30 |
Charged Particle Beam Apparatus And Inspection Method Using The Same
App 20160148781 - TSUNO; Natsuki ; et al. | 2016-05-26 |
Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope
Grant 9,236,220 - Tsuno , et al. January 12, 2 | 2016-01-12 |
Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
Grant 9,202,668 - Miwa , et al. December 1, 2 | 2015-12-01 |
Semiconductor Inspection Device, And Inspection Method Using Charged Particle Beam
App 20150303030 - Kimura; Yoshinobu ; et al. | 2015-10-22 |
Electronic Microscope, Setting Method Of Observation Condition Of Electronic Microscope, And Observation Method Using Electronic Microscope
App 20150041644 - Tsuno; Natsuki ; et al. | 2015-02-12 |
Electron microscope and image capturing method using electron beam
Grant 8,907,279 - Tsuno , et al. December 9, 2 | 2014-12-09 |
Observation Specimen For Use In Electron Microscopy, Electron Microscopy, Electron Microscope, And Device For Producing Observation Specimen
App 20140264018 - Miwa; Takafumi ; et al. | 2014-09-18 |
Electron Microscope And Image Capturing Method Using Electron Beam
App 20140097342 - Tsuno; Natsuki ; et al. | 2014-04-10 |
Charged particle beam apparatus
Grant 8,586,920 - Tsuno , et al. November 19, 2 | 2013-11-19 |
Sample Observation Method Using Electron Beams And Electron Microscope
App 20120292506 - Tsuno; Natsuki ; et al. | 2012-11-22 |
Charged Particle Beam Apparatus
App 20110204228 - Tsuno; Natsuki ; et al. | 2011-08-25 |
Apparatus and method for inspection and measurement
Grant 7,910,884 - Cheng , et al. March 22, 2 | 2011-03-22 |
Semiconductor wafer inspection apparatus
Grant 7,633,303 - Furukawa , et al. December 15, 2 | 2009-12-15 |
Apparatus And Method For Inspection And Measurement
App 20090179151 - CHENG; Zhaohui ; et al. | 2009-07-16 |
Semiconductor Wafer Inspection Apparatus
App 20080246497 - Furukawa; Takashi ; et al. | 2008-10-09 |
Ultrashort pulse laser processing method
App 20050236380 - Tsuno, Natsuki ; et al. | 2005-10-27 |
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