loadpatents
Patent applications and USPTO patent grants for Tsung; James.The latest application filed is for "systems and methods for parallel combinatorial vapor deposition processing".
Patent | Date |
---|---|
Interchangeable sputter gun head Grant 9,318,306 - Fong , et al. April 19, 2 | 2016-04-19 |
High productivity combinatorial processing using pressure-controlled one-way valves Grant 9,269,567 - Hsueh , et al. February 23, 2 | 2016-02-23 |
Multipurpose combinatorial vapor phase deposition chamber Grant 9,087,864 - Chen , et al. July 21, 2 | 2015-07-21 |
Systems and Methods for Parallel Combinatorial Vapor Deposition Processing App 20150184287 - Tsung; James ;   et al. | 2015-07-02 |
Multipurpose Combinatorial Vapor Phase Deposition Chamber App 20150179487 - Chen; Chen-An ;   et al. | 2015-06-25 |
Interchangeable Sputter Gun Head App 20150176117 - Fong; Owen ;   et al. | 2015-06-25 |
One-Way Valves for Controlling Flow into Deposition Chamber App 20150170908 - Hsueh; Chien-Lan ;   et al. | 2015-06-18 |
Combinatorial Process System App 20150093898 - Endo; Rick ;   et al. | 2015-04-02 |
Combinatorial RF bias method for PVD Grant 8,974,649 - Shao , et al. March 10, 2 | 2015-03-10 |
Combinatorial process system Grant 8,932,995 - Endo , et al. January 13, 2 | 2015-01-13 |
Method and System for Isolated and Discretized Process Sequence Integration App 20140318450 - Endo; Richard R. ;   et al. | 2014-10-30 |
Multi-Region Processing System and Heads App 20140311408 - De; Indranil ;   et al. | 2014-10-23 |
Controlling Radical Lifetimes in a Remote Plasma Chamber App 20140273309 - Niyogi; Sandip ;   et al. | 2014-09-18 |
Method and system for isolated and discretized process sequence integration Grant 8,815,013 - Chiang , et al. August 26, 2 | 2014-08-26 |
Combinatorial process system Grant 8,771,483 - Endo , et al. July 8, 2 | 2014-07-08 |
Multi-region processing system Grant 8,770,143 - Endo , et al. July 8, 2 | 2014-07-08 |
Methods and Systems for Site-Isolated Combinatorial Substrate Processing Using a Mask App 20140183161 - Niyogi; Sandip ;   et al. | 2014-07-03 |
High Deposition Rate Chamber with Co-Sputtering Capabilities App 20140174907 - Yang; Hong Sheng ;   et al. | 2014-06-26 |
Combinatorial process system Grant 8,758,581 - Endo , et al. June 24, 2 | 2014-06-24 |
Substrate Carrier App 20140166840 - French; Wayne R. ;   et al. | 2014-06-19 |
Method and system for mask handling in high productivity chamber Grant 8,500,908 - Endo , et al. August 6, 2 | 2013-08-06 |
Method and system for isolated and discretized process sequence integration Grant 8,486,844 - Endo , et al. July 16, 2 | 2013-07-16 |
Method and apparatus for variable conductance Grant 8,486,821 - Endo , et al. July 16, 2 | 2013-07-16 |
Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing App 20130168231 - Yang; Hong Sheng ;   et al. | 2013-07-04 |
Substrate Processing Tool with Tunable Fluid Flow App 20130153149 - Wang; Danny ;   et al. | 2013-06-20 |
Combinatorial Rf Bias Method For Pvd App 20130149469 - Shao; ShouQian ;   et al. | 2013-06-13 |
Combinatorial process system Grant 8,449,678 - Endo , et al. May 28, 2 | 2013-05-28 |
Combinatorial process system Grant 8,387,563 - Endo , et al. March 5, 2 | 2013-03-05 |
Method and System for Mask Handling in High Productivity Chamber App 20130042810 - Endo; Rick ;   et al. | 2013-02-21 |
Method And System For Isolated And Discretized Process Sequence Integration/us App 20120322173 - Chiang; Tony P. ;   et al. | 2012-12-20 |
Method and system for mask handling in high productivity chamber Grant 8,317,925 - Endo , et al. November 27, 2 | 2012-11-27 |
Method and system for isolated and discretized process sequence integration Grant 8,283,264 - Chiang , et al. October 9, 2 | 2012-10-09 |
Method and apparatus for variable conductance Grant 8,216,376 - Endo , et al. July 10, 2 | 2012-07-10 |
Combinatorial Process System App 20120149180 - Endo; Rick ;   et al. | 2012-06-14 |
Combinatorial Process System App 20120142197 - Endo; Rick ;   et al. | 2012-06-07 |
Method And System For Mask Handling In High Productivity Chamber App 20110262644 - Endo; Rick ;   et al. | 2011-10-27 |
Multi-region processing system and heads Grant 8,039,052 - Endo , et al. October 18, 2 | 2011-10-18 |
Multi-Region Processing System and Heads App 20110209663 - Endo; Rick ;   et al. | 2011-09-01 |
Method and system for mask handling in high productivity chamber Grant 7,993,461 - Endo , et al. August 9, 2 | 2011-08-09 |
Method and System for Isolated and Discretized Process Sequence Integration App 20110065284 - Chiang; Tony P. ;   et al. | 2011-03-17 |
Method and system for isolated and discretized process sequence integration Grant 7,867,904 - Chiang , et al. January 11, 2 | 2011-01-11 |
Small scanned magentron Grant 7,807,030 - Hong , et al. October 5, 2 | 2010-10-05 |
Combinatorial Process System App 20090069924 - Endo; Rick ;   et al. | 2009-03-12 |
Multi-region Processing System And Heads App 20090068849 - Endo; Rick ;   et al. | 2009-03-12 |
Combinatorial Process System App 20090061087 - Endo; Rick ;   et al. | 2009-03-05 |
Combinatorial Process System App 20090061108 - Endo; Rick ;   et al. | 2009-03-05 |
Method And System For Mask Handling In High Productivity Chamber App 20080295962 - Endo; Rick ;   et al. | 2008-12-04 |
Method And System For Isolated And Discretized Process Sequence Integration App 20080017109 - Chiang; Tony P. ;   et al. | 2008-01-24 |
Method And System For Isolated And Discretized Process Sequence Integration App 20080020589 - Chiang; Tony P. ;   et al. | 2008-01-24 |
Small Scanned Magentron App 20070102284 - HONG; Ilyoung Richard ;   et al. | 2007-05-10 |
Magnetron executing planetary motion adjacent a sputtering target Grant 7,169,271 - Hong , et al. January 30, 2 | 2007-01-30 |
Small planetary magnetron Grant 6,841,050 - Hong , et al. January 11, 2 | 2005-01-11 |
Magnetron executing planetary motion adjacent a sputtering target App 20040222087 - Hong, Ilyoung Richard ;   et al. | 2004-11-11 |
Design of hardware features to facilitate arc-spray coating applications and functions Grant 6,797,131 - Liu , et al. September 28, 2 | 2004-09-28 |
Design of hardware features to facilitate arc-spray coating applications and functions App 20040089542 - Liu, Alan Barry ;   et al. | 2004-05-13 |
Small planetary magnetron App 20030217913 - Hong, Ilyoung Richard ;   et al. | 2003-11-27 |
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