loadpatents
name:-0.044517040252686
name:-0.028625011444092
name:-0.00059700012207031
Tsung; James Patent Filings

Tsung; James

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsung; James.The latest application filed is for "systems and methods for parallel combinatorial vapor deposition processing".

Company Profile
0.34.35
  • Tsung; James - Milpitas CA
  • Tsung; James - San Jose CA
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Interchangeable sputter gun head
Grant 9,318,306 - Fong , et al. April 19, 2
2016-04-19
High productivity combinatorial processing using pressure-controlled one-way valves
Grant 9,269,567 - Hsueh , et al. February 23, 2
2016-02-23
Multipurpose combinatorial vapor phase deposition chamber
Grant 9,087,864 - Chen , et al. July 21, 2
2015-07-21
Systems and Methods for Parallel Combinatorial Vapor Deposition Processing
App 20150184287 - Tsung; James ;   et al.
2015-07-02
Multipurpose Combinatorial Vapor Phase Deposition Chamber
App 20150179487 - Chen; Chen-An ;   et al.
2015-06-25
Interchangeable Sputter Gun Head
App 20150176117 - Fong; Owen ;   et al.
2015-06-25
One-Way Valves for Controlling Flow into Deposition Chamber
App 20150170908 - Hsueh; Chien-Lan ;   et al.
2015-06-18
Combinatorial Process System
App 20150093898 - Endo; Rick ;   et al.
2015-04-02
Combinatorial RF bias method for PVD
Grant 8,974,649 - Shao , et al. March 10, 2
2015-03-10
Combinatorial process system
Grant 8,932,995 - Endo , et al. January 13, 2
2015-01-13
Method and System for Isolated and Discretized Process Sequence Integration
App 20140318450 - Endo; Richard R. ;   et al.
2014-10-30
Multi-Region Processing System and Heads
App 20140311408 - De; Indranil ;   et al.
2014-10-23
Controlling Radical Lifetimes in a Remote Plasma Chamber
App 20140273309 - Niyogi; Sandip ;   et al.
2014-09-18
Method and system for isolated and discretized process sequence integration
Grant 8,815,013 - Chiang , et al. August 26, 2
2014-08-26
Combinatorial process system
Grant 8,771,483 - Endo , et al. July 8, 2
2014-07-08
Multi-region processing system
Grant 8,770,143 - Endo , et al. July 8, 2
2014-07-08
Methods and Systems for Site-Isolated Combinatorial Substrate Processing Using a Mask
App 20140183161 - Niyogi; Sandip ;   et al.
2014-07-03
High Deposition Rate Chamber with Co-Sputtering Capabilities
App 20140174907 - Yang; Hong Sheng ;   et al.
2014-06-26
Combinatorial process system
Grant 8,758,581 - Endo , et al. June 24, 2
2014-06-24
Substrate Carrier
App 20140166840 - French; Wayne R. ;   et al.
2014-06-19
Method and system for mask handling in high productivity chamber
Grant 8,500,908 - Endo , et al. August 6, 2
2013-08-06
Method and system for isolated and discretized process sequence integration
Grant 8,486,844 - Endo , et al. July 16, 2
2013-07-16
Method and apparatus for variable conductance
Grant 8,486,821 - Endo , et al. July 16, 2
2013-07-16
Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing
App 20130168231 - Yang; Hong Sheng ;   et al.
2013-07-04
Substrate Processing Tool with Tunable Fluid Flow
App 20130153149 - Wang; Danny ;   et al.
2013-06-20
Combinatorial Rf Bias Method For Pvd
App 20130149469 - Shao; ShouQian ;   et al.
2013-06-13
Combinatorial process system
Grant 8,449,678 - Endo , et al. May 28, 2
2013-05-28
Combinatorial process system
Grant 8,387,563 - Endo , et al. March 5, 2
2013-03-05
Method and System for Mask Handling in High Productivity Chamber
App 20130042810 - Endo; Rick ;   et al.
2013-02-21
Method And System For Isolated And Discretized Process Sequence Integration/us
App 20120322173 - Chiang; Tony P. ;   et al.
2012-12-20
Method and system for mask handling in high productivity chamber
Grant 8,317,925 - Endo , et al. November 27, 2
2012-11-27
Method and system for isolated and discretized process sequence integration
Grant 8,283,264 - Chiang , et al. October 9, 2
2012-10-09
Method and apparatus for variable conductance
Grant 8,216,376 - Endo , et al. July 10, 2
2012-07-10
Combinatorial Process System
App 20120149180 - Endo; Rick ;   et al.
2012-06-14
Combinatorial Process System
App 20120142197 - Endo; Rick ;   et al.
2012-06-07
Method And System For Mask Handling In High Productivity Chamber
App 20110262644 - Endo; Rick ;   et al.
2011-10-27
Multi-region processing system and heads
Grant 8,039,052 - Endo , et al. October 18, 2
2011-10-18
Multi-Region Processing System and Heads
App 20110209663 - Endo; Rick ;   et al.
2011-09-01
Method and system for mask handling in high productivity chamber
Grant 7,993,461 - Endo , et al. August 9, 2
2011-08-09
Method and System for Isolated and Discretized Process Sequence Integration
App 20110065284 - Chiang; Tony P. ;   et al.
2011-03-17
Method and system for isolated and discretized process sequence integration
Grant 7,867,904 - Chiang , et al. January 11, 2
2011-01-11
Small scanned magentron
Grant 7,807,030 - Hong , et al. October 5, 2
2010-10-05
Combinatorial Process System
App 20090069924 - Endo; Rick ;   et al.
2009-03-12
Multi-region Processing System And Heads
App 20090068849 - Endo; Rick ;   et al.
2009-03-12
Combinatorial Process System
App 20090061087 - Endo; Rick ;   et al.
2009-03-05
Combinatorial Process System
App 20090061108 - Endo; Rick ;   et al.
2009-03-05
Method And System For Mask Handling In High Productivity Chamber
App 20080295962 - Endo; Rick ;   et al.
2008-12-04
Method And System For Isolated And Discretized Process Sequence Integration
App 20080017109 - Chiang; Tony P. ;   et al.
2008-01-24
Method And System For Isolated And Discretized Process Sequence Integration
App 20080020589 - Chiang; Tony P. ;   et al.
2008-01-24
Small Scanned Magentron
App 20070102284 - HONG; Ilyoung Richard ;   et al.
2007-05-10
Magnetron executing planetary motion adjacent a sputtering target
Grant 7,169,271 - Hong , et al. January 30, 2
2007-01-30
Small planetary magnetron
Grant 6,841,050 - Hong , et al. January 11, 2
2005-01-11
Magnetron executing planetary motion adjacent a sputtering target
App 20040222087 - Hong, Ilyoung Richard ;   et al.
2004-11-11
Design of hardware features to facilitate arc-spray coating applications and functions
Grant 6,797,131 - Liu , et al. September 28, 2
2004-09-28
Design of hardware features to facilitate arc-spray coating applications and functions
App 20040089542 - Liu, Alan Barry ;   et al.
2004-05-13
Small planetary magnetron
App 20030217913 - Hong, Ilyoung Richard ;   et al.
2003-11-27

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