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Method for estimating shape before shrink and CD-SEM apparatus Grant 9,830,524 - Sekiguchi , et al. November 28, 2 | 2017-11-28 |
Electric charged particle beam microscope and electric charged particle beam microscopy Grant 8,993,961 - Tsuneta , et al. March 31, 2 | 2015-03-31 |
Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy Grant 8,963,102 - Tsuneta , et al. February 24, 2 | 2015-02-24 |
Method For Estimating Shape Before Shrink And Cd-sem Apparatus App 20150036914 - Sekiguchi; Tomoko ;   et al. | 2015-02-05 |
Charged Particle Beam Microscope, Sample Holder For Charged Particle Beam Microscope, And Charged Particle Beam Microscopy App 20140353500 - Tsuneta; Ruriko ;   et al. | 2014-12-04 |
Specified position identifying method and specified position measuring apparatus Grant 8,442,300 - Tsuneta , et al. May 14, 2 | 2013-05-14 |
Multi-part specimen holder with conductive patterns Grant 8,334,519 - Ono , et al. December 18, 2 | 2012-12-18 |
Charged Particle Beam Microscope And Method Of Measurement Employing Same App 20120287258 - Tsuneta; Ruriko ;   et al. | 2012-11-15 |
Charged Particle Beam Microscope And Measuring Method Using Same App 20120104253 - Tsuneta; Ruriko ;   et al. | 2012-05-03 |
Electric charged particle beam microscope and microscopy Grant 7,863,564 - Tsuneta , et al. January 4, 2 | 2011-01-04 |
Electric charged particle beam microscopy and electric charged particle beam microscope Grant 7,633,064 - Tsuneta , et al. December 15, 2 | 2009-12-15 |
Electric Charged Particle Beam Microscope And Microscopy App 20090127474 - TSUNETA; Ruriko ;   et al. | 2009-05-21 |
Electron microscope App 20080283748 - Matsumoto; Takao ;   et al. | 2008-11-20 |
Scanning transmission electron microscope and scanning transmission electron microscopy Grant 7,372,029 - Tsuneta , et al. May 13, 2 | 2008-05-13 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system Grant 7,372,051 - Tsuneta , et al. May 13, 2 | 2008-05-13 |
Electric Charged Particle Beam Microscopy And Electric Charged Particle Beam Microscope App 20080093551 - TSUNETA; Ruriko ;   et al. | 2008-04-24 |
Specimen Analyzing Apparatus and Specimen Holder App 20080067374 - Ono; Shiano ;   et al. | 2008-03-20 |
Specified position identifying method and specified position measuring apparatus App 20070274593 - Tsuneta; Ruriko ;   et al. | 2007-11-29 |
Scanning transmission electron microscope and scanning transmission electron microscopy App 20070228277 - Tsuneta; Ruriko ;   et al. | 2007-10-04 |
Scanning transmission electron microscope and scanning transmission electron microscopy Grant 7,227,144 - Tsuneta , et al. June 5, 2 | 2007-06-05 |
Defect inspection instrument and positron beam apparatus Grant 7,141,790 - Koguchi , et al. November 28, 2 | 2006-11-28 |
Scanning transmission electron microscope and scanning transmission electron microscopy App 20060151701 - Tsuneta; Ruriko ;   et al. | 2006-07-13 |
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system App 20060038125 - Tsuneta; Ruriko ;   et al. | 2006-02-23 |
Electron microscope Grant 6,888,139 - Tsuneta , et al. May 3, 2 | 2005-05-03 |
Method and apparatus for charged particle beam microscopy Grant 6,838,667 - Tsuneta , et al. January 4, 2 | 2005-01-04 |
Defect inspection instrument and positron beam apparatus App 20040227078 - Koguchi, Masanari ;   et al. | 2004-11-18 |
Electron microscope App 20030201393 - Tsuneta, Ruriko ;   et al. | 2003-10-30 |
Autoadjusting electron microscope Grant 6,570,156 - Tsuneta , et al. May 27, 2 | 2003-05-27 |
Network solution system of analysis and evaluation App 20020099573 - Koguchi, Masanari ;   et al. | 2002-07-25 |
Method and apparatus for charged particle beam microscopy App 20020056808 - Tsuneta, Ruriko ;   et al. | 2002-05-16 |
Electron microscope Grant 6,051,834 - Kakibayashi , et al. April 18, 2 | 2000-04-18 |
Electron microscope Grant 5,866,905 - Kakibayashi , et al. February 2, 1 | 1999-02-02 |
Electron microscope Grant 5,650,621 - Tsuneta , et al. July 22, 1 | 1997-07-22 |
Electron microscope for specimen composition and strain analysis and observation method thereof Grant 5,453,617 - Tsuneta , et al. September 26, 1 | 1995-09-26 |