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Plasma Treatment Apparatus And Substrate Treatment System App 20150107516 - TSUNEKAWA; Koji ;   et al. | 2015-04-23 |
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Sputtering Apparatus And Sputtering Method App 20150096881 - TSUNEKAWA; Koji | 2015-04-09 |
Magnetoresistance effect device and method of production of the same Grant 8,934,290 - Djayaprawira , et al. January 13, 2 | 2015-01-13 |
Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium Grant 8,932,438 - Tsunekawa , et al. January 13, 2 | 2015-01-13 |
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Manufacturing Apparatus App 20130277207 - TSUNEKAWA; Koji | 2013-10-24 |
Method Of Fabricating And Apparatus Of Fabricating Tunnel Magnetic Resistive Element App 20130134032 - TSUNEKAWA; Koji ;   et al. | 2013-05-30 |
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Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program Grant 8,377,270 - Tsunekawa February 19, 2 | 2013-02-19 |
Method of manufacturing magnetoresistive device and apparatus for manufacturing the same Grant 8,367,156 - Nagamine , et al. February 5, 2 | 2013-02-05 |
Substrate processing apparatus and apparatus and method of manufacturing magnetic device Grant 8,246,798 - Hosoya , et al. August 21, 2 | 2012-08-21 |
Vacuum Heating/cooling Apparatus And Manufacturing Method Of Magnetoresistance Element App 20120193071 - Tsunekawa; Koji ;   et al. | 2012-08-02 |
Magnetoresistive element, method of manufacturing the same, and magnetic multilayered film manufacturing apparatus Grant 8,174,800 - Tsunekawa , et al. May 8, 2 | 2012-05-08 |
Phase-change memory element, phase-change memory cell, vacuum processing apparatus, and phase-change memory element manufacturing method Grant 8,143,611 - Choi , et al. March 27, 2 | 2012-03-27 |
Tunnel magnetoresistive thin film Grant 8,139,325 - Tsunekawa , et al. March 20, 2 | 2012-03-20 |
Sputtering apparatus and method for controlling the same Grant 8,118,981 - Tsunekawa February 21, 2 | 2012-02-21 |
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Vacuum Heating And Cooling Apparatus App 20110253037 - Tsunekawa; Koji ;   et al. | 2011-10-20 |
Method Of Manufacturing Magnetoresistive Element, Sputter Deposition Chamber, Apparatus For Manufacturing Magnetoresistive Element Having Sputter Deposition Chamber, Program And Storage Medium App 20110139606 - TSUNEKAWA; Koji ;   et al. | 2011-06-16 |
Method Of Manufacturing Magnetoresistance Element And Storage Medium Used In The Manufacturing Method App 20110143460 - Tsunekawa; Koji ;   et al. | 2011-06-16 |
Magnetoresistance Effect Device And Method Of Production Of The Same App 20110094875 - Djayaprawira; David D. ;   et al. | 2011-04-28 |
Method and apparatus for depositing a magnetoresistive multilayer film Grant 7,914,654 - Djayaprawira , et al. March 29, 2 | 2011-03-29 |
Sputtering Apparatus And Recording Medium For Recording Control Program Thereof App 20110042209 - Yamaguchi; Nobuo ;   et al. | 2011-02-24 |
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Dry Etching Method, Magneto-resistive Element, And Method And Apparatus For Manufacturing The Same App 20100310902 - Osada; Tomoaki ;   et al. | 2010-12-09 |
Magnetoresistance effect device Grant 7,813,088 - Tsunekawa , et al. October 12, 2 | 2010-10-12 |
High-frequency Sputtering Device App 20100213047 - Nagamine; Yoshinori ;   et al. | 2010-08-26 |
Vacuum Thin Film Forming Apparatus App 20100200394 - Nagamine; Yoshinori ;   et al. | 2010-08-12 |
Method and apparatus for depositing a magnetoresistive multilayer film Grant 7,771,570 - Djayaprawira , et al. August 10, 2 | 2010-08-10 |
Tunnel Magnetoresistive Thin Film And Magnetic Multilayer Film Formation Apparatus App 20100178528 - Tsunekawa; Koji ;   et al. | 2010-07-15 |
Sputtering Method And Sputtering Apparatus App 20100133092 - Mashimo; Kimiko ;   et al. | 2010-06-03 |
Magnetoresistance effect device and method of production thereof Grant 7,727,409 - Maehara , et al. June 1, 2 | 2010-06-01 |
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Fabricating Method Of Magnetoresistive Element, And Storage Medium App 20100078310 - Tsunekawa; Koji ;   et al. | 2010-04-01 |
Tunnel Magnetoresistive Thin Film And Magnetic Multilayer Formation Apparatus App 20100033878 - Tsunekawa; Koji ;   et al. | 2010-02-11 |
Magnetoresistance effect device and a preform therefor Grant 7,652,852 - Maehara , et al. January 26, 2 | 2010-01-26 |
Method Of Fabricating And Apparatus Of Fabricating Tunnel Magnetic Resistive Element App 20090321246 - Tsunekawa; Koji ;   et al. | 2009-12-31 |
Method for manufacturing a magnetoresistive multilayer film Grant 7,603,763 - Djayaprawira , et al. October 20, 2 | 2009-10-20 |
Sputtering Apparatus And Method For Controlling The Same App 20090211897 - Tsunekawa; Koji | 2009-08-27 |
Method of Manufacturing Magnetoresistance Effect Element and Apparatus for Manufacturing the Same App 20090148595 - Nagamine; Yoshinori ;   et al. | 2009-06-11 |
Contaminant Removing Method, Contaminant Removing Mechanism, And Vacuum Thin Film Formation Processing Apparatus App 20090032056 - Tsunekawa; Koji | 2009-02-05 |
Magnetroresistive Element, Method Of Manufacturing The Same, And Magnetic Multilayered Film Manufacturing Apparatus App 20080278865 - Tsunekawa; Koji ;   et al. | 2008-11-13 |
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Magnetoresistance Effect Device And Method Of Production Thereof App 20060038246 - Maehara; Hiroki ;   et al. | 2006-02-23 |
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Magnetoresistive multilayer film App 20050068695 - Djayaprawira, David Djulianto ;   et al. | 2005-03-31 |
Method of production of spin valve type giant magnetoresistive thin film Grant 6,720,036 - Tsunekawa , et al. April 13, 2 | 2004-04-13 |
Magnetic multi-layer film manufacturing apparatus Grant 6,641,703 - Nomura , et al. November 4, 2 | 2003-11-04 |
Magnetic film-forming device and method Grant 6,610,373 - Nakajima , et al. August 26, 2 | 2003-08-26 |
Method of production of spin valve type giant magnetoresistive thin film App 20030049389 - Tsunekawa, Koji ;   et al. | 2003-03-13 |
Magnetic film-forming device and method App 20020064594 - Nakajima, Daisuke ;   et al. | 2002-05-30 |
Magnetic multi-layer film manufacturing apparatus App 20020064595 - Nomura, Shuji ;   et al. | 2002-05-30 |