loadpatents
Patent applications and USPTO patent grants for TSUMURA; Kazumichi.The latest application filed is for "method of manufacturing a semiconductor device".
Patent | Date |
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Method Of Manufacturing A Semiconductor Device App 20190088618 - TSUMURA; Kazumichi ;   et al. | 2019-03-21 |
Semiconductor Memory Device App 20180261623 - HIGASHI; Kazuyuki ;   et al. | 2018-09-13 |
Semiconductor memory device Grant 10,074,667 - Higashi , et al. September 11, 2 | 2018-09-11 |
Method of bonding supporting substrate with device substrate for fabricating semiconductor device Grant 10,068,775 - Fujii , et al. September 4, 2 | 2018-09-04 |
Method For Fabricating Semiconductor Device App 20170069503 - FUJII; Mika ;   et al. | 2017-03-09 |
Semiconductor device and manufacturing method thereof Grant 9,099,443 - Tsumura August 4, 2 | 2015-08-04 |
Semiconductor Device And Method Of Manufacturing The Same App 20150108648 - TSUMURA; Kazumichi ;   et al. | 2015-04-23 |
Semiconductor chip with through hole vias Grant 8,963,319 - Tsumura , et al. February 24, 2 | 2015-02-24 |
Semiconductor Device And Manufacturing Method Thereof App 20140232011 - TSUMURA; Kazumichi | 2014-08-21 |
Interconnect structure employing a Mn-group VIIIB alloy liner Grant 8,772,942 - Edelstein , et al. July 8, 2 | 2014-07-08 |
Semiconductor device and manufacturing method thereof Grant 8,754,532 - Tsumura , et al. June 17, 2 | 2014-06-17 |
Interconnect structure employing a Mn-group VIIIB alloy liner Grant 8,716,134 - Edelstein , et al. May 6, 2 | 2014-05-06 |
Semiconductor Device And Manufacturing Method Thereof App 20140021631 - TSUMURA; Kazumichi ;   et al. | 2014-01-23 |
INTERCONNECT STRUCTURE EMPLOYING A Mn-GROUP VIIIB ALLOY LINER App 20130178058 - Edelstein; Daniel C. ;   et al. | 2013-07-11 |
Copper interconnect formation Grant 8,435,887 - Kelly , et al. May 7, 2 | 2013-05-07 |
Semiconductor device and manufacturing method thereof Grant 8,377,822 - Tsumura , et al. February 19, 2 | 2013-02-19 |
Semiconductor Chip And Semiconductor Device App 20120319296 - Tsumura; Kazumichi ;   et al. | 2012-12-20 |
Copper Interconnect Formation App 20120309190 - Kelly; James J. ;   et al. | 2012-12-06 |
Semiconductor Device And Manufacturing Method Thereof App 20110285024 - Tsumura; Kazumichi ;   et al. | 2011-11-24 |
Semiconductor device and method of fabricating the same Grant 8,008,186 - Tsumura , et al. August 30, 2 | 2011-08-30 |
INTERCONNECT STRUCTURE EMPLOYING A Mn-GROUP VIIIB ALLOY LINER App 20110180309 - Edelstein; Daniel C. ;   et al. | 2011-07-28 |
Semiconductor Device Having Aerial Wiring And Manufacturing Method Thereof App 20110027985 - TSUMURA; Kazumichi ;   et al. | 2011-02-03 |
Semiconductor device having aerial wiring and manufacturing method thereof Grant 7,795,733 - Tsumura , et al. September 14, 2 | 2010-09-14 |
Capacitor of dynamic random access memory and method of manufacturing the capacitor Grant 7,786,523 - Hayashi , et al. August 31, 2 | 2010-08-31 |
Semiconductor Device And Method Of Fabricating The Same App 20100167523 - TSUMURA; Kazumichi ;   et al. | 2010-07-01 |
Semiconductor device and method of fabricating the same Grant 7,687,910 - Tsumura , et al. March 30, 2 | 2010-03-30 |
Capacitor Of Dynamic Random Access Memory And Method Of Manufacturing The Capacitor App 20100052028 - HAYASHI; Yumi ;   et al. | 2010-03-04 |
Capacitor of dynamic random access memory and method of manufacturing the capacitor Grant 7,638,829 - Hayashi , et al. December 29, 2 | 2009-12-29 |
Semiconductor device and method for manufacturing the same Grant 7,470,609 - Tsumura , et al. December 30, 2 | 2008-12-30 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20080054466 - NASU; Hayato ;   et al. | 2008-03-06 |
Capacitor of dynamic random access memory and method of manufacturing the capacitor App 20070170483 - Hayashi; Yumi ;   et al. | 2007-07-26 |
Semiconductor device and method for manufacturing the same App 20070123029 - Tsumura; Kazumichi ;   et al. | 2007-05-31 |
Semiconductor device and method for manufacturing the same Grant 7,205,664 - Tsumura , et al. April 17, 2 | 2007-04-17 |
Semiconductor device having aerial wiring and manufacturing method thereof App 20070035032 - Tsumura; Kazumichi ;   et al. | 2007-02-15 |
Semiconductor device and method of fabricating the same App 20070026669 - Tsumura; Kazumichi ;   et al. | 2007-02-01 |
Semiconductor device and method for manufacturing the same App 20060261483 - Tsumura; Kazumichi ;   et al. | 2006-11-23 |
Semiconductor device and method of manufacturing the same Grant 7,115,999 - Tsumura , et al. October 3, 2 | 2006-10-03 |
Semiconductor device and method for manufacturing the same App 20050253266 - Tsumura, Kazumichi ;   et al. | 2005-11-17 |
Semiconductor device and method of manufacturing the same App 20050093168 - Tsumura, Kazumichi ;   et al. | 2005-05-05 |
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