| Patent | Date |
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Ion Implanter And Ion Implantation Method
App 20220285126 - Tsukihara; Mitsukuni | 2022-09-08 |
Ion implanter, ion implantation method, and beam measurement apparatus
Grant 9,502,210 - Sano , et al. November 22, 2 | 2016-11-22 |
Beam irradiation apparatus and beam irradiation method
Grant 9,449,791 - Tsukihara , et al. September 20, 2 | 2016-09-20 |
Ion Implanter, Ion Implantation Method, And Beam Measurement Apparatus
App 20160042915 - Sano; Makoto ; et al. | 2016-02-11 |
Beam Irradiation Apparatus And Beam Irradiation Method
App 20150364297 - Tsukihara; Mitsukuni ; et al. | 2015-12-17 |
Ion implantation apparatus and ion implantation method
Grant 9,208,996 - Tsukihara , et al. December 8, 2 | 2015-12-08 |
Ion implantation apparatus and ion implantation method
Grant 8,759,801 - Ninomiya , et al. June 24, 2 | 2014-06-24 |
Ion Implantation Apparatus And Ion Implantation Method
App 20140134833 - Tsukihara; Mitsukuni ; et al. | 2014-05-15 |
Ion Implantation Apparatus And Ion Implantation Method
App 20130092825 - NINOMIYA; Shiro ; et al. | 2013-04-18 |
Beam processing apparatus
Grant 7,982,192 - Tsukihara , et al. July 19, 2 | 2011-07-19 |
Ion implantation apparatus and ion implantation method
Grant 7,851,772 - Tsukihara , et al. December 14, 2 | 2010-12-14 |
Ion implantation apparatus
Grant 7,791,049 - Tsukihara , et al. September 7, 2 | 2010-09-07 |
Ion implantation apparatus and method of converging/shaping ion beam used therefor
Grant 7,755,067 - Tsukihara , et al. July 13, 2 | 2010-07-13 |
Beam processing system and beam processing method
Grant 7,718,980 - Tsukihara , et al. May 18, 2 | 2010-05-18 |
Electrostatic beam deflection scanner and beam deflection scanning method
Grant 7,687,782 - Tsukihara , et al. March 30, 2 | 2010-03-30 |
Method of controlling mover device
Grant 7,597,531 - Okada , et al. October 6, 2 | 2009-10-06 |
Beam Processing Apparatus
App 20080258074 - TSUKIHARA; Mitsukuni ; et al. | 2008-10-23 |
Ion Implantation Apparatus And Ion Implantation Method
App 20080251713 - Tsukihara; Mitsukuni ; et al. | 2008-10-16 |
Ion Implantation Apparatus
App 20080251737 - TSUKIHARA; Mitsukuni ; et al. | 2008-10-16 |
Ion Implantation Apparatus and Method of Converging/Shaping Ion Beam Used Therefor
App 20080251734 - Tsukihara; Mitsukuni ; et al. | 2008-10-16 |
Irradiation system ion beam and method to enhance accuracy of irradiation
Grant 7,429,743 - Kabasawa , et al. September 30, 2 | 2008-09-30 |
Beam processing system and beam processing method
Grant 7,411,709 - Yagita , et al. August 12, 2 | 2008-08-12 |
Method to increase low-energy beam current in irradiation system with ion beam
Grant 7,361,892 - Kabasawa , et al. April 22, 2 | 2008-04-22 |
Irradiation system with ion beam
Grant 7,351,987 - Kabasawa , et al. April 1, 2 | 2008-04-01 |
Electrostatic beam deflection scanner and beam deflection scanning method
App 20080067404 - Tsukihara; Mitsukuni ; et al. | 2008-03-20 |
Beam processing system and beam processing method
App 20080067397 - Tsukihara; Mitsukuni ; et al. | 2008-03-20 |
Beam processing system and beam processing method
App 20080002244 - Yagita; Takanori ; et al. | 2008-01-03 |
Irradiation system with ion beam/charged particle beam
Grant 7,315,034 - Yagita , et al. January 1, 2 | 2008-01-01 |
Wafer charge compensation device and ion implantation system having the same
Grant 7,304,319 - Kawaguchi , et al. December 4, 2 | 2007-12-04 |
Beam space-charge compensation device and ion implantation system having the same
Grant 7,276,711 - Kawaguchi , et al. October 2, 2 | 2007-10-02 |
Mover device and semiconductor manufacturing apparatus and method
Grant 7,187,143 - Okada , et al. March 6, 2 | 2007-03-06 |
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
Grant 7,138,641 - Matsushita , et al. November 21, 2 | 2006-11-21 |
Beam space-charge compensation device and ion implantation system having the same
App 20060113491 - Kawaguchi; Hiroshi ; et al. | 2006-06-01 |
Irradiation system with ion beam/charged particle beam
App 20060113467 - Yagita; Takanori ; et al. | 2006-06-01 |
Method to increase low-energy beam current in irradiation system with ion beam
App 20060113465 - Kabasawa; Mitsuaki ; et al. | 2006-06-01 |
Wafer charge compensation device and ion implantation system having the same
App 20060113492 - Kawaguchi; Hiroshi ; et al. | 2006-06-01 |
Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
App 20060113490 - Matsushita; Hiroshi ; et al. | 2006-06-01 |
Irradiation system with ion beam
App 20060113466 - Kabasawa; Mitsuaki ; et al. | 2006-06-01 |
Irradiation system ion beam and method to enhance accuracy of irradiation
App 20060113493 - Kabasawa; Mitsuaki ; et al. | 2006-06-01 |
Ion implanter and method for controlling the same
Grant 6,984,833 - Sano , et al. January 10, 2 | 2006-01-10 |
Method of controlling mover device, cooperative device of mover device, cooperative method of mover device, semiconductor manufacturing device, liquid crystal manufacturing device, and mechanical scan ion implantation device
App 20050188924 - Okada, Keiji ; et al. | 2005-09-01 |
Ion implanter and method for controlling the same
App 20040251432 - Sano, Makoto ; et al. | 2004-12-16 |
Mover device and semiconductor manufacturing apparatus and method
App 20040194565 - Okada, Keiji ; et al. | 2004-10-07 |
Ion beam processing method and apparatus therefor
Grant 6,797,968 - Tsukihara , et al. September 28, 2 | 2004-09-28 |
Ion implantation apparatus capable of increasing beam current
Grant 6,794,661 - Tsukihara , et al. September 21, 2 | 2004-09-21 |
Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
Grant 6,635,889 - Tsukihara , et al. October 21, 2 | 2003-10-21 |
Ion beam processing method and apparatus therefor
App 20030122090 - Tsukihara, Mitsukuni ; et al. | 2003-07-03 |
Ion implantation apparatus
Grant 6,573,517 - Sugitani , et al. June 3, 2 | 2003-06-03 |
Ion implantation apparatus capable of increasing beam current
App 20020179854 - Tsukihara, Mitsukuni ; et al. | 2002-12-05 |
Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof
App 20020096650 - Tsukihara, Mitsukuni ; et al. | 2002-07-25 |
Method and system for optimizing linac operational parameters
Grant 6,242,747 - Sugitani , et al. June 5, 2 | 2001-06-05 |
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