| Patent | Date |
|---|
Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system
Grant 8,450,657 - Tsukamoto May 28, 2 | 2013-05-28 |
Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
Grant 8,207,476 - Tsukamoto , et al. June 26, 2 | 2012-06-26 |
Post-etch treatment system for removing residue on a substrate
Grant 8,057,633 - Tsukamoto , et al. November 15, 2 | 2011-11-15 |
Gas distribution system for a post-etch treatment system
Grant 8,034,176 - Tsukamoto , et al. October 11, 2 | 2011-10-11 |
Method for multi-step temperature control of a substrate
Grant 7,952,049 - Tsukamoto May 31, 2 | 2011-05-31 |
Temperature Controlled Substrate Holder Having Erosion Resistant Insulating Layer For A Substrate Processing System
App 20110011845 - TSUKAMOTO; Yuji | 2011-01-20 |
Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system
Grant 7,838,800 - Tsukamoto November 23, 2 | 2010-11-23 |
Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
Grant 7,723,648 - Tsukamoto , et al. May 25, 2 | 2010-05-25 |
Temperature Controlled Substrate Holder With Non-uniform Insulation Layer For A Substrate Processing System
App 20100078424 - TSUKAMOTO; YUJI ; et al. | 2010-04-01 |
Process and apparatus for anaerobic treatment of sulfur compound-containing wastewater
Grant 7,427,357 - Kamachi , et al. September 23, 2 | 2008-09-23 |
Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
App 20080083723 - Tsukamoto; Yuji ; et al. | 2008-04-10 |
Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system
App 20080083724 - Tsukamoto; Yuji | 2008-04-10 |
Method For Multi-step Temperature Control Of A Substrate
App 20080073335 - TSUKAMOTO; Yuji | 2008-03-27 |
Method for multi-step temperature control of a substrate
Grant 7,297,894 - Tsukamoto November 20, 2 | 2007-11-20 |
Gas distribution system for a post-etch treatment system
App 20070235137 - Tsukamoto; Yuji ; et al. | 2007-10-11 |
Post-etch treatment system for removing residue on a substrate
App 20070235138 - Tsukamoto; Yuji ; et al. | 2007-10-11 |
Process and apparatus for anaerobic treatment of sulfur compound-containing wastewater
App 20070175822 - Kamachi; Kazumasa ; et al. | 2007-08-02 |
Method and system for temperature control of a substrate
Grant 7,230,204 - Mitrovic , et al. June 12, 2 | 2007-06-12 |
Method and apparatus for improved plasma processing uniformity
Grant 7,164,236 - Mitrovic , et al. January 16, 2 | 2007-01-16 |
Method and system for substrate temperature profile control
App 20060027169 - Tsukamoto; Yuji ; et al. | 2006-02-09 |
Method and apparatus for improved plasma processing uniformity
App 20040168770 - Mitrovic, Andrej S. ; et al. | 2004-09-02 |
Electronic board system and coordinates-inputting pen
Grant 6,700,129 - Usuda , et al. March 2, 2 | 2004-03-02 |
Magneto-resistance effect type composite head and production method thereof
Grant 6,639,766 - Nobuyuki , et al. October 28, 2 | 2003-10-28 |
Method and apparatus for improved plasma processing uniformity
App 20030137251 - Mitrovic, Andrej S. ; et al. | 2003-07-24 |
Magneto-resistance effect type composite head and production method thereof
App 20020027753 - Ishiwata, Nobuyuki ; et al. | 2002-03-07 |
Content rental system
App 20020013940 - Tsukamoto, Yuji ; et al. | 2002-01-31 |
Magnetic tunnel junction elements and their fabrication method
Grant 6,341,053 - Nakada , et al. January 22, 2 | 2002-01-22 |
Magnetic disk device using a contact start stop system
Grant 6,330,124 - Tsukamoto , et al. December 11, 2 | 2001-12-11 |
Digital contents rental system
App 20010013120 - Tsukamoto, Yuji | 2001-08-09 |
Television broadcasting system having an automated charging system
App 20010003845 - Tsukamoto, Yuji ; et al. | 2001-06-14 |
Method of fabricating ferromagnetic tunnel junction device
Grant 6,174,736 - Tsukamoto , et al. January 16, 2 | 2001-01-16 |
Plasma processing apparatus
Grant 5,868,848 - Tsukamoto February 9, 1 | 1999-02-09 |
Switching adapter and method for a computer system
Grant 5,867,677 - Tsukamoto February 2, 1 | 1999-02-02 |
Magnetic recording medium comprising a solid lubrication layer of fullerene carbon having an alkyl or allyl chain
Grant 5,447,796 - Tsukamoto , et al. September 5, 1 | 1995-09-05 |
Apparatus for measuring an adhesion force of a thin film
Grant 4,856,326 - Tsukamoto August 15, 1 | 1989-08-15 |
Magnetic recording medium with protective layer using graphite fluoride and method of producing same
Grant 4,839,244 - Tsukamoto June 13, 1 | 1989-06-13 |
Magnetic recording member
Grant 4,758,474 - Tsukamoto July 19, 1 | 1988-07-19 |
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