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Reflection type mask Grant 7,072,438 - Chiba , et al. July 4, 2 | 2006-07-04 |
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X-ray illumination optical system and x-ray reduction exposure apparatus App 20050031072 - Miyake, Akira ;   et al. | 2005-02-10 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,836,531 - Hara , et al. December 28, 2 | 2004-12-28 |
X-ray illumination optical system and X-ray reduction exposure apparatus Grant 6,834,098 - Miyake , et al. December 21, 2 | 2004-12-21 |
Exposure apparatus, and device manufacturing method Grant 6,819,396 - Tanabe , et al. November 16, 2 | 2004-11-16 |
Laminating film and lamination process using the same Grant 6,802,925 - Kobayashi , et al. October 12, 2 | 2004-10-12 |
Reflection type mask App 20040125911 - Chiba, Keiko ;   et al. | 2004-07-01 |
X-ray mask, and exposure method and apparatus using the same Grant 6,728,332 - Chiba , et al. April 27, 2 | 2004-04-27 |
Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device Grant 6,723,475 - Tsukamoto , et al. April 20, 2 | 2004-04-20 |
X-ray projection exposure apparatus and a device manufacturing method App 20040071260 - Hara, Shinichi ;   et al. | 2004-04-15 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,668,037 - Hara , et al. December 23, 2 | 2003-12-23 |
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method Grant 6,642,528 - Amemiya , et al. November 4, 2 | 2003-11-04 |
Laminating film and lamination process using the same App 20030049422 - Kobayashi, Masaya ;   et al. | 2003-03-13 |
X-ray illumination optical system and X-ray reduction exposure apparatus App 20020110217 - Miyake, Akira ;   et al. | 2002-08-15 |
X-ray projection exposure apparatus and a device manufacturing method App 20020101956 - Hara, Shinichi ;   et al. | 2002-08-01 |
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method App 20020079462 - Amemiya, Mitsuaki ;   et al. | 2002-06-27 |
X-ray mask, and exposure method and apparatus using the same App 20020021781 - Chiba, Keiko ;   et al. | 2002-02-21 |
X-ray projection exposure apparatus and a device manufacturing method App 20020006180 - Hara, Shinichi ;   et al. | 2002-01-17 |
X-ray Illumination Optical System And X-ray Reduction Exposure Apparatus App 20020003855 - MIYAKE, AKIRA ;   et al. | 2002-01-10 |
Contamination prevention in optical system App 20020000519 - Tsukamoto, Masami | 2002-01-03 |
X-ray mask, and exposure method and apparatus using the same Grant 6,317,479 - Chiba , et al. November 13, 2 | 2001-11-13 |
Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device App 20010038953 - Tsukamoto, Masami ;   et al. | 2001-11-08 |
X-ray projection exposure apparatus and a device manufacturing method Grant 6,084,938 - Hara , et al. July 4, 2 | 2000-07-04 |
X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device Grant 6,038,279 - Miyake , et al. March 14, 2 | 2000-03-14 |
X-ray optical apparatus and device fabrication method Grant 5,896,438 - Miyake , et al. April 20, 1 | 1999-04-20 |