Tsukamoto; Kiwamu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsukamoto; Kiwamu.The latest application filed is for "electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus".
- Tsukamoto; Kiwamu - Tokyo JP
- Tsukamoto; Kiwamu - Fujisawa-shi JP
- Tsukamoto; Kiwamu - Kanagawa-ken JP
- Tsukamoto; Kiwamu - Chigasaki JP
- Tsukamoto; Kiwamu - Fujisawa JP
| Patent | Date |
|---|---|
| Electron-beam irradiated area adjustment method and adjustment system, electron-beam irradiated region correction method, and electron beam irradiation apparatus Grant 10,446,404 - Tajima , et al. Oc | 2019-10-15 |
| Inspection device Grant 10,157,722 - Hatakeyama , et al. Dec | 2018-12-18 |
| Electron-beam Irradiated Area Adjustment Method And Adjustment System, Electron-beam Irradiated Region Correction Method, And Electron Beam Irradiation Apparatus App 20180233374 - TAJIMA; Ryo ; et al. | 2018-08-16 |
| Surface processing apparatus Grant 9,852,878 - Hatakeyama , et al. December 26, 2 | 2017-12-26 |
| Inspection apparatus Grant 9,601,302 - Yoshikawa , et al. March 21, 2 | 2017-03-21 |
| Inspection Device App 20160307726 - Hatakeyama; Masahiro ; et al. | 2016-10-20 |
| Surface Processing Apparatus App 20150371813 - HATAKEYAMA; Masahiro ; et al. | 2015-12-24 |
| Inspection Apparatus App 20150340193 - YOSHIKAWA; Shoji ; et al. | 2015-11-26 |
| Inspection apparatus Grant 9,134,261 - Yoshikawa , et al. September 15, 2 | 2015-09-15 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 9,105,444 - Watanabe , et al. August 11, 2 | 2015-08-11 |
| Inspection Apparatus App 20150097116 - HATAKEYAMA; Masahiro ; et al. | 2015-04-09 |
| Inspection apparatus Grant 8,946,629 - Hatakeyama , et al. February 3, 2 | 2015-02-03 |
| Inspection Apparatus App 20140319345 - HATAKEYAMA; Masahiro ; et al. | 2014-10-30 |
| Inspection Apparatus App 20140312227 - YOSHIKAWA; Shoji ; et al. | 2014-10-23 |
| Inspection apparatus Grant 8,742,344 - Hatakeyama , et al. June 3, 2 | 2014-06-03 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20140091215 - WATANABE; Kenji ; et al. | 2014-04-03 |
| Inspection Apparatus App 20140077078 - HATAKEYAMA; Masahiro ; et al. | 2014-03-20 |
| Inspection Device App 20140014848 - Hatakeyama; Masahiro ; et al. | 2014-01-16 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 8,624,182 - Watanabe , et al. January 7, 2 | 2014-01-07 |
| Inspection device Grant 8,497,476 - Hatakeyama , et al. July 30, 2 | 2013-07-30 |
| Inspection Device App 20120235036 - Hatakeyama; Masahiro ; et al. | 2012-09-20 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20120074316 - WATANABE; Kenji ; et al. | 2012-03-29 |
| Substrate Treatment Apparatus And Substrate Treatment Method App 20080220621 - Shinozaki; Hiroyuki ; et al. | 2008-09-11 |
| Substrate Processing Apparatus And Substrate Processing Method App 20070095791 - Shinozaki; Hiroyuki ; et al. | 2007-05-03 |
| Substrate Processing Apparatus And Substrate Processing Method App 20070092651 - Shinozaki; Hiroyuki ; et al. | 2007-04-26 |
| Substrate Processing Apparatus And Substrate Processing Method App 20070092646 - SHINOZAKI; Hiroyuki ; et al. | 2007-04-26 |
| Substrate processing apparatus and substrate processing method App 20060169208 - Shinozaki; Hiroyuki ; et al. | 2006-08-03 |
| Positive displacement type liquid-delivery apparatus Grant 6,419,462 - Horie , et al. July 16, 2 | 2002-07-16 |
| Apparatus and method for processing substrate Grant 6,387,182 - Horie , et al. May 14, 2 | 2002-05-14 |
| Thin-film deposition apparatus Grant 6,176,929 - Fukunaga , et al. January 23, 2 | 2001-01-23 |
| Valving device Grant 6,116,267 - Suzuki , et al. September 12, 2 | 2000-09-12 |
| Thin-film vapor deposition apparatus Grant 6,022,413 - Shinozaki , et al. February 8, 2 | 2000-02-08 |
| Reactant gas ejector head Grant 5,950,925 - Fukunaga , et al. September 14, 1 | 1999-09-14 |
| Vapor feed supply system Grant 5,950,646 - Horie , et al. September 14, 1 | 1999-09-14 |
| Thin-film vapor deposition apparatus Grant 5,935,337 - Takeuchi , et al. August 10, 1 | 1999-08-10 |
| Reactant gas ejector head and thin-film vapor deposition apparatus Grant 5,728,223 - Murakami , et al. March 17, 1 | 1998-03-17 |
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