Tsukamoto; Izumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsukamoto; Izumi.The latest application filed is for "exposure apparatus".

Company Profile

0.7.4

Tsukamoto; Izumi - Sakai JP
Tsukamoto; Izumi - Tokyo JP
Tsukamoto; Izumi - Setagaya-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cabin for work machine Grant D705,276 - Furuki , et al. May 20, 2	2014-05-20
Exposure apparatus Grant 7,755,740 - Tsukamoto , et al. July 13, 2	2010-07-13
Exposure Apparatus App 20080187872 - Tsukamoto; Izumi ; et al.	2008-08-07
Substrate attracting and holding system for use in exposure apparatus Grant 6,809,802 - Tsukamoto , et al. October 26, 2	2004-10-26
Substrate attracting and holding system for use in exposure apparatus Grant 6,762,826 - Tsukamoto , et al. July 13, 2	2004-07-13
Substrate attracting and holding system for use in exposure apparatus App 20040036850 - Tsukamoto, Izumi ; et al.	2004-02-26
Exposure apparatus, and device manufacturing method Grant 6,654,096 - Fujita , et al. November 25, 2	2003-11-25
Focus measurement in projection exposure apparatus Grant 6,633,390 - Shiode , et al. October 14, 2	2003-10-14
Focus measurement in projection exposure apparatus App 20020015158 - Shiode, Yoshihiro ; et al.	2002-02-07
Exposure apparatus, coating/developing system, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method App 20020011207 - Uzawa, Shigeyuki ; et al.	2002-01-31
Transfer apparatus for compensating for a transfer error Grant 4,538,914 - Yomoda , et al. September 3, 1	1985-09-03

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