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Apparatus For Exhaust Gas Abatement Under Reduced Pressure
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Apparatus for exhaust gas abatement under reduced pressure
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Method For Exhaust Gas Abatement Under Reduced Pressure And Apparatus Therefor
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Method And Apparatus For Exhaust Gas Abatement Under Reduced Pressure
App 20200033000 - YANAGISAWA; Michihiko ; et al. | 2020-01-30 |
Ammonia detoxification device
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Ammonia Detoxification Device
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Apparatus and method for manufacturing halogen gas and halogen gas recovery and circulatory system
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Apparatus and method for manufacturing halogen gas and halogen gas recovery and circulatory system
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Apparatus and method for manufacturing halogen gas and halogen gas recovery and circulatory system
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Plasma etching apparatus with dielectrically isolated electrodes
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Waste gas exhaust system for vacuum process apparatus
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Dry etching apparatus comprising etching chambers of different etching rate distributions
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Method of monitoring status of a silicon layer by detecting, emission spectra variable during etching
Grant 4,430,151 - Tsukada February 7, 1 | 1984-02-07 |
Plasma device comprising an intermediate electrode out of contact with a high frequency electrode to induce electrostatic attraction
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Dry etching device comprising a member for bringing a specimen into electrical contact with a grounded electrode
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