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Drawing method and method of manufacturing article Grant 9,690,201 - Tsujita , et al. June 27, 2 | 2017-06-27 |
Determination method, storage medium and information processing apparatus Grant 9,551,926 - Gyoda , et al. January 24, 2 | 2017-01-24 |
Resist pattern calculation method and calculation program storage medium Grant 9,448,495 - Nakayama , et al. September 20, 2 | 2016-09-20 |
Pattern forming method and article manufacturing method Grant 9,406,510 - Tsujita , et al. August 2, 2 | 2016-08-02 |
Exposure method and storage medium Grant 9,268,239 - Gyoda , et al. February 23, 2 | 2016-02-23 |
Storage medium storing computer program for determining at least one of exposure condition and mask pattern Grant 9,036,897 - Ishii , et al. May 19, 2 | 2015-05-19 |
Recording medium recording program for generating mask data, method for manufacturing mask, and exposure method Grant 8,949,748 - Ishii , et al. February 3, 2 | 2015-02-03 |
Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition Grant 8,867,023 - Tsujita October 21, 2 | 2014-10-21 |
Pattern Forming Method And Article Manufacturing Method App 20140199843 - Tsujita; Kouichirou ;   et al. | 2014-07-17 |
Recording medium and determination method Grant 8,739,079 - Tsujita , et al. May 27, 2 | 2014-05-27 |
Non-transitory computer-readable storage medium, decision method and computer for deciding exposure condition using evaluation item of interest and auxiliary evaluation item Grant 8,584,055 - Gyoda , et al. November 12, 2 | 2013-11-12 |
Effective light source shape database generation method, optical image calculation method, recording medium, exposure method, and device fabrication method Grant 8,582,083 - Yoshii , et al. November 12, 2 | 2013-11-12 |
Drawing Method And Method Of Manufacturing Article App 20130196517 - Tsujita; Kouichirou ;   et al. | 2013-08-01 |
Determination Method, Storage Medium And Information Processing Apparatus App 20130010272 - Gyoda; Yuichi ;   et al. | 2013-01-10 |
Exposure method Grant 8,339,579 - Tsujita December 25, 2 | 2012-12-25 |
Recording medium storing program for determining exposure parameter, exposure method, and method of manufacturing device Grant 8,334,968 - Tsujita , et al. December 18, 2 | 2012-12-18 |
Non-transitory Computer-readable Storage Medium, Decision Method And Computer App 20120233574 - Gyoda; Yuichi ;   et al. | 2012-09-13 |
Recording Medium Recording Program For Generating Mask Data, Method For Manufacturing Mask, And Exposure Method App 20120107730 - Ishii; Hiroyuki ;   et al. | 2012-05-03 |
Resist Pattern Calculation Method And Calculation Program Storage Medium App 20120092639 - Nakayama; Ryo ;   et al. | 2012-04-19 |
Method For Determining Exposure Condition And Computer-readable Storage Media Storing Program For Determining Exposure Condition App 20120081689 - Tsujita; Kouichirou | 2012-04-05 |
Exposure Method And Storage Medium App 20120075614 - GYODA; Yuichi ;   et al. | 2012-03-29 |
Decision Method And Storage Medium App 20120033194 - MIKAMI; Koji ;   et al. | 2012-02-09 |
Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition Grant 8,085,386 - Tsujita December 27, 2 | 2011-12-27 |
Method of transferring pattern of reticle, computer readable storage medium, and method of manufacturing device Grant 8,049,191 - Tsujita , et al. November 1, 2 | 2011-11-01 |
Exposure method and memory medium storing computer program Grant 8,029,954 - Mikami , et al. October 4, 2 | 2011-10-04 |
Storage Medium Storing Computer Program For Determining At Least One Of Exposure Condition And Mask Pattern App 20110206270 - Ishii; Hiroyuki ;   et al. | 2011-08-25 |
Recording Medium And Determination Method App 20110107277 - Tsujita; Kouichirou ;   et al. | 2011-05-05 |
Method Of Transferring Pattern Of Reticle, Computer Readable Storage Medium, And Method Of Manufacturing Device App 20100102255 - Tsujita; Kouichirou ;   et al. | 2010-04-29 |
Exposure Method And Memory Medium Storing Computer Program App 20100009275 - Mikami; Koji ;   et al. | 2010-01-14 |
Parameter determination method, exposure method, device fabrication method, and storage medium Grant 7,642,022 - Yoshii , et al. January 5, 2 | 2010-01-05 |
Recording Medium Storing Program For Determining Exposure Parameter, Exposure Method, And Method Of Manufacturing Device App 20090310116 - Tsujita; Kouichirou ;   et al. | 2009-12-17 |
Effective Light Source Shape Database Generation Method, Optical Image Calculation Method, Recording Medium, Exposure Method, And Device Fabrication Method App 20090231562 - Yoshii; Hiroto ;   et al. | 2009-09-17 |
Parameter Determination Method, Exposure Method, Device Fabrication Method, And Storage Medium App 20090233194 - Yoshii; Hiroto ;   et al. | 2009-09-17 |
Method For Determining Exposure Condition And Computer-readable Storage Media Storing Program For Determining Exposure Condition App 20080151210 - Tsujita; Kouichirou | 2008-06-26 |
Exposure Method App 20070013896 - Tsujita; Kouichirou | 2007-01-18 |
Method of manufacturing electronic device Grant 6,938,238 - Okagawa , et al. August 30, 2 | 2005-08-30 |
Method of manufacturing semiconductor device Grant 6,916,749 - Tsujita , et al. July 12, 2 | 2005-07-12 |
Exposure method App 20050095539 - Tsujita, Kouichirou | 2005-05-05 |
Method of manufacturing a thinned gate electrode utilizing protective films and etching Grant 6,849,486 - Yamada , et al. February 1, 2 | 2005-02-01 |
Method of manufacturing semiconductor device Grant 6,774,043 - Yamaguchi , et al. August 10, 2 | 2004-08-10 |
Method of manufacturing semiconductor device App 20040087044 - Tsujita, Kouichirou ;   et al. | 2004-05-06 |
Method of manufacturing electronic device App 20040054981 - Okagawa, Takashi ;   et al. | 2004-03-18 |
Manufacturing method of semiconductor device App 20030216018 - Yamada, Tetsuya ;   et al. | 2003-11-20 |
Antireflection coating and semiconductor device manufacturing method Grant 6,607,992 - Tsujita , et al. August 19, 2 | 2003-08-19 |
Method of manufacturing semiconductor device App 20020160619 - Yamada, Tetsuya ;   et al. | 2002-10-31 |
Antireflection coating and semiconductor device manufacturing method App 20020123245 - Tsujita, Kouichirou ;   et al. | 2002-09-05 |
Method of manufacturing semiconductor device App 20020013055 - Yamaguchi, Atsumi ;   et al. | 2002-01-31 |
Pattern determination method Grant 5,955,227 - Tsujita , et al. September 21, 1 | 1999-09-21 |
Manufacturing method of semiconductor device Grant 5,783,365 - Tsujita July 21, 1 | 1998-07-21 |
Semiconductor device and method of manufacturing the same Grant 5,488,246 - Hayashide , et al. January 30, 1 | 1996-01-30 |
Semiconductor substrate provided with marks for alignment even under a resist film Grant 4,981,529 - Tsujita January 1, 1 | 1991-01-01 |