Tsujimoto; Kazunori
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsujimoto; Kazunori.The latest application filed is for "dry etching apparatus and a method of manufacturing a semiconductor device".
- Tsujimoto; Kazunori - Higashi-yamato JP
- Tsujimoto; Kazunori - Tokyo JP
- Tsujimoto; Kazunori - Higashiyamato JP
- Tsujimoto; Kazunori - Higashiyamato-shi JP
- Tsujimoto; Kazunori - Yamato JP
- Tsujimoto; Kazunori - Amagasaki JP
- Tsujimoto; Kazunori - Hachioji JP
| Patent | Date |
|---|---|
| Method and apparatus for dry etching Grant 7,071,114 - Kumihashi , et al. July 4, 2 | 2006-07-04 |
| Dry etching apparatus and a method of manufacturing a semiconductor device App 20060096706 - Kofuji; Naoyuki ; et al. | 2006-05-11 |
| Method and apparatus for dry etching App 20050074977 - Kumihashi, Takao ; et al. | 2005-04-07 |
| Method for manufacturing semiconductor device Grant 6,713,401 - Yokogawa , et al. March 30, 2 | 2004-03-30 |
| Method and apparatus for dry etching App 20020098708 - Kumihashi, Takao ; et al. | 2002-07-25 |
| Method for manufacturing semiconductor device App 20020094691 - Yokogawa, Kenetsu ; et al. | 2002-07-18 |
| Dry Etching Apparatus And A Method Of Manufacturing A Semiconductor Device App 20020084034 - KOFUJI, NAOYUKI ; et al. | 2002-07-04 |
| Surface treatment method and system Grant 6,332,425 - Kofuji , et al. December 25, 2 | 2001-12-25 |
| Surface treatment method and system Grant 6,231,777 - Kofuji , et al. May 15, 2 | 2001-05-15 |
| Method and apparatus for dry etching Grant 6,136,721 - Kumihashi , et al. October 24, 2 | 2000-10-24 |
| Plasma processing apparatus Grant 6,033,481 - Yokogawa , et al. March 7, 2 | 2000-03-07 |
| Propelling apparatus for underground propelling construction work Grant 5,904,444 - Kabeuchi , et al. May 18, 1 | 1999-05-18 |
| Plasma processing apparatus Grant 5,891,252 - Yokogawa , et al. April 6, 1 | 1999-04-06 |
| Method and apparatus for dry etching Grant 5,474,650 - Kumihashi , et al. December 12, 1 | 1995-12-12 |
| Dry-etching method and apparatus Grant 5,409,562 - Kumihashi , et al. April 25, 1 | 1995-04-25 |
| Dry etching apparatus and method Grant 5,368,685 - Kumihashi , et al. November 29, 1 | 1994-11-29 |
| Dry etching method Grant 5,354,416 - Okudaira , et al. * October 11, 1 | 1994-10-11 |
| Method and apparatus for dry etching Grant 5,318,667 - Kumihashi , et al. June 7, 1 | 1994-06-07 |
| Process for fabricating field effect transistor Grant 5,270,232 - Kimura , et al. December 14, 1 | 1993-12-14 |
| Plasma treatment method and apparatus Grant 5,242,539 - Kumihashi , et al. September 7, 1 | 1993-09-07 |
| Dry etching method Grant 5,147,500 - Tachi , et al. September 15, 1 | 1992-09-15 |
| Dry etching method Grant 4,992,136 - Tachi , et al. February 12, 1 | 1991-02-12 |
| Method of dry etching Grant 4,986,877 - Tachi , et al. January 22, 1 | 1991-01-22 |
| Dry etching by alternately etching and depositing Grant 4,985,114 - Okudaira , et al. January 15, 1 | 1991-01-15 |
| Dry etching apparatus Grant 4,956,043 - Kanetomo , et al. September 11, 1 | 1990-09-11 |
| Etching method Grant 4,943,344 - Tachi , et al. July 24, 1 | 1990-07-24 |
| Plasma treating method and apparatus therefor Grant 4,911,812 - Kudo , et al. March 27, 1 | 1990-03-27 |
| Process for surface treatment Grant 4,857,137 - Tachi , et al. August 15, 1 | 1989-08-15 |
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