Tsujikawa; Takuro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsujikawa; Takuro.The latest application filed is for "lithography apparatus and method of manufacturing article".

Company Profile

0.5.6

Tsujikawa; Takuro - Utsunomiya JP
Tsujikawa; Takuro - Utsunomiya-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement method, measurement apparatus, lithography apparatus, and method of manufacturing article Grant 10,460,433 - Tsujikawa Oc	2019-10-29
Lithography Apparatus And Method Of Manufacturing Article App 20180329294 - Tsujikawa; Takuro	2018-11-15
Lithography apparatus and article manufacturing method Grant 10,120,294 - Tsujikawa November 6, 2	2018-11-06
Detection apparatus, lithography apparatus, method of manufacturing article, and detection method Grant 10,095,124 - Tsujikawa October 9, 2	2018-10-09
Measurement Method, Measurement Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20170278233 - Tsujikawa; Takuro	2017-09-28
Exposure apparatus, exposure method, and device manufacturing method Grant 9,575,413 - Tsujikawa , et al. February 21, 2	2017-02-21
Detection Apparatus, Lithography Apparatus, Method Of Manufacturing Article, And Detection Method App 20170005017 - Tsujikawa; Takuro	2017-01-05
Lithography Apparatus And Article Manufacturing Method App 20160139513 - Tsujikawa; Takuro	2016-05-19
Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20150338746 - Tsujikawa; Takuro ; et al.	2015-11-26
Mark position detection device and mark position detection method, exposure apparatus using same, and device manufacturing method Grant 8,339,570 - Tsujikawa December 25, 2	2012-12-25
Mark Position Detection Device And Mark Position Detection Method, Exposure Apparatus Using Same, And Device Manufacturing Method App 20100271609 - Tsujikawa; Takuro	2010-10-28

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