Tsuji; Toshihiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsuji; Toshihiko.The latest application filed is for "image pickup apparatus".

Company Profile

0.48.39

Tsuji; Toshihiko - Utsunomiya JP
Tsuji; Toshihiko - Utsunomiya-shi JP
Tsuji; Toshihiko - Tochigi JP
Tsuji; Toshihiko - Tochigi-ken JP
Tsuji; Toshihiko - Saitama-ken JP
Tsuji; Toshihiko - Saitama JP
Tsuji, Toshihiko - Saitama-shi JP
Tsuji; Toshihiko - Chiba-ken JP
Tsuji; Toshihiko - Chiyoda-ku JP
Tsuji; Toshihiko - Urawa JP
Tsuji, Toshihiko - Urawa-shi JP
Tsuji; Toshihiko - Atsugi JP
Tsuji; Toshihiko - Ayase JP
Tsuji; Toshihiko - Kawasaki JP
Tsuji; Toshihiko - Hiroshima JP
Tsuji; Toshihiko - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imaging apparatus Grant 9,329,376 - Higaki , et al. May 3, 2	2016-05-03
Imaging apparatus equipped with illumination optical system having a plurality of optical integrators that guide light Grant 9,332,166 - Kawakami , et al. May 3, 2	2016-05-03
Illumination optical system, exposure apparatus, and method of manufacturing device Grant 8,891,062 - Tsuji November 18, 2	2014-11-18
Image Pickup Apparatus App 20140160267 - Kawakami; Tomoaki ; et al.	2014-06-12
Imaging Apparatus App 20130222569 - Kawakami; Tomoaki ; et al.	2013-08-29
Imaging Apparatus App 20130169859 - Kawakami; Tomoaki ; et al.	2013-07-04
Microscope, Image Acquisition Apparatus, And Image Acquisition System App 20130169788 - Tsuji; Toshihiko ; et al.	2013-07-04
Microscope App 20130162801 - Kajiyama; Kazuhiko ; et al.	2013-06-27
Imaging Apparatus App 20120327208 - Higaki; Yoshinari ; et al.	2012-12-27
Illumination optical system and exposure apparatus Grant 8,284,378 - Kajiyama , et al. October 9, 2	2012-10-09
Illumination Optical System, Exposure Apparatus, And Method Of Manufacturing Device App 20120170013 - Tsuji; Toshihiko	2012-07-05
Exposure apparatus and device manufacturing method Grant 8,035,668 - Sugita , et al. October 11, 2	2011-10-11
Exposure apparatus Grant 7,714,987 - Kajiyama , et al. May 11, 2	2010-05-11
Illumination Optical System And Exposure Apparatus App 20100053584 - Kajiyama; Kazuhiko ; et al.	2010-03-04
Illumination optical system and exposure apparatus including the same Grant 7,538,856 - Kajiyama , et al. May 26, 2	2009-05-26
Illumination Optical System And Exposure Apparatus Including The Same App 20090027641 - Kajiyama; Kazuhiko ; et al.	2009-01-29
Exposure Apparatus App 20080088814 - KAJIYAMA; Kazuhiko ; et al.	2008-04-17
Illumination system and exposure apparatus Grant 7,324,187 - Tsuji , et al. January 29, 2	2008-01-29
Exposure apparatus and device fabrication method using the same Grant 7,274,435 - Hiura , et al. September 25, 2	2007-09-25
Illumination optical system, exposure apparatus, and device manufacturing method with modified illumination generator Grant 7,265,816 - Tsuji September 4, 2	2007-09-04
Exposure apparatus and device manufacturing method App 20070164234 - Tsuji; Toshihiko ; et al.	2007-07-19
Illumination apparatus, exposure apparatus and device manufacturing method Grant 7,239,375 - Tsuji July 3, 2	2007-07-03
Illumination Apparatus, Exposure Apparatus And Device Manufacturing Method App 20060250600 - TSUJI; Toshihiko	2006-11-09
Illumination apparatus, exposure apparatus and device manufacturing method Grant 7,130,025 - Tsuji October 31, 2	2006-10-31
Exposure device, exposure method and device manufacturing method Grant 7,116,396 - Tsuji , et al. October 3, 2	2006-10-03
Illumination optical system and exposure apparatus Grant 7,110,084 - Tsuji September 19, 2	2006-09-19
Exposure system and method for manufacturing device Grant 7,106,414 - Tsuji , et al. September 12, 2	2006-09-12
Exposure apparatus and device manufacturing method App 20060158504 - Sugita; Mitsuro ; et al.	2006-07-20
Illumination optical system and exposure apparatus Grant 7,064,806 - Tsuji June 20, 2	2006-06-20
Illumination optical system in exposure apparatus Grant 7,050,154 - Tsuji May 23, 2	2006-05-23
Illumination optical system, exposure apparatus, and device manufacturing method App 20050280794 - Tsuji, Toshihiko	2005-12-22
Exposure method and apparatus App 20050236584 - Tsuji, Toshihiko	2005-10-27
Illumination apparatus, exposure apparatus and device manufacturing method App 20050206871 - Tsuji, Toshihiko	2005-09-22
Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same Grant 6,946,666 - Saito , et al. September 20, 2	2005-09-20
Exposure apparatus Grant 6,922,910 - Tsuji , et al. August 2, 2	2005-08-02
Illumination system, projection exposure apparatus and device manufacturing method Grant 6,919,951 - Tsuji July 19, 2	2005-07-19
Exposure system and method for manufacturing device App 20050140946 - Tsuji, Toshihiko ; et al.	2005-06-30
Exposure device, exposure method and device manufacturing method App 20050140959 - Tsuji, Toshihiko ; et al.	2005-06-30
Exposure method and exposure apparatus Grant 6,903,799 - Tsuji , et al. June 7, 2	2005-06-07
Illumination system and exposure apparatus App 20050110972 - Tsuji, Toshihiko ; et al.	2005-05-26
Illumination optical system and exposure apparatus App 20050105290 - Tsuji, Toshihiko	2005-05-19
Projection exposure apparatus and device manufacturing method Grant 6,885,432 - Tsuji April 26, 2	2005-04-26
Illumination optical system and exposure apparatus App 20050057738 - Tsuji, Toshihiko	2005-03-17
Illumination optical system and exposure apparatus App 20050057737 - Tsuji, Toshihiko	2005-03-17
Optical element with alignment mark, and optical system having such optical element Grant 6,856,392 - Tsuji February 15, 2	2005-02-15
Illumination optical system in exposure apparatus App 20050030509 - Tsuji, Toshihiko	2005-02-10
Projection exposure apparatus and device manufacturing method App 20050030510 - Tsuji, Toshihiko	2005-02-10
Inspection method and apparatus for projection optical systems Grant 6,850,327 - Taniguchi , et al. February 1, 2	2005-02-01
Illumination optical system in exposure apparatus Grant 6,816,234 - Tsuji November 9, 2	2004-11-09
Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same Grant 6,806,477 - Saito , et al. October 19, 2	2004-10-19
Exposure method and exposure apparatus App 20040141164 - Tsuji, Toshihiko ; et al.	2004-07-22
Scanning exposure apparatus and device manufacturing method using the same Grant 6,753,943 - Tsuji , et al. June 22, 2	2004-06-22
Exposure Apparatus App 20040055177 - Tsuji, Toshihiko ; et al.	2004-03-25
Projection exposure apparatus and device manufacturing method App 20040001190 - Tsuji, Toshihiko	2004-01-01
Optical unit and optical instrument having the same Grant 6,606,195 - Tsuji August 12, 2	2003-08-12
Illuminance measurement apparatus, exposure apparatus, and exposure method Grant 6,603,532 - Tsuji , et al. August 5, 2	2003-08-05
Exposure apparatus and method App 20030081191 - Nishi, Kenji ; et al.	2003-05-01
Illuminance meter, illuminance measuring method and exposure apparatus Grant 6,549,277 - Narushima , et al. April 15, 2	2003-04-15
Illumination system, projection exposure apparatus and device manufacturing method App 20030031017 - Tsuji, Toshihiko	2003-02-13
Inspection method and apparatus for projection optical systems App 20030025908 - Taniguchi, Tetsuo ; et al.	2003-02-06
Scanning exposure apparatus and device manufacturing method using the same App 20020131032 - Tsuji, Toshihiko ; et al.	2002-09-19
Irradiance photometer and exposure apparatus App 20020101574 - Tsuji, Toshihiko	2002-08-01
Optical Unit And Optical Instrument Having The Same App 20020048085 - TSUJI, TOSHIHIKO	2002-04-25
Illuminance measurement apparatus, exposure apparatus, and exposure method App 20020048007 - Tsuji, Toshihiko ; et al.	2002-04-25
Illumination optical system in exposure apparatus App 20010055107 - Tsuji, Toshihiko	2001-12-27
Position Detection Device, Apparatus Using The Same, Exposure Apparatus, And Device Manufacturing Method Using The Same App 20010042838 - SAITO, KENJI ; et al.	2001-11-22
Inspection method and apparatus for projection optical systems Grant 6,151,122 - Taniguchi , et al. November 21, 2	2000-11-21
Exposure apparatus and method Grant 6,002,467 - Nishi , et al. December 14, 1	1999-12-14
Exposure apparatus and method for measuring a quantity of light with temperature variations Grant 5,894,341 - Nishi , et al. April 13, 1	1999-04-13
Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position Grant 5,861,952 - Tsuji , et al. January 19, 1	1999-01-19
Inspection system and device manufacturing method using the same Grant 5,767,962 - Suzuki , et al. June 16, 1	1998-06-16
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object Grant 5,751,426 - Nose , et al. May 12, 1	1998-05-12
Inspection system for original with pellicle Grant 5,652,657 - Yoshii , et al. July 29, 1	1997-07-29
Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern Grant 5,486,919 - Tsuji , et al. January 23, 1	1996-01-23
Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same Grant 5,461,474 - Yoshii , et al. October 24, 1	1995-10-24
Projection exposing apparatus Grant 5,424,552 - Tsuji , et al. June 13, 1	1995-06-13
Fine structure evaluation apparatus and method Grant 5,270,794 - Tsuji , et al. December 14, 1	1993-12-14
Projection-type optical apparatus Grant 5,137,349 - Taniguchi , et al. August 11, 1	1992-08-11
Plastic seat-back framework and method for the manufacture thereof Grant 4,390,209 - Izuno , et al. June 28, 1	1983-06-28
Reactor Grant 4,227,166 - Tsuji , et al. October 7, 1	1980-10-07
Electric heater panel Grant 4,052,588 - Nakamura , et al. October 4, 1	1977-10-04