Tsuei; Lun
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsuei; Lun.The latest application filed is for "manifold assembly".
- Tsuei; Lun - Dallas TX
- Tsuei; Lun - Mountain View CA US
| Patent | Date |
|---|---|
| Manifold assembly Grant 10,738,928 - Arizpe , et al. A | 2020-08-11 |
| Gas distribution blocker apparatus Grant 9,714,465 - Tsuei , et al. July 25, 2 | 2017-07-25 |
| Manifold Assembly App 20170130885 - Arizpe; Ron ; et al. | 2017-05-11 |
| Manifold assembly Grant 9,568,138 - Arizpe , et al. February 14, 2 | 2017-02-14 |
| Manifold Assembly App 20150000766 - Arizpe; Ron ; et al. | 2015-01-01 |
| Apparatus for etching semiconductor wafers Grant 8,333,842 - Lubomirsky , et al. December 18, 2 | 2012-12-18 |
| Mixing Energized and Non-Energized Gases for Silicon Nitride Deposition App 20120009803 - Jung; Kee Bum ; et al. | 2012-01-12 |
| Slit valve Grant 7,806,383 - Tran , et al. October 5, 2 | 2010-10-05 |
| Apparatus And Method For Preventing Process System Contamination App 20100151127 - Cho; Tom K. ; et al. | 2010-06-17 |
| Gas Distribution Blocker Apparatus App 20100136216 - Tsuei; Lun ; et al. | 2010-06-03 |
| Adjustable Gas Distribution Apparatus App 20100112212 - Zhang; Lin ; et al. | 2010-05-06 |
| Multiple Gas Feed Apparatus And Method App 20100104754 - TSO; ALAN ; et al. | 2010-04-29 |
| Methods For Fabricating Faceplate Of Semiconductor Apparatus App 20100071210 - TAN; TIEN FAK ; et al. | 2010-03-25 |
| Apparatus For Etching Semiconductor Wafers App 20090283217 - LUBOMIRSKY; DMITRY ; et al. | 2009-11-19 |
| Counter-balanced Substrate Support App 20090120584 - Lubomirsky; Dmitry ; et al. | 2009-05-14 |
| Manifold Assembly App 20090000550 - Tran; Toan Q. ; et al. | 2009-01-01 |
| Slit Valve App 20080296304 - Tran; Toan Q. ; et al. | 2008-12-04 |
| Mixing energized and non-energized gases for silicon nitride deposition App 20060162661 - Jung; Kee Bum ; et al. | 2006-07-27 |
| Heated gas distribution plate for a processing chamber Grant 6,946,033 - Tsuei , et al. September 20, 2 | 2005-09-20 |
| Edge flow faceplate for improvement of CVD film properties App 20050126484 - Zhao, Maosheng ; et al. | 2005-06-16 |
| Heated gas distribution plate for a processing chamber App 20040050492 - Tsuei, Lun ; et al. | 2004-03-18 |
| Methods for operating a chemical vapor deposition chamber using a heated gas distribution plate App 20040052969 - Lee, Ju-Hyung ; et al. | 2004-03-18 |
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