loadpatents
Patent applications and USPTO patent grants for Tsudaka; Keisuke.The latest application filed is for "method of correcting mask pattern and mask, method of exposure, apparatus thereof, and photomask and semiconductor device using the same".
Patent | Date |
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Method of correcting mask pattern and mask, method of exposure, apparatus thereof, and photomask and semiconductor device using the same Grant 6,154,563 - Tsudaka November 28, 2 | 2000-11-28 |
Correction method and correction apparatus of mask pattern Grant 6,058,203 - Tsudaka May 2, 2 | 2000-05-02 |
Correction method and correction apparatus of mask pattern Grant 6,042,257 - Tsudaka March 28, 2 | 2000-03-28 |
Method of correcting mask pattern and mask, method of exposure, apparatus thereof, and photomask and semiconductor device using the same Grant 6,014,456 - Tsudaka January 11, 2 | 2000-01-11 |
Method and apparatus for correcting exposure patterns, and exposure mask, method of exposing and semiconductor device Grant 5,991,006 - Tsudaka November 23, 1 | 1999-11-23 |
Correction method and correction apparatus of mask pattern Grant 5,969,801 - Tsudaka October 19, 1 | 1999-10-19 |
Correction method and correction apparatus of mask pattern Grant 5,825,647 - Tsudaka October 20, 1 | 1998-10-20 |
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