Tsuchiyama; Hirofumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tsuchiyama; Hirofumi.The latest application filed is for "surface inspection apparatus and method thereof".

Company Profile

0.15.16

Tsuchiyama; Hirofumi - Hitachinaka JP
Tsuchiyama; Hirofumi - Kodaira JP
Tsuchiyama, Hirofumi - Kadaira JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Surface inspection apparatus and method thereof Grant 9,551,670 - Ishimaru , et al. January 24, 2	2017-01-24
Surface Inspection Apparatus And Method Thereof App 20140218723 - ISHIMARU; Ichiro ; et al.	2014-08-07
Surface inspection apparatus and method thereof Grant 8,729,514 - Ishimaru , et al. May 20, 2	2014-05-20
Surface Inspection Apparatus And Method Thereof App 20120069329 - ISHIMARU; Ichiro ; et al.	2012-03-22
Fabrication method of semiconductor integrated circuit device Grant 7,977,234 - Arai , et al. July 12, 2	2011-07-12
Surface inspection apparatus and method thereof Grant 7,952,085 - Ishimaru , et al. May 31, 2	2011-05-31
Fabrication Method Of Semiconductor Integrated Circuit Device App 20100227474 - ARAI; Toshiyuki ; et al.	2010-09-09
Fabrication method of semiconductor integrated circuit device Grant 7,718,526 - Arai , et al. May 18, 2	2010-05-18
Surface Inspection Apparatus And Method Thereof App 20090103078 - ISHIMARU; Ichiro ; et al.	2009-04-23
Surface inspection apparatus and method thereof Grant 7,417,244 - Ishimaru , et al. August 26, 2	2008-08-26
Fabrication method of semiconductor integrated circuit device App 20070259522 - Arai; Toshiyuki ; et al.	2007-11-08
Fabrication method of semiconductor integrated circuit device Grant 7,250,365 - Arai , et al. July 31, 2	2007-07-31
Surface inspection apparatus and method thereof Grant 7,242,016 - Ishimaru , et al. July 10, 2	2007-07-10
Chemical mechanical polishing method, chemical mechanical polishing system, and manufacturing method of semiconductor device Grant 7,234,998 - Aoyagi , et al. June 26, 2	2007-06-26
Surface inspection apparatus and method thereof App 20070121108 - Ishimaru; Ichiro ; et al.	2007-05-31
Fabrication method of semiconductor integrated circuit device Grant 6,979,650 - Nakabayshi , et al. December 27, 2	2005-12-27
Fabrication method of semiconductor integrated circuit device Grant 6,979,649 - Arai , et al. December 27, 2	2005-12-27
Fabrication method of semiconductor integrated circuit device App 20050250331 - Arai, Toshiyuki ; et al.	2005-11-10
Chemical mechanical polishing method, chemical mechanical polishing system, and manufacturing method of semiconductor device App 20050197046 - Aoyagi, Masahiro ; et al.	2005-09-08
Surface inspection apparatus and method thereof App 20050185172 - Ishimaru, Ichiro ; et al.	2005-08-25
Surface inspection apparatus and method thereof Grant 6,894,302 - Ishimaru , et al. May 17, 2	2005-05-17
Fabrication method of semiconductor integrated circuit device App 20040248418 - Nakabayshi, Shinichi ; et al.	2004-12-09
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,806,970 - Hirose , et al. October 19, 2	2004-10-19
Manufacturing method of semiconductor device, automatic operation method and automatic operation system of semiconductor manufacturing apparatus, and automatic operation method of CMP apparatus App 20040203321 - Tsuchiyama, Hirofumi ; et al.	2004-10-14
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,753,972 - Hirose , et al. June 22, 2	2004-06-22
Thin film thickness measuring method and apparatus, and mehtod and apparatus for manufacturing a thin film device using the same App 20040070773 - Hirose, Takenori ; et al.	2004-04-15
Fabrication method of semiconductor integrated circuit device App 20020160610 - Arai, Toshiyuki ; et al.	2002-10-31
Fabrication method of semiconductor integrated circuit device App 20020155650 - Nakabayshi, Shinichi ; et al.	2002-10-24
Method of manufacturing semiconductor integrated circuit device App 20020042154 - Nakabayashi, Shinichi ; et al.	2002-04-11
Surface inspection apparatus and method thereof App 20010030296 - Ishimaru, Ichiro ; et al.	2001-10-18

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