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Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Grant 7,700,381 - Arikado , et al. April 20, 2 | 2010-04-20 |
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Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus Grant 7,314,766 - Sugamoto , et al. January 1, 2 | 2008-01-01 |
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Method of inspecting semiconductor wafer App 20060281281 - Tanzawa; Katsujiro ;   et al. | 2006-12-14 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them App 20060131696 - Arikado; Tsunetoshi ;   et al. | 2006-06-22 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them Grant 7,057,259 - Arikado , et al. June 6, 2 | 2006-06-06 |
Method for evaluating an SOI substrate, evaluation processor, and method for manufacturing a semiconductor device Grant 6,963,630 - Umezawa , et al. November 8, 2 | 2005-11-08 |
System and method for controlling manufacturing processes, and method for manufacturing a semiconductor device App 20050233601 - Tsuchiya, Norihiko ;   et al. | 2005-10-20 |
Method of manufacturing a substrate having shallow trench isolation Grant 6,919,260 - Umezawa , et al. July 19, 2 | 2005-07-19 |
Semiconductor wafer treatment method, semiconductor wafer inspection method, semiconductor device development method and semiconductor wafer treatment apparatus App 20040137752 - Sugamoto, Junji ;   et al. | 2004-07-15 |
Method for evaluating an SOI substrate, evaluation processor, and method for manufacturing a semiconductor device App 20030128809 - Umezawa, Kaori ;   et al. | 2003-07-10 |
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them App 20030003608 - Arikado, Tsunetoshi ;   et al. | 2003-01-02 |
Defect-position identifying method for semiconductor substrate Grant 6,320,655 - Matsushita , et al. November 20, 2 | 2001-11-20 |
Semiconductor wafer and method of manufacturing the same Grant 6,146,911 - Tsuchiya , et al. November 14, 2 | 2000-11-14 |
Substrate having shallow trench isolation Grant 5,994,756 - Umezawa , et al. November 30, 1 | 1999-11-30 |
Dielectrically isolated substrate and method for manufacturing the same Grant 5,739,575 - Numano , et al. April 14, 1 | 1998-04-14 |
Semiconductor silicon wafer and process for producing it Grant 5,738,942 - Kubota , et al. April 14, 1 | 1998-04-14 |
Semiconductor device and a method for manufacturing the same Grant 5,675,176 - Ushiku , et al. October 7, 1 | 1997-10-07 |
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Wafer processsing method for manufacturing wafers having contaminant-gettering damage on one surface Grant 5,071,776 - Matsushita , et al. * December 10, 1 | 1991-12-10 |