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Patent applications and USPTO patent grants for TSUCHIGUCHI; Daihi.The latest application filed is for "valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device".
Patent | Date |
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Valve Device, Flow Rate Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus Using The Valve Device App 20220196163 - TSUCHIGUCHI; Daihi ;   et al. | 2022-06-23 |
Valve Device, Flow Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus App 20220082176 - TANNO; Ryutaro ;   et al. | 2022-03-17 |
Diaphragm Valve And Monitoring Method Thereof App 20210262576 - SUZUKI; Yuya ;   et al. | 2021-08-26 |
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