Tsiang; Michael Wenyoung
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsiang; Michael Wenyoung.The latest application filed is for "hardmask tuning by electrode adjustment".
- Tsiang; Michael Wenyoung - Milpitas CA
- Tsiang; Michael Wenyoung - Fremont CA
| Patent | Date |
|---|---|
| Tensile Nitride Deposition Systems And Methods App 20220130661 - Tsiang; Michael Wenyoung ; et al. | 2022-04-28 |
| Hardmask Tuning By Electrode Adjustment App 20220130665 - Tsiang; Michael Wenyoung ; et al. | 2022-04-28 |
| Systems And Methods For Analyzing Defects In Cvd Films App 20220115275 - Pandit; Mandar B. ; et al. | 2022-04-14 |
| Oxidation reduction for SiOC film Grant 11,133,177 - Seamons , et al. September 28, 2 | 2021-09-28 |
| Method to enable high temperature processing without chamber drifting Grant 11,060,189 - Tsiang , et al. July 13, 2 | 2021-07-13 |
| Pecvd Process App 20200399756 - RAJAGOPALAN; Nagarajan ; et al. | 2020-12-24 |
| PECVD process Grant 10,793,954 - Rajagopalan , et al. October 6, 2 | 2020-10-06 |
| Oxidation Reduction For Sioc Film App 20200203154 - SEAMONS; Martin Jay ; et al. | 2020-06-25 |
| Methods For Depositing Phosphorus-doped Silicon Nitride Films App 20200190664 - HU; Kesong ; et al. | 2020-06-18 |
| Method To Enable High Temperature Processing Without Chamber Drifting App 20200095677 - TSIANG; Michael Wenyoung ; et al. | 2020-03-26 |
| Dry etch rate reduction of silicon nitride films Grant 10,515,796 - Tsiang , et al. Dec | 2019-12-24 |
| VNAND tensile thick TEOS oxide Grant 10,483,282 - Tsiang , et al. Nov | 2019-11-19 |
| Vnand Tensile Thick Teos Oxide App 20190229128 - TSIANG; Michael Wenyoung ; et al. | 2019-07-25 |
| Dry Etch Rate Reduction Of Silicon Nitride Films App 20190157077 - TSIANG; Michael Wenyoung ; et al. | 2019-05-23 |
| Method for PECVD overlay improvement Grant 10,236,225 - Suzuki , et al. | 2019-03-19 |
| VNAND tensile thick TEOS oxide Grant 10,199,388 - Tsiang , et al. Fe | 2019-02-05 |
| Pecvd Process App 20180258535 - RAJAGOPALAN; Nagarajan ; et al. | 2018-09-13 |
| PECVD process Grant 10,060,032 - Rajagopalan , et al. August 28, 2 | 2018-08-28 |
| Method For Pecvd Overlay Improvement App 20180226306 - SUZUKI; Yoichi ; et al. | 2018-08-09 |
| Method for PECVD overlay improvement Grant 9,947,599 - Suzuki , et al. April 17, 2 | 2018-04-17 |
| Pecvd Process App 20180066364 - RAJAGOPALAN; Nagarajan ; et al. | 2018-03-08 |
| PECVD process Grant 9,816,187 - Rajagopalan , et al. November 14, 2 | 2017-11-14 |
| Method For Pecvd Overlay Improvement App 20170309525 - SUZUKI; Yoichi ; et al. | 2017-10-26 |
| Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
| Vnand Tensile Thick Teos Oxide App 20170062469 - TSIANG; Michael Wenyoung ; et al. | 2017-03-02 |
| Pecvd Process App 20170016118 - RAJAGOPALAN; Nagarajan ; et al. | 2017-01-19 |
| PECVD process Grant 9,458,537 - Rajagopalan , et al. October 4, 2 | 2016-10-04 |
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