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Patent applications and USPTO patent grants for Tseng; Shuen-Liang.The latest application filed is for "sputter target magnet".
Patent | Date |
---|---|
Systems and methods for uniform target erosion magnetic assemblies Grant 11,390,520 - Chung , et al. July 19, 2 | 2022-07-19 |
Sputter Target Magnet App 20220223391 - HE; Ming-Jie ;   et al. | 2022-07-14 |
Sputter target magnet Grant 11,322,338 - He , et al. May 3, 2 | 2022-05-03 |
Sputter Target Magnet App 20190066988 - HE; Ming-Jie ;   et al. | 2019-02-28 |
Systems And Methods For Uniform Target Erosion Magnetic Assemblies App 20190035611 - Chung; Chen-Fang ;   et al. | 2019-01-31 |
Patterned processing kits for material processing Grant 9,799,497 - Chung , et al. October 24, 2 | 2017-10-24 |
Patterned Processing Kits For Material Processing App 20150047563 - CHUNG; CHEN-FANG ;   et al. | 2015-02-19 |
Pre-cleaning tool and semiconductor processing apparatus using the same App 20080078326 - Sung; Kuo-Liang ;   et al. | 2008-04-03 |
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