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Apparatus and methods for chemical mechanical polishing
Grant 10,875,148 - Peng , et al. December 29, 2 | 2020-12-29 |
Apparatus And Methods For Chemical Mechanical Polishing
App 20190375071 - PENG; HE HUI ; et al. | 2019-12-12 |
Apparatus and method for chemical mechanical polishing process control
Grant 10,096,482 - Hui , et al. October 9, 2 | 2018-10-09 |
Method and/or system for chemical mechanical planarization (CMP)
Grant 9,997,420 - Tsen , et al. June 12, 2 | 2018-06-12 |
Intra-field process control for lithography
Grant 9,733,577 - Hung , et al. August 15, 2 | 2017-08-15 |
Intra-field Process Control For Lithography
App 20170068169 - Hung; Ai-Jen ; et al. | 2017-03-09 |
Calibration apparatus and an adjustment method for a lithography apparatus
Grant 9,588,446 - Huang , et al. March 7, 2 | 2017-03-07 |
Calibration Apparatus And An Adjustment Method For A Lithography Apparatus
App 20160349633 - HUANG; Chen-Yen ; et al. | 2016-12-01 |
Scanner overlay correction system and method
Grant 9,442,392 - Tsen , et al. September 13, 2 | 2016-09-13 |
Systems and methods of automatic boundary control for semiconductor processes
Grant 9,250,619 - Hsu , et al. February 2, 2 | 2016-02-02 |
Apparatus and Method for Chemical Mechanical Polishing Process Control
App 20150348797 - Hui; Keung ; et al. | 2015-12-03 |
Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes
Grant 9,165,843 - Chen , et al. October 20, 2 | 2015-10-20 |
Semiconductor processing dispatch control
Grant 9,158,301 - Wu , et al. October 13, 2 | 2015-10-13 |
Overlay abnormality gating by Z data
Grant 9,123,583 - Lin , et al. September 1, 2 | 2015-09-01 |
Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process
Grant 9,102,033 - Hui , et al. August 11, 2 | 2015-08-11 |
Scanner overlay correction system and method
Grant 9,082,661 - Tsen , et al. July 14, 2 | 2015-07-14 |
Method And/or System For Chemical Mechanical Planarization (cmp)
App 20150187662 - Tsen; Yen-Di ; et al. | 2015-07-02 |
Scanner Overlay Correction System And Method
App 20150170904 - TSEN; Yen-Di ; et al. | 2015-06-18 |
Systems And Methods Of Automatically Detecting Failure Patterns For Semiconductor Wafer Fabrication Processes
App 20150125970 - CHEN; Jui-Long ; et al. | 2015-05-07 |
APC model extension using existing APC models
Grant 9,026,239 - Tsai , et al. May 5, 2 | 2015-05-05 |
Scanner Overlay Correction System And Method
App 20150027636 - TSEN; Yen-Di ; et al. | 2015-01-29 |
Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes
Grant 8,938,698 - Chen , et al. January 20, 2 | 2015-01-20 |
Overlay Abnormality Gating by Z Data
App 20150015870 - Lin; Chun-Hsien ; et al. | 2015-01-15 |
Scanner overlay correction system and method
Grant 8,889,434 - Tsen , et al. November 18, 2 | 2014-11-18 |
Semiconductor Processing Dispatch Control
App 20140303765 - Wu; Sunny ; et al. | 2014-10-09 |
Method of optimizing design for manufacturing (DFM)
Grant 8,793,638 - Hui , et al. July 29, 2 | 2014-07-29 |
Semiconductor processing dispatch control
Grant 8,781,614 - Wu , et al. July 15, 2 | 2014-07-15 |
Scanner Overlay Correction System And Method
App 20140170782 - TSEN; Yen-Di ; et al. | 2014-06-19 |
Systems And Methods Of Automatically Detecting Failure Patterns For Semiconductor Wafer Fabrication Processes
App 20140106474 - CHEN; Jui-Long ; et al. | 2014-04-17 |
Method of Optimizing Design for Manufacturing (DFM)
App 20140033159 - Hui; Keuing ; et al. | 2014-01-30 |
Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes
Grant 8,627,251 - Chen , et al. January 7, 2 | 2014-01-07 |
Systems And Methods Of Automatically Detecting Failure Patterns For Semiconductor Wafer Fabrication Processes
App 20130288403 - CHEN; Jui-Long ; et al. | 2013-10-31 |
Processing exception handling
Grant 8,549,012 - Tsai , et al. October 1, 2 | 2013-10-01 |
Systems And Methods Of Automatic Boundary Control For Semiconductor Processes
App 20130144423 - HSU; Chih-Wei ; et al. | 2013-06-06 |
Two-dimensional multi-products multi-tools advanced process control
Grant 8,406,904 - Hsu , et al. March 26, 2 | 2013-03-26 |
Semiconductor Processing Dispatch Control
App 20130013097 - Wu; Sunny ; et al. | 2013-01-10 |
Semiconductor processing dispatch control
Grant 8,295,965 - Wu , et al. October 23, 2 | 2012-10-23 |
Defense system in advanced process control
Grant 8,288,063 - Lu , et al. October 16, 2 | 2012-10-16 |
Two-dimensional Multi-products Multi-tools Advanced Process Control
App 20120215337 - Hsu; Chih-Wei ; et al. | 2012-08-23 |
Physical failure analysis guiding methods
Grant 8,205,173 - Wu , et al. June 19, 2 | 2012-06-19 |
Apparatus And Method For Target Thickness And Surface Profile Uniformity Control Of Multi-head Chemical Mechanical Polishing Process
App 20120129431 - HUI; KEUNG ; et al. | 2012-05-24 |
Defense System in Advanced Process Control
App 20120028174 - Lu; Shin-Rung ; et al. | 2012-02-02 |
Semiconductor Processing Dispatch Control
App 20120016509 - Wu; Sunny ; et al. | 2012-01-19 |
Physical Failure Analysis Guiding Methods
App 20110314336 - Wu; Sunny ; et al. | 2011-12-22 |
APC Model Extension Using Existing APC Models
App 20110301736 - Tsai; Po-Feng ; et al. | 2011-12-08 |
Processing Exception Handling
App 20110282885 - Tsai; Po-Feng ; et al. | 2011-11-17 |
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