Tschischgale; Joerg

Patent Applications and Registrations

Patent applications and USPTO patent grants for Tschischgale; Joerg.The latest application filed is for "optical system of a microlithographic projection exposure apparatus".

Company Profile

0.2.6

Tschischgale; Joerg - Dresden DE

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Patent Activity

Patent	Date
Optical System Of A Microlithographic Projection Exposure Apparatus App 20100201960 - Tschischgale; Joerg ; et al.	2010-08-12
Metrology Mark with Elements Arranged in a Matrix, Method of Manufacturing Same and Alignment Method App 20100052191 - Trogisch; Sven ; et al.	2010-03-04
Non-Telecentric Lithography Apparatus and Method of Manufacturing Integrated Circuits App 20090097001 - Trogisch; Sven ; et al.	2009-04-16
Method for exposing a semiconductor wafer by applying periodic movement to a component Grant 7,443,484 - Nolscher , et al. October 28, 2	2008-10-28
Optical system of a microlithographic projection exposure apparatus Grant 7,423,765 - Tschischgale , et al. September 9, 2	2008-09-09
Arrangement for the transfer of structural elements of a photomask onto a substrate and method therefor App 20070229790 - Kuechler; Bernd ; et al.	2007-10-04
Method for exposing a semiconductor wafer App 20060256314 - Nolscher; Christoph ; et al.	2006-11-16
Optical system of a microlithographic projection exposure apparatus App 20060023179 - Tschischgale; Joerg ; et al.	2006-02-02

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